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Microgenerators Applicable in the MEMS/NEMS Sensors
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Microgenerators Applicable in the MEMS/NEMS Sensors

A special issue of Sensors (ISSN 1424-8220). This special issue belongs to the section "Physical Sensors".

Deadline for manuscript submissions: closed (1 February 2022) | Viewed by 2396

Special Issue Editor

Prof. Dr. Pavel Fiala

E-Mail Website
Guest Editor
Department of Theoretical and Experimental Electrical Engineering, Brno University of Technology, 616 00 Brno, Czech Republic
Interests: numerical modeling; measurement; metrology; low-level measurements; pulsed power generators; harvesters; microwave technology; MEMS / NEMS; electromagnetic field; sensing technology; sensors; coupled modeling; plasma, nanoengineering
Special Issues, Collections and Topics in MDPI journals

Special Issue Information

Dear Colleagues,

  • The aim of the selected publications is to describe both theoretical approaches to and principles of harvesting, such as the conversion of different "residual" forms of energy into electrical energy with the required parameters and measurable transformation efficiency, as well as a number of different approaches to extracting potential and dynamic forms of local system energy.
  • Areas of interest are mainly:
  1. Theoretical foundations of the principles of extraction/transformation (electromagnetic field) as well as equipment for the conversion of any form of energy into electrical energy with a wider application potential, for structures of millimeter, micrometer or nanometer technology, power supply for sensing technology, supporting electronics, etc.
  2. Some specific applications (in the areas of both technology and manufacturing issues, as well as tasks related to implementation) in MEMS and NEMS sensors.
  3. The appropriate selection of the principles of harvesting (efficiency, performance, limiting factors of activity, multidisciplinary use, interdisciplinary solutions, special applications of material, medical, space, microscopic and other technologies) for the selected shape, application and size of the sensor.

Prof. Dr. Pavel Fiala
Guest Editor

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Published Papers (1 paper)

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Research

13 pages, 4259 KiB  
Communication
Application of Prandtl’s Theory in the Design of an Experimental Chamber for Static Pressure Measurements
by Pavla Šabacká, Vilém Neděla, Jiří Maxa and Robert Bayer
Sensors 2021, 21(20), 6849; https://doi.org/10.3390/s21206849 - 15 Oct 2021
Cited by 7 | Viewed by 1727
Abstract
Pumping in vacuum chambers is part of the field of environmental electron microscopy. These chambers are separated from each other by a small-diameter aperture that creates a critical flow in the supersonic flow regime. The distribution of pressure and shock waves in the [...] Read more.
Pumping in vacuum chambers is part of the field of environmental electron microscopy. These chambers are separated from each other by a small-diameter aperture that creates a critical flow in the supersonic flow regime. The distribution of pressure and shock waves in the path of the primary electron beam passing through the differentially pumped chamber has a large influence on the quality of the resulting microscope image. As part of this research, an experimental chamber was constructed to map supersonic flow at low pressures. The shape of this chamber was designed using mathematical–physical analyses, which served not only as a basis for the design of its geometry, but especially for the correct choice of absolute and differential pressure sensors with respect to the cryogenic temperature generated in the supersonic flow. The mathematical and physical analyses presented here map the nature of the supersonic flow with large gradients of state variables at low pressures at the continuum mechanics boundary near the region of free molecule motion in which the Environmental Electron Microscope and its differentially pumped chamber operate, which has a significant impact on the resulting sharpness of the final image obtained by the microscope. The results of this work map the flow in and behind the Laval nozzle in the experimental chamber and are the initial basis that enabled the optimization of the design of the chamber based on Prandtl’s theory for the possibility of fitting it with pressure probes in such a way that they can map the flow in and behind the Laval nozzle. Full article
(This article belongs to the Special Issue Microgenerators Applicable in the MEMS/NEMS Sensors)
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