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Journal: Micromachines, 2023
Volume: 14
Number: 992
Article:
Study of Atmospheric Pressure Plasma Temperature Based on Silicon Carbide Etching
Authors:
by
Shaozhen Xu, Julong Yuan, Jianxing Zhou, Kun Cheng and Hezhong Gan
Link:
https://www.mdpi.com/2072-666X/14/5/992
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