Karnopp, J.; Neto, N.A.; Vieira, T.; Fraga, M.; Sobrinho, A.d.S.; Sagás, J.; Pessoa, R.
Exploring TMA and H2O Flow Rate Effects on Al2O3 Thin Film Deposition by Thermal ALD: Insights from Zero-Dimensional Modeling. Coatings 2024, 14, 578.
https://doi.org/10.3390/coatings14050578
AMA Style
Karnopp J, Neto NA, Vieira T, Fraga M, Sobrinho AdS, Sagás J, Pessoa R.
Exploring TMA and H2O Flow Rate Effects on Al2O3 Thin Film Deposition by Thermal ALD: Insights from Zero-Dimensional Modeling. Coatings. 2024; 14(5):578.
https://doi.org/10.3390/coatings14050578
Chicago/Turabian Style
Karnopp, Júlia, Nilton Azevedo Neto, ThaÃs Vieira, Mariana Fraga, Argemiro da Silva Sobrinho, Julio Sagás, and Rodrigo Pessoa.
2024. "Exploring TMA and H2O Flow Rate Effects on Al2O3 Thin Film Deposition by Thermal ALD: Insights from Zero-Dimensional Modeling" Coatings 14, no. 5: 578.
https://doi.org/10.3390/coatings14050578
APA Style
Karnopp, J., Neto, N. A., Vieira, T., Fraga, M., Sobrinho, A. d. S., Sagás, J., & Pessoa, R.
(2024). Exploring TMA and H2O Flow Rate Effects on Al2O3 Thin Film Deposition by Thermal ALD: Insights from Zero-Dimensional Modeling. Coatings, 14(5), 578.
https://doi.org/10.3390/coatings14050578
