MEMS for Aerospace Applications, 2nd Edition

A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "A:Physics".

Deadline for manuscript submissions: closed (31 December 2023) | Viewed by 10354

Special Issue Editor


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Guest Editor
Department of Mechanical and Industrial Engineering, Concordia University, 1455 de Maisonneuve Blvd. West, Montreal, QC H3G 1M8, Canada
Interests: microsystems; sensing (inertial, flow, load, strain); design of MEMS; data processing; modeling of coupled micro and macro systems; packaging of microsensors; MEMS for turbulence control; microfabrication; non-conventional microfabrication; rapid prototyping; migration from auto to aero; reliability of MEMS; failure models; test methodologies
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Special Issue Information

Dear Colleagues,

When the first microsystems were conceived, the scientists working on such devices only envisaged the use of MEMS in miniature applications. However, the development of knowledge in microsystems proved that there are many macro applications, and that MEMS could successfully be implemented in power-using applications. As a matter of fact, the automotive business was one of the first users of microsystems—in air bag deployment assemblies, as early as 1991. Since then, the technology gained interest and novel applications emerged. In addition to health care products, aerospace applications were investigated, with extremely encouraging results. An airplane needs high-density power generators, but their control can be accomplished by small devices, which could be developed and implemented as MEMS. The significant potential of microsystems in aerospace applications has received minimal investigation, and novel devices could be conceived to detect engine malfunction, detect specific physical quantities which may represent risk factors for aircraft operation, provide access to information about power consumption reduction during a cruise, and provide predictive assessment of the remaining life of the equipment on the aircraft. Moreover, space exploration cannot be conceived without the existence of microsystems which are capable of operating under extreme conditions (temperature, radiation, etc.). The aim of this Special Issue is to host original research works on microsystems for which applications may include aerospace vehicles, space investigation devices, and their control applications. This Special Issue will also accommodate papers which present applications which could be extended to aerospace applications.

Prof. Dr. Ion Stiharu
Guest Editor

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Keywords

  • micro-sensors for aerospace applications
  • micro-systems for harsh environments
  • micro-actuators
  • energy-harvesting systems
  • boundary-layer modifiers
  • MEMS sensors
  • MEMS actuators
  • MEMS energy harvesting
  • sensors for harsh environments
  • SiC MEMS
  • SiCN MEMS

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Related Special Issue

Published Papers (5 papers)

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Research

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14 pages, 2557 KiB  
Article
A High-Reliability 12T SRAM Radiation-Hardened Cell for Aerospace Applications
by Ruxue Yao, Hongliang Lv, Yuming Zhang, Xu Chen, Yutao Zhang, Xingming Liu and Geng Bai
Micromachines 2023, 14(7), 1305; https://doi.org/10.3390/mi14071305 - 25 Jun 2023
Cited by 3 | Viewed by 2417
Abstract
The static random-access memory (SRAM) cells used in the high radiation environment of aerospace have become highly vulnerable to single-event effects (SEE). Therefore, a 12T SRAM-hardened circuit (RHB-12T cell) for the soft error recovery is proposed using the radiation hardening design (RHBD) concept. [...] Read more.
The static random-access memory (SRAM) cells used in the high radiation environment of aerospace have become highly vulnerable to single-event effects (SEE). Therefore, a 12T SRAM-hardened circuit (RHB-12T cell) for the soft error recovery is proposed using the radiation hardening design (RHBD) concept. To verify the performance of the RHB-12T, the proposed cell is simulated by the 28 nm CMOS process and compared with other hardened cells (Quatro-10T, WE-Quatro-12T, RHM-12T, RHD-12T, and RSP-14T). The simulation results show that the RHB-12T cell can recover not only from single-event upset caused by their sensitive nodes but also from single-event multi-node upset caused by their storage node pairs. The proposed cell exhibits 1.14×/1.23×/1.06× shorter read delay than Quatro-10T/WE-Quatro-12T/RSP-14T and 1.31×/1.11×/1.18×/1.37× shorter write delay than WE-Quatro-12T/RHM-12T/RHD-12T/RSP-14T. It also shows 1.35×/1.11×/1.04× higher read stability than Quatro-10T/RHM-12T/RHD-12T and 1.12×/1.04×/1.09× higher write ability than RHM-12T/RHD-12T/RSP-14T. All these improvements are achieved at the cost of a slightly larger area and power consumption. Full article
(This article belongs to the Special Issue MEMS for Aerospace Applications, 2nd Edition)
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22 pages, 6770 KiB  
Article
A Dual-Axis Rotation Scheme for Redundant Rotational Inertial Navigation System
by Ting Zhu, Lifen Wang, Tao Zou and Gao Peng
Micromachines 2023, 14(2), 351; https://doi.org/10.3390/mi14020351 - 30 Jan 2023
Cited by 3 | Viewed by 1965
Abstract
A redundant rotational inertial navigation system (RRINS) comprises a redundant inertial measurement unit (RIMU) and a turntable for improving reliability and navigation accuracy. Because of the multi-sensor configuration, the RIMU has a more complex error model compared with the traditional orthogonal inertial measurement [...] Read more.
A redundant rotational inertial navigation system (RRINS) comprises a redundant inertial measurement unit (RIMU) and a turntable for improving reliability and navigation accuracy. Because of the multi-sensor configuration, the RIMU has a more complex error model compared with the traditional orthogonal inertial measurement unit (IMU). Therefore, the RIMU-based rotation scheme cannot simply replicate the traditional IMU-based rotation scheme. In this study, a dual-axis rotation scheme for RIMU characteristics is proposed. First, the error model of the RIMU was established, and the error compensation of RIMU caused by rotation was analyzed. Second, the principles of rotation axis switching and reciprocating rotation were summarized, and a dual-axis rotation scheme was designed by these principles. Finally, the rotation scheme was applied to an RRINS prototype consisting of RIMU (four fiber optic gyroscopes + four quartz accelerometers) and a dual-axis turntable, and then simulations and experiments were performed. The results of the simulations and experiments show that the positioning accuracy of RRINS can be obviously improved by using the proposed rotation scheme. Full article
(This article belongs to the Special Issue MEMS for Aerospace Applications, 2nd Edition)
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18 pages, 8954 KiB  
Article
A Bias Drift Suppression Method Based on ICELMD and ARMA-KF for MEMS Gyros
by Lihui Feng, Le Du, Junqiang Guo, Jianmin Cui, Jihua Lu, Zhengqiang Zhu and Lijuan Wang
Micromachines 2023, 14(1), 109; https://doi.org/10.3390/mi14010109 - 30 Dec 2022
Cited by 2 | Viewed by 1524
Abstract
The applications of Micro-Electro-Mechanical-System (MEMS) gyros in inertial navigation system is gradually increasing. However, the random drift of gyro deteriorates the system performance which restricting the applications of high precision. We propose a bias drift compensation model based on two-fold Interpolated Complementary Ensemble [...] Read more.
The applications of Micro-Electro-Mechanical-System (MEMS) gyros in inertial navigation system is gradually increasing. However, the random drift of gyro deteriorates the system performance which restricting the applications of high precision. We propose a bias drift compensation model based on two-fold Interpolated Complementary Ensemble Local Mean Decomposition (ICELMD) and autoregressive moving average-Kalman filtering (ARMA-KF). We modify CELMD into ICELMD, which is less complicated and overcomes the endpoint effect. Further, the ICELMD is combined with ARMA-KF to separate and simplify the preprocessed signal, resulting improved denoising performance. In the model, the abnormal noise is removed in preprocess by 2σ criterion with ICELMD. Then, continuous mean square error (CMSE) and Permutation Entropy (PE) are both applied to categorize the preprocessed signal into noise, mixed and useful components. After abandon the noise components and denoise the mixed components by ARMA-KF, we rebuild the noise suppression signal of MEMS gyro. Experiments are carried out to validate the proposed algorithm. The angle random walk of gyro decreases from 2.4156/h to 0.0487/h, the zero bias instability lowered from 0.3753/h to 0.0509/h. Further, the standard deviation and the variance are greatly reduced, indicating that the proposed method has better suppression effect, stability and adaptability. Full article
(This article belongs to the Special Issue MEMS for Aerospace Applications, 2nd Edition)
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13 pages, 4500 KiB  
Article
A Single-Event-Hardened Scheme of Phase-Locked Loop Microsystems for Aerospace Applications
by Qi Xiang, Hongxia Liu and Yulun Zhou
Micromachines 2022, 13(12), 2102; https://doi.org/10.3390/mi13122102 - 28 Nov 2022
Cited by 2 | Viewed by 1739
Abstract
In order to improve the ability of the phase-locked loop (PLL) microsystem applied in the aerospace environment to suppress the irradiation effect, this study presents an efficient charge pump hardened scheme by using the radiation-hardened-by-design (RHBD) technology. In this study, the sensitivity analysis [...] Read more.
In order to improve the ability of the phase-locked loop (PLL) microsystem applied in the aerospace environment to suppress the irradiation effect, this study presents an efficient charge pump hardened scheme by using the radiation-hardened-by-design (RHBD) technology. In this study, the sensitivity analysis of the single-event transient (SET) at different nodes of charge pump and different bombardment energies is carried out. Without changing the original structure and loop parameters, a hardened scheme of phase-locked loop to suppress the single-event effect is proposed. A digital control circuit is added between the charge pump and low-pass filter, which greatly reduces the sensitivity of the charge pump to the SET. The classical double-exponential current pulse model is used to simulate the SET effect on the unreinforced and reinforced phase-locked loops, and the reliability of the proposed reinforcement scheme is verified. The simulation results based on the SMIC 130 nm standard complementary metal–oxide–semiconductor (CMOS) process show that the peak value of the transient response fluctuation of the phase-locked loop using the proposed single-event-hardened scheme decreased by 94.2%, the lock recovery time increased by 75.3%, and the maximum phase shift decreased by 90.8%. This shows that the hardened scheme can effectively reduce the sensitivity of the PLL microsystems to the SET effects. Full article
(This article belongs to the Special Issue MEMS for Aerospace Applications, 2nd Edition)
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Review

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23 pages, 2396 KiB  
Review
Review of RF Device Behavior Model: Measurement Techniques, Applications, and Challenges
by Haode Li, Jiangtao Su, Ruijin Wang, Zhenyu Liu and Mengmeng Xu
Micromachines 2024, 15(1), 46; https://doi.org/10.3390/mi15010046 - 25 Dec 2023
Cited by 1 | Viewed by 1814
Abstract
This review presents a concise overview of RF (radio frequency) power transistor behavior models, which is crucial for optimizing RF performance in high-frequency applications like wireless communication, radar, and satellites. The paper highlights the significance of accurate modeling in understanding transistor behavior and [...] Read more.
This review presents a concise overview of RF (radio frequency) power transistor behavior models, which is crucial for optimizing RF performance in high-frequency applications like wireless communication, radar, and satellites. The paper highlights the significance of accurate modeling in understanding transistor behavior and traces the evolution of behavior modeling techniques. Different behavior modeling strategies, such as LUT (look-up table) based models, polynomial equation-based models, and machine learning based models, are discussed along with their unique characteristics and modeling challenges. The review explores the difference between behavior models and the conventional empirical or physics-based modeling approaches, addressing the challenges of the accurate characterization of transistors at high frequencies and power levels. This paper concludes with an outlook of emerging trends, such as physical models combined with behavior models, shaping the future of RF power transistor modeling for more efficient communication systems. Full article
(This article belongs to the Special Issue MEMS for Aerospace Applications, 2nd Edition)
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