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MEMS and NEMS Sensors: 2nd Edition
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MEMS and NEMS Sensors: 2nd Edition

A special issue of Sensors (ISSN 1424-8220). This special issue belongs to the section "Physical Sensors".

Deadline for manuscript submissions: closed (25 November 2024) | Viewed by 2532

Special Issue Editor

Prof. Dr. Mustafa Yavuz

E-Mail Website
Guest Editor
Mechanical and Mechatronics Engineering Department, University of Waterloo, Waterloo, ON N2L 3G1, Canada
Interests: terahertz quantum tunneling metal-insulator-metal (MIM) diodes for quantum electronics; memristors; opto-nano- and micro-electro-mechanical systems (O-N/MEMS); photo-electro-chemical systems; nano-biosensors
Special Issues, Collections and Topics in MDPI journals

Special Issue Information

Dear colleagues,

The manufacturing and integration of autonomous and embedded sensors through a combination of micro- and nano-system technologies have revolutionized self-powered, high-bandwidth devices for advanced manufacturing (AM), artificial intelligence (AI), Internet of Things (IoT), and health technologies.

More specifically, nano- and micro-electro-mechanical-systems (N/MEMS) sensors are the building blocks for a vast range of applications, from continuous real-time health (wearable) and environmental monitoring (gas, biomolecules, pressure, temperature, etc.) to enabling embedded mobile internet services (wireless), including smart/connected cars and unattended vehicles (UAVs) (inertial). As these devices are present in the tens of billions, the potential for disruptive innovation has been immense.

The integration of nano- and micro-sensors, which are functionalized using emerging materials to complementary metal-oxide semiconductors (CMOSs) and microfluidics systems, and their electro-mechanical packing, represents a challenge. This is because the integration and packing require the deposition of multiple layers of different dielectrics and metals, and the atomic mismatch between these layers, acting as an electron trap, increases ohmic resistance and detection time, creates noise, and reduces sensitivity, selectivity, and responsivity.

This Special Issue aims to introduce the manufacturing, packaging, and integration of autonomous and embedded sensors through a combination of micro- and nano-systems. Topics in general include, but are not limited to, the following:

  • Autonomous and embedded sensors: design, manufacture, packaging, and reliability;
  • Biosensors (photonic, electrical, chemical) and their integration into MEMS, CMOS, and microfluidic systems for COVID-19 and other (future) pandemic proteins/metabolites/analytes;
  • Sensor interconnectors/interfaces and their testing;
  • Graphene-based nano-sensors;
  • Electronic circuits for MEMS nano-sensor modulation;
  • Nano-electro-mechanical sensors.

Prof. Dr. Mustafa Yavuz
Guest Editor

Manuscript Submission Information

Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.

Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Sensors is an international peer-reviewed open access semimonthly journal published by MDPI.

Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 2600 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.

Keywords

  • N/MEMS sensors
  • sensor integration to N/MEMS
  • CMOS and microfluidic systems
  • electronic circuits for N/MEMS nano-sensor modulation
  • bifurcation sensing
  • sensor functionalization
  • nano-electro-mechanical sensors
  • PeCOD

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Related Special Issue

Published Papers (3 papers)

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Research

16 pages, 5268 KiB  
Article
Discrimination of Explosive Residues by Standoff Sensing Using Anodic Aluminum Oxide Microcantilever Laser Absorption Spectroscopy with Kernel-Based Machine Learning
by Ho-Jung Jeong, Chang-Ju Park, Kihyun Kim and Yangkyu Park
Sensors 2024, 24(18), 5867; https://doi.org/10.3390/s24185867 - 10 Sep 2024
Viewed by 748
Abstract
Standoff laser absorption spectroscopy (LAS) has attracted considerable interest across many applications for environmental safety. Herein, we propose an anodic aluminum oxide (AAO) microcantilever LAS combined with machine learning (ML) for sensitive and selective standoff discrimination of explosive residues. A nanoporous AAO microcantilever [...] Read more.
Standoff laser absorption spectroscopy (LAS) has attracted considerable interest across many applications for environmental safety. Herein, we propose an anodic aluminum oxide (AAO) microcantilever LAS combined with machine learning (ML) for sensitive and selective standoff discrimination of explosive residues. A nanoporous AAO microcantilever with a thickness of <1 μm was fabricated using a micromachining process; its spring constant (18.95 mN/m) was approximately one-third of that of a typical Si microcantilever (53.41 mN/m) with the same dimensions. The standoff infrared (IR) spectra of pentaerythritol tetranitrate, cyclotrimethylene trinitramine, and trinitrotoluene were measured using our AAO microcantilever LAS over a wide range of wavelengths, and they closely matched the spectra obtained using standard Fourier transform infrared spectroscopy. The standoff IR spectra were fed into ML models, such as kernel extreme learning machines (KELMs), support vector machines (SVMs), random forest (RF), and backpropagation neural networks (BPNNs). Among these four ML models, the kernel-based ML models (KELM and SVM) were found to be efficient learning models able to satisfy both a high prediction accuracy (KELM: 94.4%, SVM: 95.8%) and short hyperparameter optimization time (KELM: 5.9 s, SVM: 7.6 s). Thus, the AAO microcantilever LAS with kernel-based learners could emerge as an efficient sensing method for safety monitoring. Full article
(This article belongs to the Special Issue MEMS and NEMS Sensors: 2nd Edition)
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17 pages, 21253 KiB  
Article
A Two-Axis Orthogonal Resonator for Variable Sensitivity Mode Localization Sensing
by Yuta Nagasaka, Alessia Baronchelli, Shuji Tanaka and Takashiro Tsukamoto
Sensors 2024, 24(13), 4038; https://doi.org/10.3390/s24134038 - 21 Jun 2024
Viewed by 615
Abstract
This paper experimentally demonstrates a mode localization sensing approach using a single two-axis orthogonal resonator. The resonator consists of concentric multi-rings connected by elliptic springs that enable two orthogonal oscillation modes. By electrostatically tuning the anisotropic stiffness between the two axes, the effective [...] Read more.
This paper experimentally demonstrates a mode localization sensing approach using a single two-axis orthogonal resonator. The resonator consists of concentric multi-rings connected by elliptic springs that enable two orthogonal oscillation modes. By electrostatically tuning the anisotropic stiffness between the two axes, the effective coupling stiffness between the modes can be precisely controlled down to near-zero values. This allows the sensitivity of mode localization sensing to be tuned over a wide range. An order of magnitude enhancement in sensitivity is experimentally achieved by reducing the coupling stiffness towards zero. The resonator’s simple single-mass structure offers advantages over conventional coupled resonator designs for compact, tunable mode localization sensors. Both positive and negative values of coupling stiffness are demonstrated, enabling maximum sensitivity at the point where coupling crosses through zero. A method for decomposing overlapping resonance peaks is introduced to accurately measure the amplitude ratios of the localized modes even at high sensitivities. The electrostatic tuning approach provides a new option for realizing variable sensitivity mode localization devices using a simplified resonator geometry. Full article
(This article belongs to the Special Issue MEMS and NEMS Sensors: 2nd Edition)
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8 pages, 2033 KiB  
Communication
Ultra-High Vacuum Cells Realized by Miniature Ion Pump Using High-Efficiency Plasma Source
by Yuichi Kurashima, Atsuhiko Maeda, Naoto Oshima, Taisei Motomura, Takashi Matsumae, Mitsuhiro Watanabe and Hideki Takagi
Sensors 2024, 24(12), 4000; https://doi.org/10.3390/s24124000 - 20 Jun 2024
Viewed by 748
Abstract
In recent years, there has been significant interest in quantum technology, characterized by the emergence of quantum computers boasting immense processing power, ultra-sensitive quantum sensors, and ultra-precise atomic clocks. Miniaturization of quantum devices using cold atoms necessitates the employment of an ultra-high vacuum [...] Read more.
In recent years, there has been significant interest in quantum technology, characterized by the emergence of quantum computers boasting immense processing power, ultra-sensitive quantum sensors, and ultra-precise atomic clocks. Miniaturization of quantum devices using cold atoms necessitates the employment of an ultra-high vacuum miniature cell with a pressure of approximately 10−6 Pa or even lower. In this study, we developed an ultra-high vacuum cell realized by a miniature ion pump using a high-efficiency plasma source. Initially, an unsealed miniature ion pump was introduced into a vacuum chamber, after which the ion pump’s discharge current, depending on vacuum pressures, was evaluated. Subsequently, a miniature vacuum cell was fabricated by hermetically sealing the miniature vacuum pump. The cell was successfully evacuated by a miniature ion pump down to an ultra-high vacuum region, which was derived by the measured discharge current. Our findings demonstrate the feasibility of achieving an ultra-high vacuum cell necessary for the operation of miniature quantum devices. Full article
(This article belongs to the Special Issue MEMS and NEMS Sensors: 2nd Edition)
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