Micro/Nano Manipulation Technologies for Flexible Electronics

A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "A:Physics".

Deadline for manuscript submissions: closed (15 March 2022) | Viewed by 9544

Special Issue Editors


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Guest Editor
Department of Electronic Engineering, The Chinese University of Hong Kong, Shatin, Hong Kong
Interests: micro/nano manipulation; micro/nano positioning; flexible electronics; micro transfer printing
Special Issues, Collections and Topics in MDPI journals
College of Mechanical and Electrical Engineering, Central South University, Changsha, China
Interests: robotics; compliant mechanism; PEA control algorism; micro/nano manipulation and manufacturing
Special Issues, Collections and Topics in MDPI journals

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Guest Editor
Aeronautical Engineering Institute, Civil Aviation University of China, Tianjin, China
Interests: micro/nano manipulation; micro/nano positioning; tip-based nanofabrication

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Guest Editor
Department of Electronic Engineering, The Chinese University of Hong Kong, Shatin, Hong Kong
Interests: photodetectors; field-effect transistors; flexible electronics; biomedical sensors/systems
Special Issues, Collections and Topics in MDPI journals

Special Issue Information

Dear Colleagues,

Flexible electronics have developed rapidly and been widely used in the fields of medical treatment, biological engineering, and microelectronics industry. Now, a series of micro/nano manufacturing methods, such as lithography, soft lithography, nanoimprints, micro/nano 3D printing, etc., are widely used in the fabrication of flexible electronics. However, as the requirements of flexible electronic performance become higher, it is difficult to realize the manufacturing of higher-performance flexible electronics, such as heterogeneous, 3D or multilayer devices, only relying on one or several of the above manufacturing methods. Micro/nano manipulation technologies can solve the above problem by transferring, assembling, and integrating micro/nano components with different materials, sizes, and shapes to form heterogeneous, 3D, or multilayer devices. This opens up a new window for further improvement of the performance of soft electronics. Meanwhile, there are still some challenges in terms of the system, mechanism, and method of micro/nano manipulation for widespread industrial application. Accordingly, this Special Issue seeks to showcase research papers, communications, and review articles that focus on the latest results and findings in micro/nano manipulation technologies, micro/nano handling robots and systems, micro/nano assembly technology, and micro/nano positioning systems.

Dr. Cunman Liang
Dr. Zhilai Lu
Dr. Zhiyong Guo
Dr. Guodong Zhou
Guest Editors

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Keywords

  • micro/nano manipulation
  • micro/nano fabrication
  • flexible electronics
  • micro/nano positioning

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Published Papers (3 papers)

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Research

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13 pages, 3620 KiB  
Article
Design and Analysis of a Microgripper with Three-Stage Amplification Mechanism for Micromanipulation
by Yuan Hong, Yimin Wu, Shichao Jin, Dayong Liu and Baihong Chi
Micromachines 2022, 13(3), 366; https://doi.org/10.3390/mi13030366 - 25 Feb 2022
Cited by 9 | Viewed by 2101
Abstract
This paper proposes a novel microgripper with two working modes. The microgripper is designed with symmetric structure and each part is actuated by one piezoelectric actuator, respectively. To achieve desired output displacement, each part of the microgripper is designed with three-stage amplification mechanism [...] Read more.
This paper proposes a novel microgripper with two working modes. The microgripper is designed with symmetric structure and each part is actuated by one piezoelectric actuator, respectively. To achieve desired output displacement, each part of the microgripper is designed with three-stage amplification mechanism to amplify the displacement of the PZT actuator. According to the size of the microobjects, the grasping operation can be completed by one finger moving or two fingers moving simultaneously. Then, the theoretical analysis is carried out to calculated the key characteristics, including amplification, input stiffness and frequency. Finite element analysis (FEA) is conducted to optimize the structural parameters and investigate the performance of the microgripper. Finally, a prototype is machined by wire electro-discharge machining (WEDM) method and experiments are carried out to verify the performance of the microgripper. The results indicate that the amplification is 10.41 and the motion stroke of one jaw is 118.34 µm when the input voltage is 100 V. The first natural frequency is 746.56 Hz. By picking and placing the wires with different diameters and slices with different thickness, the grasping stability is verified. Full article
(This article belongs to the Special Issue Micro/Nano Manipulation Technologies for Flexible Electronics)
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17 pages, 4264 KiB  
Article
Adaptive Notch Filter for Piezo-Actuated Nanopositioning System via Position and Online Estimate Dual-Mode
by Chengsi Huang and Hongcheng Li
Micromachines 2021, 12(12), 1525; https://doi.org/10.3390/mi12121525 - 8 Dec 2021
Cited by 3 | Viewed by 2170
Abstract
Due to the excellent advantages of high speed, high precision, and driving force, piezoelectric actuators nanopositioning systems have been widely used in various micro/nanomachining fields. However, the inherent resonance dynamic of the nanopositioning system generated by the flexure-hinge greatly deteriorates the positioning performance [...] Read more.
Due to the excellent advantages of high speed, high precision, and driving force, piezoelectric actuators nanopositioning systems have been widely used in various micro/nanomachining fields. However, the inherent resonance dynamic of the nanopositioning system generated by the flexure-hinge greatly deteriorates the positioning performance and limits the closed-loop bandwidth. Even worse, the notch filter for eliminating the effect of resonance does not work due to the varying resonant frequency resulting from the external disturbance or mass load. To this end, an adaptive notch filter for piezo-actuated nanopositioning system via position and online estimate dual-mode (POEDM) has been proposed in this paper, which can estimate the varying resonant frequency in real-time and suppress the resonance to improve the closed-loop bandwidth. First, a novel variable forgetting factor recursive least squares (VFF-RLS) algorithm for estimating resonant frequency online is presented, which is robust to the noise and provides the performances of both fast tracking and stability. Then, a POEDM method is proposed to achieve the online identification of the resonant frequency in the presence of noise and disturbance. Finally, a series of validation simulations are carried out, and the results indicate that, the frequency of input signal and the bandwidth have been achieved up to 12.5% and 87.5% of the first resonant frequency, respectively. Full article
(This article belongs to the Special Issue Micro/Nano Manipulation Technologies for Flexible Electronics)
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Review

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27 pages, 8154 KiB  
Review
Research Progress of Microtransfer Printing Technology for Flexible Electronic Integrated Manufacturing
by Li Zhang, Chong Zhang, Zheng Tan, Jingrong Tang, Chi Yao and Bo Hao
Micromachines 2021, 12(11), 1358; https://doi.org/10.3390/mi12111358 - 3 Nov 2021
Cited by 12 | Viewed by 3344
Abstract
In recent years, with the rapid development of the flexible electronics industry, there is an urgent need for a large-area, multilayer, and high-production integrated manufacturing technology for scalable and flexible electronic products. To solve this technical demand, researchers have proposed and developed microtransfer [...] Read more.
In recent years, with the rapid development of the flexible electronics industry, there is an urgent need for a large-area, multilayer, and high-production integrated manufacturing technology for scalable and flexible electronic products. To solve this technical demand, researchers have proposed and developed microtransfer printing technology, which picks up and prints inks in various material forms from the donor substrate to the target substrate, successfully realizing the integrated manufacturing of flexible electronic products. This review retrospects the representative research progress of microtransfer printing technology for the production of flexible electronic products and emphasizes the summary of seal materials, the basic principles of various transfer technology and fracture mechanics models, and the influence of different factors on the transfer effect. In the end, the unique functions, technical features, and related printing examples of each technology are concluded and compared, and the prospects of further research work on microtransfer printing technology is finally presented. Full article
(This article belongs to the Special Issue Micro/Nano Manipulation Technologies for Flexible Electronics)
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