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Micromachines
Special Issues
Power-MEMS and Energy Storage Devices for On-Chip Microsystems
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Power-MEMS and Energy Storage Devices for On-Chip Microsystems

A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "D：Materials and Processing".

Deadline for manuscript submissions: closed (31 March 2022) | Viewed by 21490

Special Issue Editor

Prof. Dr. Liang He

E-Mail Website
Guest Editor
School of Mechanical Engineering, Sichuan University, Chengdu 610065, China
Interests: integration of nanomaterial into microsystem; micromachining of carbon-MEMS and integrated microdevice; power-MEMS and on-chip integrated microsystem
Special Issues, Collections and Topics in MDPI journals

Special Issue Information

Dear Colleagues,

As the development of miniaturized electronics in the ascendance, much attention is focused on the study about the construction of power-MEMS and energy storage devices for on-chip microsystems, including versatile microbatteries, microsupercapacitors, energy harvesting devices, power generation devices, etc. Miniaturized energy storage devices are considered indispensable in MEMS, in addition, through integrating with multiple functional materials or devices, they can power functional systems, such as microactuators, implantable biosensors and wearable gadgets. The recent advances in high-performance power-MEMS and energy storage devices ranging from microfabrication techniques, device design, to multiple applications resulted in the increase in their energy density, power density and application potential. Particularly, multiple applications of power-MEMS with the aspects of power supply, functionalization and characterization platform show great promise and will stimulate great upsurge in interests on relevant research fields. Some practical pursuits for applications should be emphasized, such as high-resolution manufacture, rational integration of material and high energy loading, etc. Accordingly, this Special Issue seeks to showcase research papers and review articles that focus on novel developments in microfabrication, construction, performance, functional integration of power-MEMS and energy storage devices and their multiple applications.

We look forward to receiving your submissions!

Prof. Liang He
Guest Editor

Manuscript Submission Information

Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.

Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Micromachines is an international peer-reviewed open access monthly journal published by MDPI.

Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 2600 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.

Keywords

  • microbattery
  • supercapacitor
  • textile
  • MEMS
  • microfabrication
  • sensor
  • miniaturization
  • functionalization

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Published Papers (6 papers)

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Research

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12 pages, 2215 KiB  
Article
Effect of Pore Shape on Mechanical Properties of Porous Shape Memory Alloy
by Bingfei Liu and Yaxuan Pan
Micromachines 2022, 13(4), 566; https://doi.org/10.3390/mi13040566 - 31 Mar 2022
Cited by 7 | Viewed by 2580
Abstract
Porous shape memory alloys (SMAs) have been widely used in the aerospace, military, medical, and health fields due to its unique mechanical properties such as superelasticity, biocompatibility, and shape memory effect. In this work, the pore shape was considered in the constitutive model [...] Read more.
Porous shape memory alloys (SMAs) have been widely used in the aerospace, military, medical, and health fields due to its unique mechanical properties such as superelasticity, biocompatibility, and shape memory effect. In this work, the pore shape was considered in the constitutive model of the porous SMAs by respectively introducing the parameter of aspect ratio and for different pore shapes including oblate, sphere, and prolate shapes, so the expression of Young’s modulus for the porous SMA can be derived. Then, the constitutive model for such a porous shape memory alloy was established. When the porosity was zero, the model can be degenerated to the dense case. The stress–strain curves for the porous SMA with a porosity of 13% with different aspect ratio are then given. Numerical results showed good agreement with the published experimental data that proved the validation of the model. Based on the proven constitutive model, the properties of porous SMA with different porosity and pore shapes are discussed. The results showed that the pore shapes and the porosities had a big effect on the stress–strain curves for the porous shape memory, while with the increasing porosities, the Young’s modulus and the hysteresis both decreased. With the same porosities, the Young’s modulus and hysteresis loop of SMA with round pores were the largest, while the Young’s modulus and hysteresis loop were the smallest when r=0.1, and they were greater when r=0.75 than when r=10. It can be seen that the closer to the circle, the better the performance of the material. Full article
(This article belongs to the Special Issue Power-MEMS and Energy Storage Devices for On-Chip Microsystems)
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14 pages, 1629 KiB  
Article
Locality-Based Cache Management and Warp Scheduling for Reducing Cache Contention in GPU
by Juan Fang, Zelin Wei and Huijing Yang
Micromachines 2021, 12(10), 1262; https://doi.org/10.3390/mi12101262 - 17 Oct 2021
Cited by 5 | Viewed by 3149
Abstract
GPGPUs has gradually become a mainstream acceleration component in high-performance computing. The long latency of memory operations is the bottleneck of GPU performance. In the GPU, multiple threads are divided into one warp for scheduling and execution. The L1 data caches have little [...] Read more.
GPGPUs has gradually become a mainstream acceleration component in high-performance computing. The long latency of memory operations is the bottleneck of GPU performance. In the GPU, multiple threads are divided into one warp for scheduling and execution. The L1 data caches have little capacity, while multiple warps share one small cache. That makes the cache suffer a large amount of cache contention and pipeline stall. We propose Locality-Based Cache Management (LCM), combined with the Locality-Based Warp Scheduling (LWS), to reduce cache contention and improve GPU performance. Each load instruction can be divided into three types according to locality: only used once as streaming data locality, accessed multiple times in the same warp as intra-warp locality, and accessed in different warps as inter-warp data locality. According to the locality of the load instruction, LWS applies cache bypass to the streaming locality request to improve the cache utilization rate, extend inter-warp memory request coalescing to make full use of the inter-warp locality, and combine with the LWS to alleviate cache contention. LCM and LWS can effectively improve cache performance, thereby improving overall GPU performance. Through experimental evaluation, our LCM and LWS can obtain an average performance improvement of 26% over baseline GPU. Full article
(This article belongs to the Special Issue Power-MEMS and Energy Storage Devices for On-Chip Microsystems)
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14 pages, 10701 KiB  
Article
Enhancing the Electromechanical Coupling in Soft Energy Harvesters by Using Graded Dielectric Elastomers
by Lingling Chen and Shengyou Yang
Micromachines 2021, 12(10), 1187; https://doi.org/10.3390/mi12101187 - 30 Sep 2021
Cited by 6 | Viewed by 1889
Abstract
Soft dielectric elastomers can quickly achieve large deformations when they are subjected to electromechanical loads. They are widely used to fabricate a number of soft functional devices. However, the functions of soft devices are limited to the failure modes of soft dielectric elastomers. [...] Read more.
Soft dielectric elastomers can quickly achieve large deformations when they are subjected to electromechanical loads. They are widely used to fabricate a number of soft functional devices. However, the functions of soft devices are limited to the failure modes of soft dielectric elastomers. In this paper, we use graded dielectric elastomers to produce a soft energy harvester with a strong ability of energy harvesting. Compared to the conventional energy harvester with homogeneous dielectric films, our new energy harvester is made of graded elastomers and can increase both the specific energy from 2.70 J/g to 2.93 J/g and the maximum energy from 6.3 J/g to 8.6 J/g by just using a stiffer outer radius. By optimizing the material parameters in graded dielectric films, the soft energy harvester can reach better performance, and our results can provide guidance for designing powerful energy harvesters. Full article
(This article belongs to the Special Issue Power-MEMS and Energy Storage Devices for On-Chip Microsystems)
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10 pages, 3906 KiB  
Article
Effect of Nanopores on Mechanical Properties of the Shape Memory Alloy
by Chunzhi Du, Zhifan Li and Bingfei Liu
Micromachines 2021, 12(5), 529; https://doi.org/10.3390/mi12050529 - 7 May 2021
Cited by 2 | Viewed by 1892
Abstract
Nanoporous Shape Memory Alloys (SMA) are widely used in aerospace, military industry, medical and health and other fields. More and more attention has been paid to its mechanical properties. In particular, when the size of the pores is reduced to the nanometer level, [...] Read more.
Nanoporous Shape Memory Alloys (SMA) are widely used in aerospace, military industry, medical and health and other fields. More and more attention has been paid to its mechanical properties. In particular, when the size of the pores is reduced to the nanometer level, the effect of the surface effect of the nanoporous material on the mechanical properties of the SMA will increase sharply, and the residual strain of the SMA material will change with the nanoporosity. In this work, the expression of Young’s modulus of nanopore SMA considering surface effects is first derived, which is a function of nanoporosity and nanopore size. Based on the obtained Young’s modulus, a constitutive model of nanoporous SMA considering residual strain is established. Then, the stress–strain curve of dense SMA based on the new constitutive model is drawn by numerical method. The results are in good agreement with the simulation results in the published literature. Finally, the stress-strain curves of SMA with different nanoporosities are drawn, and it is concluded that the Young’s modulus and strength limit decrease with the increase of nanoporosity. Full article
(This article belongs to the Special Issue Power-MEMS and Energy Storage Devices for On-Chip Microsystems)
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Review

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26 pages, 4389 KiB  
Review
Research Progress on the Flexibility of an Implantable Neural Microelectrode
by Huiqing Zhao, Ruping Liu, Huiling Zhang, Peng Cao, Zilong Liu and Ye Li
Micromachines 2022, 13(3), 386; https://doi.org/10.3390/mi13030386 - 28 Feb 2022
Cited by 17 | Viewed by 4888
Abstract
Neural microelectrode is the important bridge of information exchange between the human body and machines. By recording and transmitting nerve signals with electrodes, people can control the external machines. At the same time, using electrodes to electrically stimulate nerve tissue, people with long-term [...] Read more.
Neural microelectrode is the important bridge of information exchange between the human body and machines. By recording and transmitting nerve signals with electrodes, people can control the external machines. At the same time, using electrodes to electrically stimulate nerve tissue, people with long-term brain diseases will be safely and reliably treated. Young’s modulus of the traditional rigid electrode probe is not matched well with that of biological tissue, and tissue immune rejection is easy to generate, resulting in the electrode not being able to achieve long-term safety and reliable working. In recent years, the choice of flexible materials and design of electrode structures can achieve modulus matching between electrode and biological tissue, and tissue damage is decreased. This review discusses nerve microelectrodes based on flexible electrode materials and substrate materials. Simultaneously, different structural designs of neural microelectrodes are reviewed. However, flexible electrode probes are difficult to implant into the brain. Only with the aid of certain auxiliary devices, can the implant be safe and reliable. The implantation method of the nerve microelectrode is also reviewed. Full article
(This article belongs to the Special Issue Power-MEMS and Energy Storage Devices for On-Chip Microsystems)
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28 pages, 4937 KiB  
Review
High-Adhesive Flexible Electrodes and Their Manufacture: A Review
by Yingying Xiao, Mengzhu Wang, Ye Li, Zhicheng Sun, Zilong Liu, Liang He and Ruping Liu
Micromachines 2021, 12(12), 1505; https://doi.org/10.3390/mi12121505 - 30 Nov 2021
Cited by 12 | Viewed by 5811
Abstract
All human activity is associated with the generation of electrical signals. These signals are collectively referred to as electrical physiology (EP) signals (e.g., electrocardiogram, electroencephalogram, electromyography, electrooculography, etc.), which can be recorded by electrodes. EP electrodes are not only widely used in the [...] Read more.
All human activity is associated with the generation of electrical signals. These signals are collectively referred to as electrical physiology (EP) signals (e.g., electrocardiogram, electroencephalogram, electromyography, electrooculography, etc.), which can be recorded by electrodes. EP electrodes are not only widely used in the study of primary diseases and clinical practice, but also have potential applications in wearable electronics, human–computer interface, and intelligent robots. Various technologies are required to achieve such goals. Among these technologies, adhesion and stretchable electrode technology is a key component for rapid development of high-performance sensors. In last decade, remarkable efforts have been made in the development of flexible and high-adhesive EP recording systems and preparation technologies. Regarding these advancements, this review outlines the design strategies and related materials for flexible and adhesive EP electrodes, and briefly summarizes their related manufacturing techniques. Full article
(This article belongs to the Special Issue Power-MEMS and Energy Storage Devices for On-Chip Microsystems)
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