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Micromachines
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MEMS Inertial Sensors
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MEMS Inertial Sensors

A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "A：Physics".

Deadline for manuscript submissions: closed (28 February 2023) | Viewed by 22530

Special Issue Editors

Dr. Xudong Zou

E-Mail Website
Guest Editor
The State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100010, China
Interests: MEMS inertial sensors; MEMS resonators; PNT system; sensor fusion; 3D microsystem integration
Special Issues, Collections and Topics in MDPI journals
Dr. Chong Li

E-Mail Website
Guest Editor
Micro System and Precision Laboratory, Ocean University of China, Shandong 266100, China
Interests: MEMS inertial sensors; gyroscopes; precision control systems
Special Issues, Collections and Topics in MDPI journals

Special Issue Information

Dear Colleagues,

MEMS technology is revolutionary to inertial measurement because of its unique advantages, i.e., miniaturized size, low power consumption, high dynamic range and low costs. It is particularly suitable for navigation and control systems in robotics, autonomous car, personal indoor scenario and some other military applications. Even though, MEMS inertial sensors still suffers scientific barriers towards high-end applications. Major challenges include but are not limited to: microfabrication processes, new materials, device design and optimization, simulation techniques, interface circuits, measurement instrumentation, signal processing and sensors fusions. This Special Issue calls for the original research papers and reviews with the state-of-the-art results in the relevant topics.

Dr. Xudong Zou
Dr. Chong Li
Guest Editors

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Keywords

  • MEMS sensor
  • inertial sensor
  • accelerometer
  • gyroscopes
  • inertial navigation
  • sensor fusion

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Related Special Issue

Published Papers (10 papers)

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Research

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16 pages, 3581 KiB  
Article
A Noise Reduction Method for Four-Mass Vibration MEMS Gyroscope Based on ILMD and PTTFPF
by Zhong Li, Yikuan Gu, Jian Yang, Huiliang Cao and Guodong Wang
Micromachines 2022, 13(11), 1807; https://doi.org/10.3390/mi13111807 - 23 Oct 2022
Cited by 7 | Viewed by 1919
Abstract
In this paper, the structure and working principle of four-mass vibration MEMS gyroscope (FMVMG) are introduced, and the working modes of FMVMG are simulated and analyzed. On the basis of this, an improved noise reduction method based on interval local mean decomposition (ILMD) [...] Read more.
In this paper, the structure and working principle of four-mass vibration MEMS gyroscope (FMVMG) are introduced, and the working modes of FMVMG are simulated and analyzed. On the basis of this, an improved noise reduction method based on interval local mean decomposition (ILMD) and parabolic tracking time-frequency peak filtering (PTTFPF) is proposed. PTTFPF can resample the signal along a parabolic path and select the optimal filtering trajectory, but there is still a contradiction, choosing a short window length may lead to good signal amplitude retention, but the random noise reduction effect is not good, while choosing a long window length may lead to serious amplitude attenuation, but the random noise reduction effect is better. In order to achieve a better balance between effective signal amplitude preservation and random noise reduction, the ILMD method was used to improve PTTFPF. First, the original signal was decomposed into product functions (PFs) by local mean decomposition (LMD) method, and the sample entropy (SE) of each PF was calculated. The PFs are divided into three different components. Then, short window PTTFPF is used for useful PF and long window PTTFPF is used for mixed PF, noise PF is directly removed. Then the final signal is reconstructed. Finally, the denoised useful PF and mixed PF are reconstructed to obtain the final signal. The proposed ILMD-PTTFPF algorithm was verified by temperature experiments. The results show that the denoising performance of the ILMD-PTTFPF algorithm is better than that of traditional wavelet threshold denoising and Kalman filtering. Full article
(This article belongs to the Special Issue MEMS Inertial Sensors)
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13 pages, 2887 KiB  
Article
A High-Precision Method of Stiffness Axes Identification for Axisymmetric Resonator Gyroscopes
by Junhao Xiong, Kaiyong Yang, Tao Xia, Jingyu Li, Yonglei Jia, Yunfeng Tao, Yao Pan and Hui Luo
Micromachines 2022, 13(10), 1793; https://doi.org/10.3390/mi13101793 - 21 Oct 2022
Cited by 1 | Viewed by 1622
Abstract
Axisymmetric resonators are key elements of Coriolis vibratory gyroscopes (CVGs). The performance of a CVG is closely related to the stiffness and damping symmetry of its resonator. The stiffness symmetry of a resonator can be effectively improved by electrostatic tuning or mechanical trimming, [...] Read more.
Axisymmetric resonators are key elements of Coriolis vibratory gyroscopes (CVGs). The performance of a CVG is closely related to the stiffness and damping symmetry of its resonator. The stiffness symmetry of a resonator can be effectively improved by electrostatic tuning or mechanical trimming, both of which need an accurate knowledge of the azimuth angles of the two stiffness axes of the resonator. Considering that the motion of a non-ideal axisymmetric resonator can be decomposed as two principal oscillations with two different natural frequencies along two orthogonal stiffness axes, this paper introduces a novel high-precision method of stiffness axes identification. The method is based on measurements of the phase difference between the signals detected at two orthogonal sensing electrodes when an axisymmetric resonator is released from all the control forces of the force-to-rebalance mode and from different initial pattern angles. Except for simplicity, our method works with the eight-electrodes configuration, in no need of additional electrodes or detectors. Furthermore, the method is insensitive to the variation of natural frequencies and operates properly in the cases of either large or small frequency splits. The introduced method is tested on a resonator gyroscope, and two stiffness axes azimuth angles are obtained with a resolution better than 0.1°. A comparison of the experimental results and theoretical model simulations confirmed the validity of our method. Full article
(This article belongs to the Special Issue MEMS Inertial Sensors)
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23 pages, 9847 KiB  
Article
Structural Optimization and MEMS Implementation of the NV Center Phonon Piezoelectric Device
by Xiang Shen, Liye Zhao and Fei Ge
Micromachines 2022, 13(10), 1628; https://doi.org/10.3390/mi13101628 - 28 Sep 2022
Viewed by 1683
Abstract
The nitrogen-vacancy (NV) center of the diamond has attracted widespread attention because of its high sensitivity in quantum precision measurement. The phonon piezoelectric device of the NV center is designed on the basis of the phonon-coupled regulation mechanism. The propagation characteristics and acoustic [...] Read more.
The nitrogen-vacancy (NV) center of the diamond has attracted widespread attention because of its high sensitivity in quantum precision measurement. The phonon piezoelectric device of the NV center is designed on the basis of the phonon-coupled regulation mechanism. The propagation characteristics and acoustic wave excitation modes of the phonon piezoelectric device are analyzed. In order to improve the performance of phonon-coupled manipulation, the influence of the structural parameters of the diamond substrate and the ZnO piezoelectric layer on the phonon propagation characteristics are analyzed. The structure of the phonon piezoelectric device of the NV center is optimized, and its Micro-Electro-Mechanical System (MEMS) implementation and characterization are carried out. Research results show that the phonon resonance manipulation method can effectively increase the NV center’s spin transition probability using the MEMS phonon piezoelectric device prepared in this paper, improving the quantum spin manipulation efficiency. Full article
(This article belongs to the Special Issue MEMS Inertial Sensors)
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15 pages, 3874 KiB  
Article
Utilizing the Intrinsic Mode of Weakly Coupled Resonators for Temperature Compensation
by Kunfeng Wang, Xingyin Xiong, Zheng Wang, Pengcheng Cai, Liangbo Ma and Xudong Zou
Micromachines 2022, 13(9), 1447; https://doi.org/10.3390/mi13091447 - 1 Sep 2022
Cited by 1 | Viewed by 1648
Abstract
Accelerometers based on outputting amplitude ratios in weakly coupled resonators (WCRs) are attractive because their parametric sensitivity is higher by two or three orders of magnitudes than those based on outputting frequency. However, the impact of temperature on the coupler is a key [...] Read more.
Accelerometers based on outputting amplitude ratios in weakly coupled resonators (WCRs) are attractive because their parametric sensitivity is higher by two or three orders of magnitudes than those based on outputting frequency. However, the impact of temperature on the coupler is a key factor in accelerometer applications. This paper proposed a novel mode-localized WCR accelerometer with a temperature compensation mechanism, with sensitive elements incorporating a double-ended tuning fork (DETF) resonator, clamped–clamped (CC) resonator, and a micro-lever coupler. The DETF out-of-phase mode is utilized, which is only sensitive to temperature, to measure the temperature change of WCRs and complete the temperature compensation using the compensation algorithm. This proposed method has no time delay in measuring the temperature of sensitive elements and no temperature difference caused by the uneven temperature field. The parametric sensitivity in amplitude ratio (AR) to acceleration drifting with temperature was theoretically analyzed, and the novel device was designed and fabricated by a silicon-on-glass process. Both simulation and experiment results demonstrated that the coupling stiffness drifted with temperature, which resulted in the drifts of its sensitivity to acceleration and zero-bias stability. Using the intrinsic mode of WCRs, in terms of the DETF out-of-phase mode, as an in situ thermometer and carrying out the temperature compensation algorithm, the drift of zero bias could be suppressed from 102 mg to 4.5 mg (g is the gravity acceleration), and the drift of the parameter sensitivity in AR was suppressed from 0.74 AR/g to 0.02 AR/g with the temperature range from 330 K to 370 K and acceleration range from 0 g to 0.2 g. Full article
(This article belongs to the Special Issue MEMS Inertial Sensors)
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15 pages, 10930 KiB  
Article
Stability Boundary and Enhanced Solution of Dual-Mode Based Micro Gyroscope Mode Matching Technology
by Changda Xing, Xinning Wang, Zishuo Wang, Yuchen Wang and Chong Li
Micromachines 2022, 13(8), 1251; https://doi.org/10.3390/mi13081251 - 3 Aug 2022
Cited by 1 | Viewed by 1603
Abstract
During in-run mode matching under a dual-mode gyro scheme, the stability of the closed-loop control system has a boundary. This phenomenon will lead to the failure of the in-run frequency split calibration scheme when the initial mode mismatch is too severe to exceed [...] Read more.
During in-run mode matching under a dual-mode gyro scheme, the stability of the closed-loop control system has a boundary. This phenomenon will lead to the failure of the in-run frequency split calibration scheme when the initial mode mismatch is too severe to exceed the stability boundary. This paper gives a detailed analysis of this stability boundary through simulations and experiments. Results show that the length of the stable region will be affected by the resonant frequency and the Q value. High resonant frequency and low Q value will widen the stable region, but also reduce the sensitivity and rapidity of the calibration. In order to remove the limitation of the stability boundary while applying the in-run frequency split calibration under dual-mode architecture, this paper proposes an enhanced solution that combines both the dual-mode scheme and technology of mode switching. The application of mode switching achieves a pre-calibration of frequency split before the normal gyro operation. This solution is implemented in engineering on a hybrid gyro interface circuit prototype with single-mode and dual-mode. Validation experiments confirmed the effectiveness of this solution. Full article
(This article belongs to the Special Issue MEMS Inertial Sensors)
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21 pages, 18252 KiB  
Article
Digital Tri-Axis Accelerometer with X/Y-Axial Resonators and Z-Axial Capacitive Seesaw
by Dunzhu Xia, Mohan Yao and Jinhui Li
Micromachines 2022, 13(8), 1174; https://doi.org/10.3390/mi13081174 - 25 Jul 2022
Cited by 1 | Viewed by 2299
Abstract
A tri-axis accelerometer with a digital readout circuit and communication system is introduced. It is composed of two resonant accelerometers in the x and y-axis, and a seesaw capacitive one in the z-axis. The device is encapsulated in air to ensure that the [...] Read more.
A tri-axis accelerometer with a digital readout circuit and communication system is introduced. It is composed of two resonant accelerometers in the x and y-axis, and a seesaw capacitive one in the z-axis. The device is encapsulated in air to ensure that the z-axis works in an over-damped state. Moreover, the closed-loop drive circuit establishes the x-axis and y-axis in resonant mode, and the z-axis in force balance mode. A miniaturized measurement based on FPGA is designed to collect these output signals. The phase noise of the resonance part and the amplitude noise of the seesaw part are studied by simulation. The model can predict the contribution of each part to the measurement error and Allan variance. Multiplied clock and Kalman filter in sliding window are used to reduce the frequency error. The test results show that the accelerometer has low bias instability (<30 μg), low cross-coupling error (<0.5%), and low nonlinearity (<0.1%). The tri-axis digital accelerometer with serial ports is more valuable than the previous works with large commercial instruments. Full article
(This article belongs to the Special Issue MEMS Inertial Sensors)
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22 pages, 4717 KiB  
Article
A Hybrid Algorithm for Noise Suppression of MEMS Accelerometer Based on the Improved VMD and TFPF
by Yongjun Zhou, Huiliang Cao and Tao Guo
Micromachines 2022, 13(6), 891; https://doi.org/10.3390/mi13060891 - 31 May 2022
Cited by 12 | Viewed by 2315
Abstract
High-G MEMS accelerometer (HGMA) is a new type of sensor; it has been widely used in high precision measurement and control fields. Inevitably, the accelerometer output signal contains random noise caused by the accelerometer itself, the hardware circuit and other aspects. In order [...] Read more.
High-G MEMS accelerometer (HGMA) is a new type of sensor; it has been widely used in high precision measurement and control fields. Inevitably, the accelerometer output signal contains random noise caused by the accelerometer itself, the hardware circuit and other aspects. In order to denoise the HGMA’s output signal to improve the measurement accuracy, the improved VMD and TFPF hybrid denoising algorithm is proposed, which combines variational modal decomposition (VMD) and time-frequency peak filtering (TFPF). Firstly, VMD was optimized by the multi-objective particle swarm optimization (MOPSO), then the best decomposition parameters [kbest, abest] could be obtained, in which the permutation entropy (PE) and fuzzy entropy (FE) were selected for MOPSO as fitness functions. Secondly, the accelerometer voltage output signals were decomposed by the improved VMD, then some intrinsic mode functions (IMFs) were achieved. Thirdly, sample entropy (SE) was introduced to classify those IMFs into information-dominated IMFs or noise-dominated IMFs. Then, the short-window TFPF was selected for denoising information-dominated IMFs, while the long-window TFPF was selected for denoising noise-dominated IMFs, which can make denoising more targeted. After reconstruction, we obtained the accelerometer denoising signal. The denoising results of different denoising algorithms in the time and frequency domains were compared, and SNR and RMSE were taken as denoising indicators. The improved VMD and TFPF denoising method has a smaller signal distortion and stronger denoising ability, so it can be adopted to denoise the output signal of the High-G MEMS accelerometer to improve its accuracy. Full article
(This article belongs to the Special Issue MEMS Inertial Sensors)
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12 pages, 3494 KiB  
Article
A High-Sensitivity Resonant Magnetic Sensor Based on Graphene Nanomechanical Resonator
by Wenyao Liu, Wei Li, Chenxi Liu, Enbo Xing, Yanru Zhou, Lai Liu and Jun Tang
Micromachines 2022, 13(4), 628; https://doi.org/10.3390/mi13040628 - 16 Apr 2022
Viewed by 2090
Abstract
This paper presents a novel resonant magnetic sensor consisting of a graphene nanomechanical oscillator and magnetostrictive stress coupling structure, using Si/SiO2 substrate and Fe–Ga alloy, respectively. In this device, the deformation of the Fe–Ga alloy resulting from the external magnetic field changed [...] Read more.
This paper presents a novel resonant magnetic sensor consisting of a graphene nanomechanical oscillator and magnetostrictive stress coupling structure, using Si/SiO2 substrate and Fe–Ga alloy, respectively. In this device, the deformation of the Fe–Ga alloy resulting from the external magnetic field changed the surface tension of the graphene, resulting in a significant change in the resonance frequency of graphene. Using the finite element analysis, it could be found that the response of the resonance frequency revealed a good linear relationship with the external magnetic field (along the x-axis) in the range of the 1 to 1.6 mT. By optimizing the sizes of each component of the magnetic sensor, such as the thickness of the Si/SiO2 substrate and the Fe–Ga alloy, and the length of the graphene, the sensitivity could even reach 834 kHz/mT, which is three orders of magnitude higher than conventional resonant magnetic devices. This provides a new method for highly sensitive and miniaturized magnetic sensors. Full article
(This article belongs to the Special Issue MEMS Inertial Sensors)
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10 pages, 3128 KiB  
Article
A Novel Self-Temperature Compensation Method for Mode-Localized Accelerometers
by Pengcheng Cai, Xingyin Xiong, Kunfeng Wang, Liangbo Ma, Zheng Wang, Yunfei Liu and Xudong Zou
Micromachines 2022, 13(3), 437; https://doi.org/10.3390/mi13030437 - 13 Mar 2022
Cited by 4 | Viewed by 2155
Abstract
Mode-localized sensing paradigms applied to accelerometers have recently become popular research subjects. However, the output of mode-localized accelerometers is influenced by environment temperature due to the difference in the thermal properties of the coupling resonators and the temperature dependence of coupling stiffness. To [...] Read more.
Mode-localized sensing paradigms applied to accelerometers have recently become popular research subjects. However, the output of mode-localized accelerometers is influenced by environment temperature due to the difference in the thermal properties of the coupling resonators and the temperature dependence of coupling stiffness. To improve the performance of mode-localized accelerometers against temperature, we proposed an in situ self-temperature compensation method by utilizing the resonant frequency besides of amplitude ratios, which can be implied online. Experimental results showed that there were nearly 79-times and 87-times improvement in zeros bias and scale factor, respectively. Full article
(This article belongs to the Special Issue MEMS Inertial Sensors)
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Review

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24 pages, 7287 KiB  
Review
A Review of Symmetric Silicon MEMS Gyroscope Mode-Matching Technologies
by Han Zhang, Chen Zhang, Jing Chen and Ang Li
Micromachines 2022, 13(8), 1255; https://doi.org/10.3390/mi13081255 - 4 Aug 2022
Cited by 18 | Viewed by 3936
Abstract
The symmetric MEMS gyroscope is a typical representative of inertial navigation sensors in recent years. It is different from the traditional mechanical rotor gyroscope in that it structurally discards the high-speed rotor and other moving parts to extend the service life and significantly [...] Read more.
The symmetric MEMS gyroscope is a typical representative of inertial navigation sensors in recent years. It is different from the traditional mechanical rotor gyroscope in that it structurally discards the high-speed rotor and other moving parts to extend the service life and significantly improve accuracy. The highest accuracy is achieved when the ideal mode-matching state is realized. Due to the processing limitation, this index cannot be achieved, and we can only explore ways to approach this index continuously. This paper’s results of error suppression for the symmetric MEMS gyroscope are initially classified into three categories. The first category mainly introduces the processing structure and working mode of the symmetrical gyroscope. The second is mechanical tuning from the structure and the third is electrostatic tuning from the peripheral control circuit. Based on the listed results, the paper compares the two tuning modes and analyzes their advantages and disadvantages. The fourth category is the tuning means incorporating the emerging algorithm. On this basis, the elements of improvement for future high-precision symmetric MEMS gyroscopes are envisioned to provide a part of the theoretical reference for the future development direction of sensors in inertial navigation. Full article
(This article belongs to the Special Issue MEMS Inertial Sensors)
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