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Micromachines
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New Advances in Micromachined Resonators
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New Advances in Micromachined Resonators

A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "E：Engineering and Technology".

Deadline for manuscript submissions: closed (20 June 2022) | Viewed by 11503

Special Issue Editors

Dr. Amal Z. Hajjaj

E-Mail Website
Guest Editor
Wolfson School of Mechanical, Electrical and Manufacturing Engineering, Loughborough University, Loughborough LE11 3TU, UK
Interests: MEMS/NEMS; resonators; mode coupling; filter application; sensors; nonlinear dynamics
Special Issues, Collections and Topics in MDPI journals
Dr. Nizar Jaber

E-Mail Website
Guest Editor
Mechanical Engineering Department and the Center for Communication Systems and Sensing, King Fahd University of Petroleum and Minerals, Dhahran 31261, Saudi Arabia
Interests: MEMS; resonators; nonlinear dynamics; sensors

Special Issue Information

The global market of MEMS is experiencing rapid growth and is expected to exceed USD 60 billion in 2021, and the number of units will be slightly more than 135 billion. MEMS resonators are expected to have the lion’s share due to their unique advantages of low-power consumption, ultra-sensitivity, reliability, and ability to operate in extreme environmental conditions. MEMS resonators are critical for the realization of future intelligent systems. The list includes IoT, 5G communications, biomedical devices, self-powered sensors, and developing computational logic circuits. As the MEMS resonator industry continues to mature, we believe more emphasis will be placed on developing new, cheap, and reliable fabrication technology and improving the read-out circuits that can enable the detection of the signal in different environmental conditions. Employing newly emerging 2D materials, which possess superior mechanical and electrical properties, will make them an excellent candidate for extremely sensitive sensors. Additionally, utilizing machine learning and artificial intelligence algorithms will open the door for optimizing new designs with improved performance metrics. Another challenge that needs to be tackled is developing accurate analytical and FEM models that can accurately simulate the resonator response.

Accordingly, this Special Issue seeks research papers, short communications, and review articles that focus on the developments in the design, fabrication, modeling, and characterization of MEMS resonators, as well as their potential implementation in emerging applications.

Dr. Amal Z. Hajjaj
Dr. Nizar Jaber
Guest Editors

Manuscript Submission Information

Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.

Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Micromachines is an international peer-reviewed open access monthly journal published by MDPI.

Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 2600 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.

Keywords

  • MEMS resonators for biomedical sensors, gas sensors, environmental sensors
  • Fabrication technologies
  • Design optimization using machine learning
  • 2D-materials-based resonators
  • Theoretical model and FEA

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Published Papers (5 papers)

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Research

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11 pages, 3606 KiB  
Article
A New Compact Wideband Filter Based on a Coupled Stepped Impedance Resonator
by Abdel-Fattah A. Sheta and Ibrahim Elshafiey
Micromachines 2024, 15(2), 221; https://doi.org/10.3390/mi15020221 - 31 Jan 2024
Viewed by 1224
Abstract
A new compact wideband filter is introduced to address the requirements of recent communication and radar systems. The filter is based on a quarter-wavelength short-circuit coupled stepped impedance resonator (SIR). The analytical solution shows that the suggested SIR resonator provides a compact size [...] Read more.
A new compact wideband filter is introduced to address the requirements of recent communication and radar systems. The filter is based on a quarter-wavelength short-circuit coupled stepped impedance resonator (SIR). The analytical solution shows that the suggested SIR resonator provides a compact size and a wide stopband response, which are essential features in many wireless communication systems. The analytical results also reveal that increasing the impedance ratio of the SIR extends the stopband by increasing the first spurious response and reducing its total length. A compact two-coupled short-circuit SIR filter is designed at 1.23 GHz. The design approach is validated using an ideal transmission line modeling analysis and electromagnetic simulation using CST Microwave Studio 2021. The proposed structure is shown to be flexible, allowing the achievement of a relative bandwidth as low as 5% and as high as 50%. A four-resonator filter is designed by cascading two stages of the designed two-coupled short-circuit SIR filter, which are coupled through a quarter-wavelength line. The simulation results illustrate that the suggested structure can be used to design a filter with any number of resonators. The filter is implemented using a high-resolution LPKF laser machine on Rogers RT/duroid 6010.2LM material with a thickness of 0.635 mm. From the measurements, the bandwidth is found to be 390 MHz and centered at 1325 MHz (29.4% relative bandwidth) and the insertion loss is 1.3 dB. The simulation and experimental results verify the proposed approach and indicate the potential of this component in meeting the design requirements of next-generation microwave circuits related to flexibility and size-compactness. Full article
(This article belongs to the Special Issue New Advances in Micromachined Resonators)
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12 pages, 3469 KiB  
Article
Raman Lasing in a Tellurite Microsphere with Thermo-Optical on/off Switching by an Auxiliary Laser Diode
by Elena A. Anashkina, Maria P. Marisova, Vitaly V. Dorofeev and Alexey V. Andrianov
Micromachines 2023, 14(9), 1796; https://doi.org/10.3390/mi14091796 - 20 Sep 2023
Cited by 2 | Viewed by 1084
Abstract
The generation of coherent light based on inelastic stimulated Raman scattering in photonic microresonators has been attracting great interest in recent years. Tellurite glasses are promising materials for such microdevices since they have large Raman gain and large Raman frequency shift. We experimentally [...] Read more.
The generation of coherent light based on inelastic stimulated Raman scattering in photonic microresonators has been attracting great interest in recent years. Tellurite glasses are promising materials for such microdevices since they have large Raman gain and large Raman frequency shift. We experimentally obtained Raman lasing at a wavelength of 1.8 µm with a frequency shift of 27.5 THz from a 1.54 µm narrow-line pump in a 60 µm tellurite glass microsphere with a Q-factor of 2.5 × 107. We demonstrated experimentally a robust, simple, and cheap way of thermo-optically controlled on/off switching of Raman lasing in a tellurite glass microsphere by an auxiliary laser diode. With a permanently operating narrow-line pump laser, on/off switching of the auxiliary 405 nm laser diode led to off/on switching of Raman generation. We also performed theoretical studies supporting the experimental results. The temperature distribution and thermal frequency shifts in eigenmodes in the microspheres heated by the thermalized power of an auxiliary diode and the partially thermalized power of a pump laser were numerically simulated. We analyzed the optical characteristics of Raman generation in microspheres of different diameters. The numerical results were in good agreement with the experimental ones. Full article
(This article belongs to the Special Issue New Advances in Micromachined Resonators)
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17 pages, 5693 KiB  
Article
Controlling Resonator Nonlinearities and Modes through Geometry Optimization
by Amal Z. Hajjaj and Nizar Jaber
Micromachines 2021, 12(11), 1381; https://doi.org/10.3390/mi12111381 - 10 Nov 2021
Viewed by 1767
Abstract
Controlling the nonlinearities of MEMS resonators is critical for their successful implementation in a wide range of sensing, signal conditioning, and filtering applications. Here, we utilize a passive technique based on geometry optimization to control the nonlinearities and the dynamical response of MEMS [...] Read more.
Controlling the nonlinearities of MEMS resonators is critical for their successful implementation in a wide range of sensing, signal conditioning, and filtering applications. Here, we utilize a passive technique based on geometry optimization to control the nonlinearities and the dynamical response of MEMS resonators. Also, we explored active technique i.e., tuning the axial stress of the resonator. To achieve this, we propose a new hybrid shape combining a straight and initially curved microbeam. The Galerkin method is employed to solve the beam equation and study the effect of the different design parameters on the ratios of the frequencies and the nonlinearities of the structure. We show by adequately selecting the parameters of the structure; we can realize systems with strong quadratic or cubic effective nonlinearities. Also, we investigate the resonator shape effect on symmetry breaking and study different linear coupling phenomena: crossing, veering, and mode hybridization. We demonstrate the possibility of tuning the frequencies of the different modes of vibrations to achieve commensurate ratios necessary for activating internal resonance. The proposed method is simple in principle, easy to fabricate, and offers a wide range of controllability on the sensor nonlinearities and response. Full article
(This article belongs to the Special Issue New Advances in Micromachined Resonators)
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13 pages, 4841 KiB  
Article
Static and Dynamic Analysis of Electrostatically Actuated MEMS Shallow Arches for Various Air-Gap Configurations
by Hassen M. Ouakad, Nouha Alcheikh and Mohammad I. Younis
Micromachines 2021, 12(8), 930; https://doi.org/10.3390/mi12080930 - 5 Aug 2021
Cited by 12 | Viewed by 2690
Abstract
In this research, we investigate the structural behavior, including the snap-through and pull-in instabilities, of in-plane microelectromechanical COSINE-shaped and electrically actuated clamped-clamped micro-beams resonators. The work examines various electrostatic actuation patterns including uniform and non-uniform parallel-plates airgap arrangements, which offer options to actuate [...] Read more.
In this research, we investigate the structural behavior, including the snap-through and pull-in instabilities, of in-plane microelectromechanical COSINE-shaped and electrically actuated clamped-clamped micro-beams resonators. The work examines various electrostatic actuation patterns including uniform and non-uniform parallel-plates airgap arrangements, which offer options to actuate the arches in the opposite and same direction of their curvature. The nonlinear equation of motion of a shallow arch is discretized into a reduced-order model based on the Galerkin’s expansion method, which is then numerically solved. Static responses are examined for various DC electrostatic loads starting from small values to large values near pull-in and snap-through instability ranges, if any. The eigenvalue problem of the micro-beam is solved revealing the variations of the first four natural frequencies as varying the DC load. Various simulations are carried out for several case studies of shallow arches of various geometrical parameters and airgap arrangements, which demonstrate rich and diverse static and dynamic behaviors. Results show few cases with multi-states and hysteresis behaviors where some with only the pull-in instability and others with both snap-through buckling and pull-in instabilities. It is found that the micro-arches behaviors are very sensitive to the electrode’s configuration. The studied configurations reveal different possibilities to control the pull-in and snap-through instabilities, which can be used for improving arches static stroke range as actuators and for realizing wide-range tunable micro-resonators. Full article
(This article belongs to the Special Issue New Advances in Micromachined Resonators)
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Review

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31 pages, 12133 KiB  
Review
Dual-Resonator-Based (DRB) and Multiple-Resonator-Based (MRB) MEMS Sensors: A Review
by Yusi Zhu, Zhan Zhao, Zhen Fang and Lidong Du
Micromachines 2021, 12(11), 1361; https://doi.org/10.3390/mi12111361 - 4 Nov 2021
Cited by 3 | Viewed by 3844
Abstract
Single-resonator-based (SRB) sensors have thrived in many sensing applications. However, they cannot meet the high-sensitivity requirement of future high-end markets such as ultra-small mass sensors and ultra-low accelerometers, and are vulnerable to environmental influences. It is fortunate that the integration of dual or [...] Read more.
Single-resonator-based (SRB) sensors have thrived in many sensing applications. However, they cannot meet the high-sensitivity requirement of future high-end markets such as ultra-small mass sensors and ultra-low accelerometers, and are vulnerable to environmental influences. It is fortunate that the integration of dual or multiple resonators into a sensor has become an effective way to solve such issues. Studies have shown that dual-resonator-based (DRB) and multiple-resonator-based (MRB) MEMS sensors have the ability to reject environmental influences, and their sensitivity is tens or hundreds of times that of SRB sensors. Hence, it is worth understanding the state-of-the-art technology behind DRB and MRB MEMS sensors to promote their application in future high-end markets. Full article
(This article belongs to the Special Issue New Advances in Micromachined Resonators)
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