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Micromachines
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MOEMS: Micro-Optical MEMS
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MOEMS: Micro-Optical MEMS

A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "A：Physics".

Deadline for manuscript submissions: closed (31 December 2020) | Viewed by 13958

Special Issue Editors

Dr. Nelson Sepulveda

E-Mail Website
Guest Editor
Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI 48824‐1226, USA
Interests: MEMS; phase-change materials; photothermal actuators; transducers
Special Issues, Collections and Topics in MDPI journals
Dr. Jing Wang

E-Mail Website
Guest Editor
Department of Electrical Engineering, University of South Florida, Tampa, FL 33620, USA
Interests: RF MEMS; transducers; micromechanical resonators; microsystems

Special Issue Information

Dear Colleagues,

Optical microelectromechanical systems (MEMS), microoptoelectromechanical systems (MOEMS), or optical microsystems are integrated devices or systems that interact with light through actuation or sensing at a micro- or millimeter scale. The multidisciplinary nature of the field has allowed for the collaboration of researchers with a very diverse background and enabled a rapid technological growth that has resulted in enormous commercial success in imaging, laser scanners, and optical communications.

In this Special Issue, the current state of this exciting research field will be presented, covering a wide range of topics, including but not limited to:

  • Optical scanners and micromirrors;
  • Optical MEMS transducers;
  • Photothermal transducers;
  • Micro-optical systems for imaging;
  • Optical communications devices;
  • Diffractive MEMS;
  • Optical beam steering;
  • Wavelength selective switch (WSS);
  • Tunable filters;
  • Miniature LiDAR and virtual reality/augmented reality (VR/AR);
  • Variable optical attenuators;
  • Adaptive and tunable optics;
  • Optical devices for wavelength division multiplexing (WDM);
  • Optical waveguides;
  • Diffractive gratings;
  • Optofluidics;
  • Spatial light modulators;
  • Microspectrometers;
  • Microphotonics;
  • Microspectrometers;
  • Cavity optomechanics.

Dr. Nelson Sepulveda
Dr. Jing Wang
Guest Editors

Manuscript Submission Information

Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.

Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Micromachines is an international peer-reviewed open access monthly journal published by MDPI.

Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 2600 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.

Keywords

  • micromirrors
  • optical switches
  • optical filters
  • optical transducers
  • VOA
  • spectrometers
  • optomechanics
  • microlenses
  • optofluidics
  • wavelength division multiplexing
  • diffractive MEMS
  • beam steering
  • microbolometers
  • microgratings
  • micro-LiDAR
  • tunable lenses

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Further information on MDPI's Special Issue polices can be found here.

Published Papers (5 papers)

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Research

23 pages, 6966 KiB  
Article
Evaluation and Optimization of a MOEMS Active Focusing Device
by Ulrich Mescheder, Michael Lootze and Khaled Aljasem
Micromachines 2021, 12(2), 172; https://doi.org/10.3390/mi12020172 - 9 Feb 2021
Cited by 1 | Viewed by 2067
Abstract
In this paper we present a detailed evaluation of a micro-opto-electromechanical system (MOEMS) for active focusing which is realized using an electrostatically deformed thin silicon membrane. The evaluation is done using finite element methods and experimental characterization of the device behavior. The devices [...] Read more.
In this paper we present a detailed evaluation of a micro-opto-electromechanical system (MOEMS) for active focusing which is realized using an electrostatically deformed thin silicon membrane. The evaluation is done using finite element methods and experimental characterization of the device behavior. The devices are realized in silicon on insulator technology. The influence of internal stress especially resulting from the high compressive buried oxide (BOX) layer is evaluated. Additionally, the effect of stress gradients in the crystalline device layer and of high reflective coatings such as aluminum is discussed. The influence of variations of some important process steps on the device performance is quantified. Finally, practical properties such as focal length control, long-term stability, hysteresis and dynamical response are presented and evaluated. The evaluation proves that the proposed membrane focusing device is suitable for high performance imaging (wavefront errors between λ/5–λ/10) with a large aperture (5 mm). Full article
(This article belongs to the Special Issue MOEMS: Micro-Optical MEMS)
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17 pages, 30703 KiB  
Article
Simulative and Experimental Characterization of an Adaptive Astigmatic Membrane Mirror
by Ulrich Kallmann, Michael Lootze and Ulrich Mescheder
Micromachines 2021, 12(2), 156; https://doi.org/10.3390/mi12020156 - 5 Feb 2021
Cited by 3 | Viewed by 2466
Abstract
Adaptive optical (AO) components play an important role in numerous optical applications, from astronomical telescopes to microscope imaging systems. For most of these AO components, the induced wavefront correction, respectively added optical power, is based on a rotationally symmetric or segmented design of [...] Read more.
Adaptive optical (AO) components play an important role in numerous optical applications, from astronomical telescopes to microscope imaging systems. For most of these AO components, the induced wavefront correction, respectively added optical power, is based on a rotationally symmetric or segmented design of the AO component. In this work, we report on the design, fabrication, and characterization of a micro-electronic-mechanical system (MEMS) adaptive membrane mirror in the shape of a parabolic cylinder. In order to interpret the experimental characterization results correctly and provide a tool for future application development, this is accompanied by the setup of an optical simulation model. The characterization results showed a parabolically deformable membrane mirror with an aperture of 8 × 2 mm2 and an adaptive range for the optical power from 0.3 to 6.1 m−1 (dpt). The optical simulation model, using the Gaussian beamlet propagation method, was successfully validated by laser beam profile measurements taken in the optical characterization setup. This MEMS-based adaptive astigmatic membrane mirror, together with the accompanying simulation model, could be a key component for the rapid development of new optical systems, e.g., adaptive laser line generators. Full article
(This article belongs to the Special Issue MOEMS: Micro-Optical MEMS)
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12 pages, 2461 KiB  
Article
Miniature Broadband NIR Spectrometer Based on FR4 Electromagnetic Scanning Micro-Grating
by Liangkun Huang, Quan Wen, Jian Huang, Fan Yu, Hongjie Lei and Zhiyu Wen
Micromachines 2020, 11(4), 393; https://doi.org/10.3390/mi11040393 - 10 Apr 2020
Cited by 8 | Viewed by 2949
Abstract
This paper presents a miniaturized, broadband near-infrared (NIR) spectrometer with a flame-retardant 4 (FR4)-based scanning micrograte. A 90° off-axis parabolic mirror and a crossed Czerny–Turner structure were used for creating an astigmatism-free optical system design. The optical system of the spectrometer consists of [...] Read more.
This paper presents a miniaturized, broadband near-infrared (NIR) spectrometer with a flame-retardant 4 (FR4)-based scanning micrograte. A 90° off-axis parabolic mirror and a crossed Czerny–Turner structure were used for creating an astigmatism-free optical system design. The optical system of the spectrometer consists of a 90° off-axis parabolic mirror, an FR4-based scanning micrograte, and a two-color indium gallium arsenide (InGaAs) diode with a crossed Czerny–Turner structure optical design. We used a wide exit slit and an off-axis parabolic mirror with a short focal length to improve the signal-to-noise ratio (SNR) of the full spectrum. We enabled a miniaturized design for the spectrometer by utilizing a novel FR4 micrograte for spectral dispersion and spatial scanning. The spectrometer can detect the full near-infrared spectrum while only using a two-color InGaAs diode, and thus, the grating scanning angle of this spectrometer is small when compared to a dual-detector-based spectrometer. In addition, the angle signal can be obtained through an angle sensor, which is integrated into the scanning micrograte. The real-time angle signal is used to form a closed-loop control over the scanning micrograte and calibrate the spectral signal. Finally, a series of tests was performed. The experimental results showed that the spectrometer has a working wavelength range of 800–2500 nm. The resolution is 10 nm at a wavelength range of 800–1650 nm and 15 nm at a wavelength range of 1650–2500 nm. Similarly, the stability of these two wavelength ranges is better than ±1 nm and ±2 nm, respectively. The spectrometer’s volume is 80 × 75 × 65 mm3 and its weight is 0.5 kg. The maximum spectral fluctuation does not exceed 1.5% and the signal-to-noise ratio is 284 after only one instance of averaging. Full article
(This article belongs to the Special Issue MOEMS: Micro-Optical MEMS)
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11 pages, 3278 KiB  
Article
An In-Line Fiber Optic Fabry–Perot Sensor for High-Temperature Vibration Measurement
by Dong Chen, Jiang Qian, Jia Liu, Baojie Chen, Guowen An, Yingping Hong, Pinggang Jia and Jijun Xiong
Micromachines 2020, 11(3), 252; https://doi.org/10.3390/mi11030252 - 1 Mar 2020
Cited by 22 | Viewed by 3642
Abstract
An in-line fiber optic Fabry–Perot (FP) sensor for high-temperature vibration measurement is proposed and experimentally demonstrated in this paper. We constructed an FP cavity and a mass on single-mode fibers (SMFs) by fusion, and together they were inserted into a hollow silica glass [...] Read more.
An in-line fiber optic Fabry–Perot (FP) sensor for high-temperature vibration measurement is proposed and experimentally demonstrated in this paper. We constructed an FP cavity and a mass on single-mode fibers (SMFs) by fusion, and together they were inserted into a hollow silica glass tube (HST) to form a vibration sensor. The radial dimension of the sensor was less than 500 μm. With its all-silica structure, the sensor has the prospect of measuring vibration in high-temperature environments. In our test, the sensor had a resonance frequency of 165 Hz. The voltage sensitivity of the sensor system was about 11.57 mV/g and the nonlinearity was about 2.06%. The sensor could work normally when the temperature was below 500 °C, and the drift of the phase offset point with temperature was 0.84 pm/°C. Full article
(This article belongs to the Special Issue MOEMS: Micro-Optical MEMS)
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10 pages, 1807 KiB  
Article
Calibration Technique of a Curved Zoom Compound Eye Imaging System
by Fengli Liu, Xiaolei Diao, Lun Li and Yongping Hao
Micromachines 2019, 10(11), 776; https://doi.org/10.3390/mi10110776 - 13 Nov 2019
Cited by 3 | Viewed by 2121
Abstract
A calibration method for the designed curved zoom compound eye is studied in order to achieve detection and positioning of spatial objects. The structure of the curved zoom compound eye is introduced. A calibration test platform is designed and built based on the [...] Read more.
A calibration method for the designed curved zoom compound eye is studied in order to achieve detection and positioning of spatial objects. The structure of the curved zoom compound eye is introduced. A calibration test platform is designed and built based on the image characteristics of the compound eye, which can be constructed in the large field view for the calibration target. The spot images are obtained through image processing. The center of the spot is calculated by Gauss fitting method. This method is highly simple and intuitive, and it can be used in a zoom surface compound eye without any complex procedures. Finally, the corresponding relationship between the spot center coordinates and the incident light vector of the corresponding sub-eye is established, and the calibration of the multi vision positioning system is completed. Full article
(This article belongs to the Special Issue MOEMS: Micro-Optical MEMS)
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