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Micromachines
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Selected Papers from the 36th International Conference on Micro Electro...
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Selected Papers from the 36th International Conference on Micro Electro Mechanical Systems (MEMS 2023)

A special issue of Micromachines (ISSN 2072-666X).

Deadline for manuscript submissions: closed (20 May 2023) | Viewed by 6388

Special Issue Editors

Prof. Dr. Yi Zhang

grade E-Mail Website
Guest Editor
School of Electronic Science and Engineering, University of Electronic Science and Technology of China, Chengdu 611731, China
Interests: micro/nanomedicine; microfluidics; diagnostics; biosensing; nanomaterials
Special Issues, Collections and Topics in MDPI journals
Dr. Fei Wang

E-Mail Website
Guest Editor
School of Microelectronics, Southern University of Science and Technology, Shenzhen 518055, China
Interests: vibration energy harvesting; energy storage; gas sensor; MEMS devices
Special Issues, Collections and Topics in MDPI journals

Special Issue Information

Dear Colleagues,

Reflecting the rapid growth of the MEMS field and the commitment and success of its research community, the IEEE MEMS Conference series has evolved into a premier annual event reporting research results on every aspect of microsystems technology. In recent years, it has attracted over 700 participants and has presented more than 200 select papers in non-overlapping oral and poster sessions.

This Special Issue in Micromachines contains extended papers from the 36th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2023) held on 15–19 January 2023 in Munich, Germany (https://mems23.org/).

Topics of interest include but are not limited to:

  • Materials, fabrication, and packaging for generic MEMS and NEMS;
  • Micro- and nanofluidics;
  • Bio- and medical MEMS;
  • MEMS physical and chemical sensors;
  • MEMS/NEMS for optical, RF, and electromagnetics;
  • MEMS actuators and power MEMS;
  • Industry MEMS and advancing MEMS for products and sustainability;
  • Emerging technologies and new opportunities for MEMS/NEMS.

Prof. Dr. Yi Zhang
Dr. Fei Wang
Guest Editors

Manuscript Submission Information

Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.

Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Micromachines is an international peer-reviewed open access monthly journal published by MDPI.

Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 2600 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.

Keywords

  • MEMS/NEMS
  • sensors
  • microsystems
  • micro- and nanofluidics

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Published Papers (2 papers)

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15 pages, 2220 KiB  
Article
Thermal Flow Meter with Integrated Thermal Conductivity Sensor
by Shirin Azadi Kenari, Remco J. Wiegerink, Henk-Willem Veltkamp, Remco G. P. Sanders and Joost C. Lötters
Micromachines 2023, 14(7), 1280; https://doi.org/10.3390/mi14071280 - 21 Jun 2023
Cited by 2 | Viewed by 2591
Abstract
This paper presents a novel gas-independent thermal flow sensor chip featuring three calorimetric flow sensors for measuring flow profile and direction within a tube, along with a single-wire flow independent thermal conductivity sensor capable of identifying the gas type through a simple DC [...] Read more.
This paper presents a novel gas-independent thermal flow sensor chip featuring three calorimetric flow sensors for measuring flow profile and direction within a tube, along with a single-wire flow independent thermal conductivity sensor capable of identifying the gas type through a simple DC voltage measurement. All wires have the same dimensions of 2000 μm in length, 5 μm in width, and 1.2 μm in thickness. The design theory and COMSOL simulation are discussed and compared with the measurement results. The sensor’s efficacy is demonstrated with different gases, He, N2, Ar, and CO2, for thermal conductivity and thermal flow measurements. The sensor can accurately measure the thermal conductivity of various gases, including air, enabling correction of flow rate measurements based on the fluid type. The measured voltage from the thermal conductivity sensor for air corresponds to a calculated thermal conductivity of 0.02522 [W/m·K], with an error within 2.9%. Full article
(This article belongs to the Special Issue Selected Papers from the 36th International Conference on Micro Electro Mechanical Systems (MEMS 2023))
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12 pages, 2127 KiB  
Article
Integration of Microfluidic Chip and Probe with a Dual Pump System for Measurement of Single Cells Transient Response
by Xu Du, Shingo Kaneko, Hisataka Maruyama, Hirotaka Sugiura, Masaru Tsujii, Nobuyuki Uozumi and Fumihito Arai
Micromachines 2023, 14(6), 1210; https://doi.org/10.3390/mi14061210 - 7 Jun 2023
Cited by 4 | Viewed by 2525
Abstract
The integration of liquid exchange and microfluidic chips plays a critical role in the biomedical and biophysical fields as it enables the control of the extracellular environment and allows for the simultaneous stimulation and detection of single cells. In this study, we present [...] Read more.
The integration of liquid exchange and microfluidic chips plays a critical role in the biomedical and biophysical fields as it enables the control of the extracellular environment and allows for the simultaneous stimulation and detection of single cells. In this study, we present a novel approach for measuring the transient response of single cells using a system integrated with a microfluidic chip and a probe with a dual pump. The system was composed of a probe with a dual pump system, a microfluidic chip, optical tweezers, an external manipulator, an external piezo actuator, etc. Particularly, we incorporated the probe with the dual pump to allow for high-speed liquid change, and the localized flow control enabled a low disturbance contact force detection of single cells on the chip. Using this system, we measured the transient response of the cell swelling against the osmotic shock with a very fine time resolution. To demonstrate the concept, we first designed the double-barreled pipette, which was assembled with two piezo pumps to achieve a probe with the dual pump system, allowing for simultaneous liquid injection and suction. The microfluidic chip with on-chip probes was fabricated, and the integrated force sensor was calibrated. Second, we characterized the performance of the probe with the dual pump system, and the effect of the analysis position and area of the liquid exchange time was investigated. In addition, we optimized the applied injection voltage to achieve a complete concentration change, and the average liquid exchange time was achieved at approximately 3.33 ms. Finally, we demonstrated that the force sensor was only subjected to minor disturbances during the liquid exchange. This system was utilized to measure the deformation and the reactive force of Synechocystis sp. strain PCC 6803 in osmotic shock, with an average response time of approximately 16.33 ms. This system reveals the transient response of compressed single cells under millisecond osmotic shock which has the potential to characterize the accurate physiological function of ion channels. Full article
(This article belongs to the Special Issue Selected Papers from the 36th International Conference on Micro Electro Mechanical Systems (MEMS 2023))
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