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Journal: Micromachines, 2024
Volume: 15
Number: 1173
Article:
A Micromachined Silicon-on-Glass Accelerometer with an Optimized Comb Finger Gap Arrangement
Authors:
by
Jiacheng Li, Rui Feng, Xiaoyi Wang, Huiliang Cao, Keru Gong and Huikai Xie
Link:
https://www.mdpi.com/2072-666X/15/9/1173
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