Combined Thickness and Permittivity Measurement of Thin Layers with Open-Ended Coaxial Probes †
Abstract
:1. Introduction
2. Materials and Methods
2.1. Methodology
2.2. Experimental
2.3. FEM Simulations
3. Results and Discussion
3.1. Sensitivity Considerations
3.2. Verification of Methodology
3.3. Application Example
4. Conclusions
5. Patents
Author Contributions
Funding
Conflicts of Interest
References
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Folgerø, K.; Haukalid, K.; Kocbach, J.; Peterson, A.S. Combined Thickness and Permittivity Measurement of Thin Layers with Open-Ended Coaxial Probes. Sensors 2019, 19, 1765. https://doi.org/10.3390/s19081765
Folgerø K, Haukalid K, Kocbach J, Peterson AS. Combined Thickness and Permittivity Measurement of Thin Layers with Open-Ended Coaxial Probes. Sensors. 2019; 19(8):1765. https://doi.org/10.3390/s19081765
Chicago/Turabian StyleFolgerø, Kjetil, Kjetil Haukalid, Jan Kocbach, and Andreas Soto Peterson. 2019. "Combined Thickness and Permittivity Measurement of Thin Layers with Open-Ended Coaxial Probes" Sensors 19, no. 8: 1765. https://doi.org/10.3390/s19081765
APA StyleFolgerø, K., Haukalid, K., Kocbach, J., & Peterson, A. S. (2019). Combined Thickness and Permittivity Measurement of Thin Layers with Open-Ended Coaxial Probes. Sensors, 19(8), 1765. https://doi.org/10.3390/s19081765