Basic MEMS Actuators
A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "A：Physics".
Deadline for manuscript submissions: closed (30 June 2024) | Viewed by 1843
Special Issue Editor
Interests: MEMS; metamaterials; nanophotonics; microfluidics
Special Issues, Collections and Topics in MDPI journals
Special Issue Information
Dear Colleagues,
With the rapid development of MEMS technology, it could be classified into many fields, such as CMOS MEMS, RF MEMS, optical MEMS, bio-MEMS, and so on. Current nano- and microtechnology provides an effective approach to specifically perform actuation and sensing functions using passive or active manipulations enabling novel breakthrough applications.
This Special Issue on “Basic MEMS Actuators” brings together multidisciplinary interest in one journal entirely devoted to disseminating information on all aspects of research and development of MEMS devices for transducing physical signals. The aim is to publish research on actuators, structures, integrated sensors–actuators, microsystems, and other devices or subdevices ranging in size from millimeters to sub-microns; micromechatronics; microelectromechanical systems; microoptomechanical systems; microchemomechanical systems; microrobots; silicon and non-silicon fabrication techniques; basic studies of physical phenomena of interest to micromechanics; analysis of microsystems; exploration of new topics and materials related to micromechanics; microsystem-related problems such as power supplies and signal transmission; microsystem-related simulation tools; and other topics of interest to micromechanics. This Special Issue on “Basic MEMS Actuators” will publish original papers and invited review articles. The major areas of activity in the development of novel actuators, sensors, and transducers solicited and expected in this Special Issue are within the following device areas:
- Actuators and microsystems;
- Packaging and solid-state materials and fabrication processes;
- Nanoscale materials and fabrication;
- Composite materials, polymers, and fabrication processes;
- Microfluidic platform technologies;
- Energy, power, and thermal management;
- Chemical sensors and microsystems;
- Biosensors and microsystems including in vitro medical applications;
- Wearable and in vivo medical devices and microsystems;
- Physical sensors and microsystems;
- Rf mems, resonators, and oscillators;
- Optical and atomic transducers.
Experimental results, as well as design, simulation, and theory on each topic are of interest.
Dr. Yu-Sheng Lin
Guest Editor
Manuscript Submission Information
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Keywords
- MEMS
- actuator
- sensors
- microstructures
- nanomaterials
- nanophotonics
- metamaterials
- photonic integrated circuit
- microfluidics
- biochips
- 3D printing
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