Article Versions Notes

Stoeckel C, Meinel K, Melzer M, Žukauskaitė A, Zimmermann S, Forke R, Hiller K, Kuhn H. Static High Voltage Actuation of Piezoelectric AlN and AlScN Based Scanning Micromirrors. Micromachines. 2022; 13(4):625. https://doi.org/10.3390/mi13040625

Stoeckel, Chris, Katja Meinel, Marcel Melzer, Agnė Žukauskaitė, Sven Zimmermann, Roman Forke, Karla Hiller, and Harald Kuhn. 2022. "Static High Voltage Actuation of Piezoelectric AlN and AlScN Based Scanning Micromirrors" Micromachines 13, no. 4: 625. https://doi.org/10.3390/mi13040625

Stoeckel, C., Meinel, K., Melzer, M., Žukauskaitė, A., Zimmermann, S., Forke, R., Hiller, K., & Kuhn, H. (2022). Static High Voltage Actuation of Piezoelectric AlN and AlScN Based Scanning Micromirrors. Micromachines, 13(4), 625. https://doi.org/10.3390/mi13040625