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Falidas KE, Kühnel K, Rudolph M, Everding MB, Czernohorsky M, Heitmann J. Three-Dimensional Metal-Insulator-Metal Decoupling Capacitors with Optimized ZrO₂ ALD Properties for Improved Electrical and Reliability Parameters. Materials. 2022; 15(23):8325. https://doi.org/10.3390/ma15238325

Falidas, Konstantinos Efstathios, Kati Kühnel, Matthias Rudolph, Maximilian B. Everding, Malte Czernohorsky, and Johannes Heitmann. 2022. "Three-Dimensional Metal-Insulator-Metal Decoupling Capacitors with Optimized ZrO₂ ALD Properties for Improved Electrical and Reliability Parameters" Materials 15, no. 23: 8325. https://doi.org/10.3390/ma15238325

Falidas, K. E., Kühnel, K., Rudolph, M., Everding, M. B., Czernohorsky, M., & Heitmann, J. (2022). Three-Dimensional Metal-Insulator-Metal Decoupling Capacitors with Optimized ZrO₂ ALD Properties for Improved Electrical and Reliability Parameters. Materials, 15(23), 8325. https://doi.org/10.3390/ma15238325