Influence of Co-Content on the Optical and Structural Properties of TiO_x Thin Films Prepared by Gas Impulse Magnetron Sputtering

Round 1

Reviewer 1 Report

In this manuscript, the authors studied the influence of co-content on the optical and structural properties of TiOx thin films prepared by gas impulse magnetron sputtering. The manuscript is suggested to be accepted after the following issues are addressed.

1)      In the introduction part, the authors should add some figures related to the previous work, which is mostly added in review articles. The authors should explain and put references in the text.

2)      In materials and methods, the authors should mention the source of the compounds etc.

3)      On page no 17, line 108, the authors mentioned that “A detailed description of the Ti-Co target preparation method was described elsewhere…..”. The authors should add some basic information related to the target preparation.

4)      XRD is the basic tool to study the materials. The authors should add XRD data of the samples and more information, such as lattice parameters.  

5)      The surface of the thin films plays a vital role in the absorbance and transmittance. The authors measured the roughness of each film and compared the results using AFM

6)      To check the exact amount of elements, the authors should some basic characteristics, such as ICP tests, which should be supplemented.

7)      The authors mention that the transmittance was decreased with Co content. The authors should add more explanation.

8)      Many spelling and formatting typos in this paper, and the authors should check and revise them thoroughly.  

 

  

Many spelling and formatting typos in this paper, and the authors should check and revise them thoroughly.  

Author Response

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Author Response File: Author Response.pdf

Reviewer 2 Report

In this paper, the influence of Co-content on the optical and structural properties of TiOx thin films was studied. The experimental characterization was carried out from the aspects of morphology, elemental composition, optical properties and film hardness. The overall experimental description was very detailed. Here are some comments for this article:

(1) The introduction of Co doped TiO2 film is too general. The motivation of this work should be emphasized based on the detailed applications.

(2) How about the distribution of TiO2, CoOx in the film? The elemental mapping should be supplied. 

(3) Are there Co doped TiO2 or Ti doped CoOx forms in the film? Please prove it. 

 

None

Author Response

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Reviewer 3 Report

Following modifications are suggested:

1.       Figure 1. The data is for 2022 year only? or data of last 5-10 years. The author should need to mention clearly. Same should be mentioned for Figure 2 and 3.

2.       A separate abbreviation list should be given.

3.       The novelty and objectives of the current study should be presented in a detail and more clear way.

4.       Section 2: Add the model, company and country of the equipment and characterization tools used.

5.       Section 2.1: Schematic layout of preparation of thin films should be provided for better understanding.

6.       Figure 4: EDS spectrum is missing.

7.       The conclusion should be written with important findings.

Additional comments

1.       Section 3.1 The author checked the effect of cobalt content on 3 at. %, 19 at. %, 44 at. 149 % and 60 at. %. Why the author did not check the cobalt content lower than 3 at. %? because in conclusion the author claimed the highest transparency at 3 at. %. The author should analyze the optimum results.

2.       Section 2.1 The author used  GIMS [40–45] method for preparation of (Ti, Co)Ox thin films. Did the author make any changes in synthesis than the said method in the novelty of the current study?

3.       XPS analysis, how much quantity of cobalt layer was deposited with different cobalt at. %?

4.       The author must add the full XPS spectrum graph for composite bonding.

5.       Many references used in this study are older than 10 years. Author must use recent appropriate references. 

Author Response

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Author Response File: Author Response.pdf

Reviewer 4 Report

Comments for author File: Comments.pdf

Author Response

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Author Response File: Author Response.pdf

Round 2

Reviewer 1 Report

Accept in present form.

Minor editing of English language required

Reviewer 3 Report

The authors have revised appropriately 

Reviewer 4 Report

The manuscript has been revised accordingly, now I think it is acceptable for publication