Micro-Discharges
A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "A:Physics".
Deadline for manuscript submissions: closed (10 March 2023) | Viewed by 1988
Special Issue Editor
Special Issue Information
Dear Colleagues,
Micro-discharges have grown into the most interesting field of the physics of collisional nonequilibrium plasmas inevitably present in everyday life. Micro-discharges have demonstrated great promise for photon, radical and ionization sources, and laboratories for plasma and optical physics. Although the initial motivation for studies of micro discharges came from the need to optimize plasma screens, new applications were developed very rapidly. Localized silicon etching, tunable UV sources, gas spectroscopy, localized treatment of materials, and assembly of nanostructures, to name a few, all have features with dimensions in the micron and sub-micron range. Plasma-based microsystems can also find application in bio-microelectromechanical system (bio-MEMS) sterilization, small-scale materials processing, and microchemical analysis systems. However, the integrability of microsystems requires not only a reduction in size but also an understanding of the physics governing the new small-scale discharges. Micro-discharges are often referred to as “high-pressure glow discharges”, since their properties fall somewhere between those attributed to glow discharges and arcs. The fact that micro-discharges operate at atmospheric pressures makes them similar to arcs. Otherwise, electron temperature and the nonequilibrium characteristics of micro discharges are similar to those of glow discharges. Micro-discharges operate under such conditions that the role of boundary-dominated phenomena becomes very important.
Dr. Marija Radmilović-Radjenović
Guest Editor
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Keywords
- micro-discharges
- electrical breakdown
- electrical characterization of atmospheric pressure
- dielectric barrier discharge
- small-scale materials processing
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