Li, J.; Feng, R.; Wang, X.; Cao, H.; Gong, K.; Xie, H.
A Micromachined Silicon-on-Glass Accelerometer with an Optimized Comb Finger Gap Arrangement. Micromachines 2024, 15, 1173.
https://doi.org/10.3390/mi15091173
AMA Style
Li J, Feng R, Wang X, Cao H, Gong K, Xie H.
A Micromachined Silicon-on-Glass Accelerometer with an Optimized Comb Finger Gap Arrangement. Micromachines. 2024; 15(9):1173.
https://doi.org/10.3390/mi15091173
Chicago/Turabian Style
Li, Jiacheng, Rui Feng, Xiaoyi Wang, Huiliang Cao, Keru Gong, and Huikai Xie.
2024. "A Micromachined Silicon-on-Glass Accelerometer with an Optimized Comb Finger Gap Arrangement" Micromachines 15, no. 9: 1173.
https://doi.org/10.3390/mi15091173
APA Style
Li, J., Feng, R., Wang, X., Cao, H., Gong, K., & Xie, H.
(2024). A Micromachined Silicon-on-Glass Accelerometer with an Optimized Comb Finger Gap Arrangement. Micromachines, 15(9), 1173.
https://doi.org/10.3390/mi15091173