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Micromachines
Special Issues
Miniaturized Piezoelectric Devices: Design, Fabrication and Applications
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Miniaturized Piezoelectric Devices: Design, Fabrication and Applications

A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "E：Engineering and Technology".

Deadline for manuscript submissions: closed (30 November 2023) | Viewed by 4430

Special Issue Editors

Prof. Dr. Sabina Merlo

E-Mail Website
Guest Editor
Dipartimento di Ingegneria Industriale e dell'Informazione, Università degli Studi di Pavia, 27100 Pavia, Italy
Interests: MEMS; MOEMS; optical sensors; interferometry; microphotonics; biophotonics; biosensors; lab on a chip
Special Issues, Collections and Topics in MDPI journals
Prof. Dr. Vittorio Ferrari

E-Mail Website
Guest Editor
Department of Information Engineering (DII), University of Brescia, Via Branze 38, 25123 Brescia, Italy
Interests: piezoelectric sensors and transducers; resonant and acoustic-wave sensors; energy harvesting for sensors; sensor interface electronics; MEMS and microsensors for physical quantities
Special Issues, Collections and Topics in MDPI journals

Special Issue Information

Dear Colleagues,

Electromechanical transducers that utilize the piezoelectric effect play an important role in a variety of applications where ultraminiaturized devices are required. Piezoelectric transducers ensure low-power operation, enabling electrical actuation and sensing. This Special Issue aims to collect research papers, communications, and review articles that report the latest results and progress on piezoelectric microdevices (and their applications) with regards to microoptic components (e.g., micromirrors and tunable microlenses), acoustic microdevices (e.g., microphones and micro-loudspeakers), and microsensors in general. We are looking forward to showcasing miniaturized piezoelectric devices for compact, lightweight applications, as well as microstructures incorporating piezo-actuators/sensors fabricated with MEMS technology. Demonstrations of innovative sensing configurations in which miniaturized piezoelectric devices play a key role are also solicited and welcome.

We are looking forward to receiving your submissions.

Prof. Dr. Sabina Merlo
Prof. Dr. Vittorio Ferrari
Guest Editors

Manuscript Submission Information

Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.

Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Micromachines is an international peer-reviewed open access monthly journal published by MDPI.

Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 2600 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.

Keywords

  • piezoelectric microdevices
  • piezoelectric micromirrors
  • piezo-tunable microlenses
  • piezo-tunable microoptic components
  • piezoelectric microphones
  • piezoelectric micro-loudspeakers
  • piezoelectric microsensors

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Published Papers (2 papers)

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Research

25 pages, 6117 KiB  
Article
Surface Acoustic Wave-Based Microfluidic Device for Microparticles Manipulation: Effects of Microchannel Elasticity on the Device Performance
by Gianluca Mezzanzanica, Olivier Français and Stefano Mariani
Micromachines 2023, 14(9), 1799; https://doi.org/10.3390/mi14091799 - 21 Sep 2023
Cited by 1 | Viewed by 2001
Abstract
Size sorting, line focusing, and isolation of microparticles or cells are fundamental ingredients in the improvement of disease diagnostic tools adopted in biology and biomedicine. Microfluidic devices are exploited as a solution to transport and manipulate (bio)particles via a liquid flow. Use of [...] Read more.
Size sorting, line focusing, and isolation of microparticles or cells are fundamental ingredients in the improvement of disease diagnostic tools adopted in biology and biomedicine. Microfluidic devices are exploited as a solution to transport and manipulate (bio)particles via a liquid flow. Use of acoustic waves traveling through the fluid provides non-contact solutions to the handling goal, by exploiting the acoustophoretic phenomenon. In this paper, a finite element model of a microfluidic surface acoustic wave-based device for the manipulation of microparticles is reported. Counter-propagating waves are designed to interfere inside a PDMS microchannel and generate a standing surface acoustic wave which is transmitted to the fluid as a standing pressure field. A model of the cross-section of the device is considered to perform a sensitivity analysis of such a standing pressure field to uncertainties related to the geometry of the microchannel, especially in terms of thickness and width of the fluid domain. To also assess the effects caused by possible secondary waves traveling in the microchannel, the PDMS is modeled as an elastic solid material. Remarkable effects and possible issues in microparticle actuation, as related to the size of the microchannel, are discussed by way of exemplary results. Full article
(This article belongs to the Special Issue Miniaturized Piezoelectric Devices: Design, Fabrication and Applications)
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11 pages, 3959 KiB  
Article
A Miniaturized Piezo Stack Impact Actuation Mechanism for Out-of-Plane Freely Moveable Masses
by Matthias C. Wapler, Constantin Peter, Koustav Kanjilal and Ulrike Wallrabe
Micromachines 2023, 14(6), 1192; https://doi.org/10.3390/mi14061192 - 3 Jun 2023
Viewed by 1515
Abstract
We present the prototype and analytical model of a miniaturized impact actuation mechanism, providing a fast out-of-plane displacement to accelerate objects against gravity, allowing for freely moving objects and hence for large displacements without the need for cantilevers. To achieve the necessary high [...] Read more.
We present the prototype and analytical model of a miniaturized impact actuation mechanism, providing a fast out-of-plane displacement to accelerate objects against gravity, allowing for freely moving objects and hence for large displacements without the need for cantilevers. To achieve the necessary high speed, we chose a piezoelectric stack actuator driven by a high-current pulse generator, connected to a rigid support and a rigid three-point contact with the object. We describe this mechanism with a spring-mass model and compare various spheres with different masses and diameters and from different materials. As expected, we found that larger flight heights are achieved by harder spheres, achieving, e.g., approx. 3 mm displacement for a 3 mm steel sphere using a 3 × 3 × 2 mm3 piezo stack. Full article
(This article belongs to the Special Issue Miniaturized Piezoelectric Devices: Design, Fabrication and Applications)
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