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Journal: Coatings, 2021
Volume: 11
Number: 1218
1218
Article: Distribution of the Deposition Rates in an Industrial-Size PECVD Reactor Using HMDSO Precursor
Authors: by Žiga Gosar, Denis Đonlagić, Simon Pevec, Bojan Gergič, Miran Mozetič, Gregor Primc, Alenka Vesel and Rok Zaplotnik
Link: https://www.mdpi.com/2079-6412/11/10/1218

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