Thin Film Technologies in Sensors Fabrication
A special issue of Sensors (ISSN 1424-8220). This special issue belongs to the section "Chemical Sensors".
Deadline for manuscript submissions: closed (31 March 2021) | Viewed by 11717
Special Issue Editor
Interests: material sciences; metal oxides; thin films; deposition; characterisation; gas sensors; surface science; thermoelectrical conversion
Special Issues, Collections and Topics in MDPI journals
Special Issue Information
Dear Colleagues,
The goal of this Special Issue on Thin Film Technologies in Sensor Fabrication is to give a survey of the state-of-the-art on organic and inorganic thin-film-based sensors and introduce recent progress achieved in the fabrication and application of these devices.
Thin-film-based sensors form a large class of devices used to monitor the environment and living conditions, measure various physical parameters, and detect various biological objects. These sensors use different materials, are fabricated on different platforms, and their operation is based on various detection principles. However, all of them are made on the basis of thin-film technologies, which have a number of significant advantages. Thin-film technology allows for a sensor element to be precise, stable, dependable, and cheap. Thin films can be created from a wide range of materials, including polymers, metal oxides, semiconductors, carbon-based materials, and nanocomposites. Therefore, thin films can be tailored to suit a wide range of applications by varying the composition of the thin film. Depending on the type of sensor, a thin film can be fabricated using various deposition technologies, such as chemical vapor deposition (CVD), physical vapor deposition (PVD) methods such as sputtering and molecular beam epitaxy, atomic layer deposition (ALD), and various conformal and non-conformal coating techniques. Thin films can be deposited on many kinds of substrate, including optical fibers, ceramic materials, polymers, and conventional semiconductors such as silicon. The production methods used to produce thin-film sensors have now matured to the point that they can be made efficiently, at a low cost and with very precise specifications. Most applications of thin-film sensors take advantage of their small size and the options they provide engineers for particular applications, such as the development of smart sensors and large measurement complexes. Research has shown that in many cases the response time of these sensors is more rapid and exact.
All who conduct research in this area and have results that contribute to the further development of thin-film-based sensors are invited to participate in our project. You can contribute both original research papers and reviews to this Special Issue.
Prof. Ghenadii Korotcenkov
Guest Editor
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Keywords
- chemical sensors
- physical sensors
- optical sensors
- biosensors
- gas sensors
- flexible sensors
- humidity sensors
- temperature sensors
- pressure sensors
- thin-film sensor arrays
- design
- fabrication
- microfabrication
- testing
- detection principles
- sensing materials
- metal oxides
- polymers
- carbon
- deposition technologies
- optimization
- electrodes
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