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Micromachines
Volume 16
Issue 2
10.3390/mi16020183
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This is an early access version, the complete PDF, HTML, and XML versions will be available soon.
Article

Fano Resonant Sensing in MIM Waveguide Structures Based on Multiple Circular Split-Ring Resonant Cavities

by
Wenjing Wang
1,2,
Shaoze Zhang
3,* and
Huiliang Cao
3,*
1
University of Science and Technology of China, Hefei 230022, China
2
East China Institute of Photo-Electron IC, Bengbu 233000, China
3
School of Instrument and Electronics, North University of China, Taiyuan 030051, China
*
Authors to whom correspondence should be addressed.
Micromachines 2025, 16(2), 183; https://doi.org/10.3390/mi16020183
Submission received: 7 January 2025 / Revised: 30 January 2025 / Accepted: 30 January 2025 / Published: 3 February 2025
Versions Notes

Abstract

In this work, a non-through metal–insulator–metal (MIM) waveguide capable of exciting three Fano resonances was designed and numerically studied using the finite element method. Fano resonances are achieved through the interaction between the modes of multiple circular split-ring resonator cavities and the waveguide. The effect of coupling between different resonators on the Fano resonance peaks is investigated. Independent tuning of the Fano resonance wavelength and transmission rate is accomplished by modifying the structural rotation angle and geometric parameters. After optimizing these parameters, the structure achieves an optimal refractive index sensitivity of 946.88 nm/RIU and a figure of merit of 99.17. The proposed structure holds potential for guiding the design of nanosensors.
Keywords: fano resonance; plasmon refractive index nanosensor; finite element method (FEM); sensitivity; figure of merite (FOM) fano resonance; plasmon refractive index nanosensor; finite element method (FEM); sensitivity; figure of merite (FOM)

Share and Cite

MDPI and ACS Style

Wang, W.; Zhang, S.; Cao, H. Fano Resonant Sensing in MIM Waveguide Structures Based on Multiple Circular Split-Ring Resonant Cavities. Micromachines 2025, 16, 183. https://doi.org/10.3390/mi16020183

AMA Style

Wang W, Zhang S, Cao H. Fano Resonant Sensing in MIM Waveguide Structures Based on Multiple Circular Split-Ring Resonant Cavities. Micromachines. 2025; 16(2):183. https://doi.org/10.3390/mi16020183

Chicago/Turabian Style

Wang, Wenjing, Shaoze Zhang, and Huiliang Cao. 2025. "Fano Resonant Sensing in MIM Waveguide Structures Based on Multiple Circular Split-Ring Resonant Cavities" Micromachines 16, no. 2: 183. https://doi.org/10.3390/mi16020183

APA Style

Wang, W., Zhang, S., & Cao, H. (2025). Fano Resonant Sensing in MIM Waveguide Structures Based on Multiple Circular Split-Ring Resonant Cavities. Micromachines, 16(2), 183. https://doi.org/10.3390/mi16020183

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