Piezoelectric MEMS/NEMS—Materials, Devices, and Applications, Third Edition
A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "E：Engineering and Technology".
Deadline for manuscript submissions: 31 January 2025 | Viewed by 3889
Special Issue Editor
Interests: MEMS; microrobotics; smart materials; energy harvesting
Special Issues, Collections and Topics in MDPI journals
Special Issue Information
Dear Colleagues,
Piezoelectric materials have been playing a crucial role in a large number of devices and applications that have promoted a variety of today’s technological progress and impacted modern society. They are widely used as sensors and actuators, and they can be deposited as thin films over standard silicon substrates or flexible substrates. Typically, piezoelectric sensors feature high sensitivity, a wide dynamic range, and are self-powering; piezoelectric actuators enable high resolution, large force, and/or large displacement generation. The strong electromechanical coupling, simple geometric implementation, and high energy density endow the piezoelectric device with the capability of energy harvesting. The appeal of piezoelectric materials for MEMS/NEMS has been constantly growing, in particular, with the increasing commercial success of piezoelectric MEMS/NEMS devices. The upcoming era of Big Data, sensors, the Internet of Things (IoT), and Artificial Intelligence (AI) has been offering new opportunities and challenges to piezoelectric MEMS/NEMS devices, and we are seeing researchers throughout the world actively tapping into the state-of-the-art micro/nano-fabrication process, promoting advanced integration techniques, and exploring innovative applications to unleash the potential of piezoelectric MEMS/NEMS devices. In this Special Issue, we invite submissions exploring the latest advances in the field of piezoelectric MEMS/NEMS devices.
Dr. Wei Li
Guest Editor
Manuscript Submission Information
Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.
Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Micromachines is an international peer-reviewed open access monthly journal published by MDPI.
Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 2600 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.
Keywords
- piezoelectric sensors and actuators
- microrobotics
- piezoelectric MEMS resonators
- acoustic MEMS devices
- surface acoustic wave devices
- energy-harvesting technologies
- simulation and modeling of piezoelectric MEMS
- application of smart materials in MEMS
- micro/nanofabrication
Benefits of Publishing in a Special Issue
- Ease of navigation: Grouping papers by topic helps scholars navigate broad scope journals more efficiently.
- Greater discoverability: Special Issues support the reach and impact of scientific research. Articles in Special Issues are more discoverable and cited more frequently.
- Expansion of research network: Special Issues facilitate connections among authors, fostering scientific collaborations.
- External promotion: Articles in Special Issues are often promoted through the journal's social media, increasing their visibility.
- e-Book format: Special Issues with more than 10 articles can be published as dedicated e-books, ensuring wide and rapid dissemination.
Further information on MDPI's Special Issue polices can be found here.
