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Journal: Coatings, 2024
Volume: 14
Number: 578
Article:
Exploring TMA and H2O Flow Rate Effects on Al2O3 Thin Film Deposition by Thermal ALD: Insights from Zero-Dimensional Modeling
Authors:
by
Júlia Karnopp, Nilton Azevedo Neto, ThaÃs Vieira, Mariana Fraga, Argemiro da Silva Sobrinho, Julio Sagás and Rodrigo Pessoa
Link:
https://www.mdpi.com/2079-6412/14/5/578
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