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Cheng C, Zou Y, Li J, Ong AJ, Goei R, Huang J, Li S, Tok AIY. Adsorption and Reaction Mechanisms of Direct Palladium Synthesis by ALD Using Pd(hfac)₂ and Ozone on Si (100) Surface. Processes. 2021; 9(12):2246. https://doi.org/10.3390/pr9122246

Cheng, Chunyu, Yiming Zou, Jiahui Li, Amanda Jiamin Ong, Ronn Goei, Jingfeng Huang, Shuzhou Li, and Alfred Iing Yoong Tok. 2021. "Adsorption and Reaction Mechanisms of Direct Palladium Synthesis by ALD Using Pd(hfac)₂ and Ozone on Si (100) Surface" Processes 9, no. 12: 2246. https://doi.org/10.3390/pr9122246

Cheng, C., Zou, Y., Li, J., Ong, A. J., Goei, R., Huang, J., Li, S., & Tok, A. I. Y. (2021). Adsorption and Reaction Mechanisms of Direct Palladium Synthesis by ALD Using Pd(hfac)₂ and Ozone on Si (100) Surface. Processes, 9(12), 2246. https://doi.org/10.3390/pr9122246