Suchikova, Y.; Kovachov, S.; Bohdanov, I.; Kozlovskiy, A.L.; Zdorovets, M.V.; Popov, A.I.
Improvement of β-SiC Synthesis Technology on Silicon Substrate. Technologies 2023, 11, 152.
https://doi.org/10.3390/technologies11060152
AMA Style
Suchikova Y, Kovachov S, Bohdanov I, Kozlovskiy AL, Zdorovets MV, Popov AI.
Improvement of β-SiC Synthesis Technology on Silicon Substrate. Technologies. 2023; 11(6):152.
https://doi.org/10.3390/technologies11060152
Chicago/Turabian Style
Suchikova, Yana, Sergii Kovachov, Ihor Bohdanov, Artem L. Kozlovskiy, Maxim V. Zdorovets, and Anatoli I. Popov.
2023. "Improvement of β-SiC Synthesis Technology on Silicon Substrate" Technologies 11, no. 6: 152.
https://doi.org/10.3390/technologies11060152
APA Style
Suchikova, Y., Kovachov, S., Bohdanov, I., Kozlovskiy, A. L., Zdorovets, M. V., & Popov, A. I.
(2023). Improvement of β-SiC Synthesis Technology on Silicon Substrate. Technologies, 11(6), 152.
https://doi.org/10.3390/technologies11060152