Zheng, P.; Cai, B.; Zhu, T.; Yu, L.; Wu, W.; Tu, L.
Multi-Grid Capacitive Transducers for Measuring the Surface Profile of Silicon Wafers. Micromachines 2023, 14, 122.
https://doi.org/10.3390/mi14010122
AMA Style
Zheng P, Cai B, Zhu T, Yu L, Wu W, Tu L.
Multi-Grid Capacitive Transducers for Measuring the Surface Profile of Silicon Wafers. Micromachines. 2023; 14(1):122.
https://doi.org/10.3390/mi14010122
Chicago/Turabian Style
Zheng, Panpan, Bingyang Cai, Tao Zhu, Li Yu, Wenjie Wu, and Liangcheng Tu.
2023. "Multi-Grid Capacitive Transducers for Measuring the Surface Profile of Silicon Wafers" Micromachines 14, no. 1: 122.
https://doi.org/10.3390/mi14010122
APA Style
Zheng, P., Cai, B., Zhu, T., Yu, L., Wu, W., & Tu, L.
(2023). Multi-Grid Capacitive Transducers for Measuring the Surface Profile of Silicon Wafers. Micromachines, 14(1), 122.
https://doi.org/10.3390/mi14010122