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Micromachines
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SU-8 for Microfluidics and Lab-on-a-chip
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SU-8 for Microfluidics and Lab-on-a-chip

A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "D：Materials and Processing".

Deadline for manuscript submissions: closed (15 November 2018) | Viewed by 19218

Special Issue Editors

Dr. Steve Arscott

E-Mail Website
Guest Editor
Institut d’Electronique, de Microélectronique et de Nanotechnologie (IEMN), CNRS, The University of Lille, Cité Scientifique, 59652 Villeneuve d'Ascq, France
Interests: micro and nanotechnology; micro and nanoelectromechanical systems; microfluidics and lab-on-a-chip; droplet microfluidics and electrowetting; flexible electronics and systems; piezoresistance
Dr. Ville Jokinen

E-Mail Website
Guest Editor
Department of Chemistry and Materials Science, School of Chemical Engineering, Aalto University, Micronova, Tietotie 3, 02150 Espoo, Finland
Interests: micro and nanofabrication; polymer materials; microfluidics for cell biology and analytical chemistry; wetting; superhydrophobicity
Special Issues, Collections and Topics in MDPI journals

Special Issue Information

Dear Colleagues,

The versatile epoxy-based, negative photoresist SU-8 has proved to be a very powerful enabling technology in the sphere of micro and nano fabrication. SU-8 is sensitive to ultraviolet, x-ray, and electron beam lithography—enabling the definition of very thick (millimetre), grey-scale, high-aspect-ratio features, as well as very small (nanometre), complex features using two-photon lithography. It can be used to form the mechanical parts of an intricate mould and the mechanical parts of a micro and nanoelectromechanical (MEMS/NEMS) system. SU-8 is both chemically-robust and, in many cases, biocompatible depending on the particular application. In as much, SU-8 is increasingly being used as an integral component in the microfabrication of microfluidic devices and lab-on-a-chip. This Special Issue seeks to showcase research papers, short communications, and review articles that focus on all aspects where SU-8 is being applied to Microfluidics and Lab-on-a-Chip—from fundamental fabrication aspects, e.g., lithography and resist modification, and their characterization to full systems and their applications.

Dr. Steve Arscott
Dr. Ville Jokinen
Guest Editors

Manuscript Submission Information

Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.

Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Micromachines is an international peer-reviewed open access monthly journal published by MDPI.

Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 2600 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.

Keywords

  • SU-8
  • Microfluidics
  • Lab-on-a-chip
  • Micro and nanofabrication
  • Lithographic techniques
  • Physical and chemical modification
  • Miniaturization
  • Integration
  • Characterization

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Published Papers (4 papers)

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Research

11 pages, 2853 KiB  
Article
Microfluidic Long-Term Gradient Generator with Axon Separation Prototyped by 185 nm Diffused Light Photolithography of SU-8 Photoresist
by Nobuyuki Futai, Makoto Tamura, Tomohisa Ogawa and Masato Tanaka
Micromachines 2019, 10(1), 9; https://doi.org/10.3390/mi10010009 - 24 Dec 2018
Cited by 7 | Viewed by 3896
Abstract
We have developed a cast microfluidic chip for concentration gradient generation that contains a thin (~5 µm2 cross-sectional area) microchannel. The diffusion of diffused 185 nm ultraviolet (UV) light from an inexpensive low-pressure mercury lamp exposed a layer of the SU-8 photoresist [...] Read more.
We have developed a cast microfluidic chip for concentration gradient generation that contains a thin (~5 µm2 cross-sectional area) microchannel. The diffusion of diffused 185 nm ultraviolet (UV) light from an inexpensive low-pressure mercury lamp exposed a layer of the SU-8 photoresist from the backside and successfully patterned durable 2 µm-high microchannel mold features with smooth bell-shaped sidewalls. The thin channel had appropriate flow resistance and simultaneously satisfied both the rapid introduction of test substance and long-term maintenance of gradients. The average height and width at the half height of the channel, defined by a 2 µm-wide line mask pattern, were 2.00 ± 0.19 µm, and 2.14 ± 0.89 µm, respectively. We were able to maintain the concentration gradient of Alexa Fluor 488 fluorescent dye inside or at the exit of the thin microchannel in an H-shaped microfluidic configuration for at least 48 h. We also demonstrated the cultivation of chick embryo dorsal root ganglion neuronal cells for 96 h, and the directional elongation of axons under a nerve growth factor concentration gradient. Full article
(This article belongs to the Special Issue SU-8 for Microfluidics and Lab-on-a-chip)
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13 pages, 4377 KiB  
Article
Integration Method of Microchannel and Vertical Micromesh Structure for Three-Dimensional Cell Culture Using Inclined Exposure and Inclined Oxygen Ashing
by Hidetaka Ueno, Kou Yamada and Takaaki Suzuki
Micromachines 2018, 9(12), 681; https://doi.org/10.3390/mi9120681 - 19 Dec 2018
Cited by 5 | Viewed by 3847
Abstract
Culturing cellular tissues inside a microchannel using an artificial three-dimensional (3D) microstructure is normally conducted to elucidate and reproduce a biological function. The thick photoresist SU-8, which has a microscale resolution and high aspect ratio, is widely used for the fabrication of microchannels [...] Read more.
Culturing cellular tissues inside a microchannel using an artificial three-dimensional (3D) microstructure is normally conducted to elucidate and reproduce a biological function. The thick photoresist SU-8, which has a microscale resolution and high aspect ratio, is widely used for the fabrication of microchannels and scaffolds having 3D structures for cell culture. However, it is difficult to accurately fabricate a mesh structure with a pore size that is smaller than the cells that has an overall height greater than 50 μm because of the deterioration of the verticality of exposure light and the diffusion of acid, which accelerates the crosslinking reaction in the SU-8 layer. In this study, we propose a method of integrating a vertical porous membrane into a microchannel. The resolution of the vertical porous membrane becomes more accurate through inclined oxygen ashing, without degrading the robustness. Because a single mask pattern is required for the proposed method, assembly error is not generated using the assembly-free process. The fabricated vertical porous membrane in the microchannel contained micropores that were smaller than the cells and sufficiently robust for a microfluidic system. HepG2 cells were attached three-dimensionally on the fabricated vertical porous membrane to demonstrate 3D cell culture. Full article
(This article belongs to the Special Issue SU-8 for Microfluidics and Lab-on-a-chip)
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11 pages, 2419 KiB  
Communication
Sacrificial Layer Technique for Releasing Metallized Multilayer SU-8 Devices
by Anand Tatikonda, Ville P. Jokinen, Hanno Evard and Sami Franssila
Micromachines 2018, 9(12), 673; https://doi.org/10.3390/mi9120673 - 19 Dec 2018
Cited by 6 | Viewed by 5063
Abstract
The low fabrication cost of SU-8-based devices has opened the fields of point-of-care devices (POC), µTAS and Lab-on-Chip technologies, which call for cheap and disposable devices. Often this translates to free-standing, suspended devices and a reusable carrier wafer. This necessitates a sacrificial layer [...] Read more.
The low fabrication cost of SU-8-based devices has opened the fields of point-of-care devices (POC), µTAS and Lab-on-Chip technologies, which call for cheap and disposable devices. Often this translates to free-standing, suspended devices and a reusable carrier wafer. This necessitates a sacrificial layer to release the devices from the substrates. Both inorganic (metals and oxides) and organic materials (polymers) have been used as sacrificial materials, but they fall short for fabrication and releasing multilayer SU-8 devices. We propose photoresist AZ 15nXT (MicroChemicals GmbH, Ulm, Germany) to be used as a sacrificial layer. AZ 15nXT is stable during SU-8 processing, making it suitable for fabricating free-standing multilayer devices. We show two methods for cross-linking AZ 15nXT for stable sacrificial layers and three routes for sacrificial release of the multilayer SU-8 devices. We demonstrate the capability of our release processes by fabrication of a three-layer free-standing microfluidic electrospray ionization (ESI) chip and a free-standing multilayer device with electrodes in a microchannel. Full article
(This article belongs to the Special Issue SU-8 for Microfluidics and Lab-on-a-chip)
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15 pages, 3778 KiB  
Article
Interfacing Digital Microfluidics with Ambient Mass Spectrometry Using SU-8 as Dielectric Layer
by Gowtham Sathyanarayanan, Markus Haapala and Tiina Sikanen
Micromachines 2018, 9(12), 649; https://doi.org/10.3390/mi9120649 - 8 Dec 2018
Cited by 11 | Viewed by 5390
Abstract
This work describes the interfacing of electrowetting-on-dielectric based digital microfluidic (DMF) sample preparation devices with ambient mass spectrometry (MS) via desorption atmospheric pressure photoionization (DAPPI). The DMF droplet manipulation technique was adopted to facilitate drug distribution and metabolism assays in droplet scale, while [...] Read more.
This work describes the interfacing of electrowetting-on-dielectric based digital microfluidic (DMF) sample preparation devices with ambient mass spectrometry (MS) via desorption atmospheric pressure photoionization (DAPPI). The DMF droplet manipulation technique was adopted to facilitate drug distribution and metabolism assays in droplet scale, while ambient mass spectrometry (MS) was exploited for the analysis of dried samples directly on the surface of the DMF device. Although ambient MS is well-established for bio- and forensic analyses directly on surfaces, its interfacing with DMF is scarce and requires careful optimization of the surface-sensitive processes, such as sample precipitation and the subsequent desorption/ionization. These technical challenges were addressed and resolved in this study by making use of the high mechanical, thermal, and chemical stability of SU-8. In our assay design, SU-8 served as the dielectric layer for DMF as well as the substrate material for DAPPI-MS. The feasibility of SU-8 based DMF devices for DAPPI-MS was demonstrated in the analysis of selected pharmaceuticals following on-chip liquid-liquid extraction or an enzymatic dealkylation reaction. The lower limits of detection were in the range of 1–10 pmol per droplet (0.25–1.0 µg/mL) for all pharmaceuticals tested. Full article
(This article belongs to the Special Issue SU-8 for Microfluidics and Lab-on-a-chip)
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