Zhao, S.; Wang, J.; Yan, G.; Shen, Z.; Zhao, W.; Wang, L.; Liu, X.
Surface Uniformity of Wafer-Scale 4H-SiC Epitaxial Layers Grown under Various Epitaxial Conditions. Coatings 2022, 12, 597.
https://doi.org/10.3390/coatings12050597
AMA Style
Zhao S, Wang J, Yan G, Shen Z, Zhao W, Wang L, Liu X.
Surface Uniformity of Wafer-Scale 4H-SiC Epitaxial Layers Grown under Various Epitaxial Conditions. Coatings. 2022; 12(5):597.
https://doi.org/10.3390/coatings12050597
Chicago/Turabian Style
Zhao, Siqi, Jiulong Wang, Guoguo Yan, Zhanwei Shen, Wanshun Zhao, Lei Wang, and Xingfang Liu.
2022. "Surface Uniformity of Wafer-Scale 4H-SiC Epitaxial Layers Grown under Various Epitaxial Conditions" Coatings 12, no. 5: 597.
https://doi.org/10.3390/coatings12050597
APA Style
Zhao, S., Wang, J., Yan, G., Shen, Z., Zhao, W., Wang, L., & Liu, X.
(2022). Surface Uniformity of Wafer-Scale 4H-SiC Epitaxial Layers Grown under Various Epitaxial Conditions. Coatings, 12(5), 597.
https://doi.org/10.3390/coatings12050597