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Journal: Metrology, 2024
Volume: 4
Number: 27

Article: Neural Network Approach for Modelling and Compensation of Local Surface-Tilting-Dependent Topography Measurement Errors in Coherence Scanning Interferometry
Authors: by Sai Gao, Zhi Li and Uwe Brand
Link: https://www.mdpi.com/2673-8244/4/3/27

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