High specific surface area (
SSABET: 141.6 m
2/g) SnO
2 nanoparticles doped with 0.2–3 wt% Ru were successfully produced in a single step by flame spray pyrolysis (FSP). The phase and crystallite size were analyzed by XRD. The specific surface area (
SSABET) of the nanoparticles was measured by nitrogen adsorption (BET analysis). As the Ru concentration increased, the
SSABET was found to linearly decrease, while the average BET-equivalent particle diameter (
dBET) increased. FSP yielded small Ru particles attached to the surface of the supporting SnO
2 nanoparticles, indicating a high
SSABET. The morphology and accurate size of the primary particles were further investigated by TEM. The crystallite sizes of the spherical, hexagonal, and rectangular SnO
2 particles were in the range of 3–10 nm. SnO
2 nanorods were found to range from 3–5 nm in width and 5–20 nm in length. Sensing films were prepared by the spin coating technique. The gas sensing of H
2 (500–10,000 ppm) was studied at the operating temperatures ranging from 200–350 °C in presence of dry air. After the sensing tests, the morphology and the cross-section of sensing film were analyzed by SEM and EDS analyses. The 0.2%Ru-dispersed on SnO
2 sensing film showed the highest sensitivity and a very fast response time (6 s) compared to a pure SnO
2 sensing film, with a highest H
2 concentration of 1 vol% at 350 °C and a low H
2 detection limit of 500 ppm at 200 °C.
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