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Micromachines
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Diamond: Materials, Devices and Applications
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Diamond: Materials, Devices and Applications

A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "D：Materials and Processing".

Deadline for manuscript submissions: closed (30 June 2021) | Viewed by 19331

Special Issue Editors

Prof. Dr. Elke Neu

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Guest Editor
Fachbereich Physik, Technische Universität Kaiserslautern, Erwin-Schrödinger-Strasse, D-67663 Kaiserslautern, Germany
Interests: color centers in diamond; single photon sources; scanning probe imaging with color centers in diamond; diamond nanofabrication
Special Issues, Collections and Topics in MDPI journals
Dr. Štěpán Potocký

E-Mail
Co-Guest Editor
Department of Diamond and Associated Materials, Institution of Physics of the Czech Academy of Sciences, Cukrovarnická 10, 16253 Praha, Czech Republic

Special Issue Information

Dear colleagues,

Recent years have seen tremendous advances in diamond-based technologies. These advances have triggered novel applications in fields spanning from quantum technologies, (quantum) sensing, photonics, and NEMS and MEMS devices, and find applications in many fields of research, such as the life sciences and material sciences. Many recent advances fostered by novel insights into color centers in diamonds often functionalize diamond devices, advances in available diamond materials, novel device designs, and novel approaches to apply to diamonds. In this Special Issue, we would like to highlight recent developments in this emerging and strongly interdisciplinary field. We consequently invite contributions from various aspects of diamond micro- and nanotechnologies, including but not restricted to material aspects (synthesis, nanomaterials, hybrid materials), device fabrication, device functionalization (color centers, surfaces etc.), and device design as well as applications of diamond technologies in various fields. We also encourage submissions on numerical and theory work on the above topics with a strong link to applications and technology.

This Special Issue will provide a highly visible, multi-disciplinary open access collection of recent advances from various fields of diamond-based technologies.

Jun.-Prof. Elke Neu
Dr. Štěpán Potocký
Guest Editor

Manuscript Submission Information

Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.

Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Micromachines is an international peer-reviewed open access monthly journal published by MDPI.

Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 2600 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.

Keywords

  • diamond
  • nanophotonics
  • quantum sensing
  • nanofabrication
  • color centers

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Published Papers (4 papers)

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Research

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11 pages, 2627 KiB  
Article
The Influence of Wire Speed on Phase Transitions and Residual Stress in Single Crystal Silicon Wafers Sawn by Resin Bonded Diamond Wire Saw
by Tengyun Liu, Peiqi Ge and Wenbo Bi
Micromachines 2021, 12(4), 429; https://doi.org/10.3390/mi12040429 - 14 Apr 2021
Cited by 6 | Viewed by 2611
Abstract
Lower warp is required for the single crystal silicon wafers sawn by a fixed diamond wire saw with the thinness of a silicon wafer. The residual stress in the surface layer of the silicon wafer is the primary reason for warp, which is [...] Read more.
Lower warp is required for the single crystal silicon wafers sawn by a fixed diamond wire saw with the thinness of a silicon wafer. The residual stress in the surface layer of the silicon wafer is the primary reason for warp, which is generated by the phase transitions, elastic-plastic deformation, and non-uniform distribution of thermal energy during wire sawing. In this paper, an experiment of multi-wire sawing single crystal silicon is carried out, and the Raman spectra technique is used to detect the phase transitions and residual stress in the surface layer of the silicon wafers. Three different wire speeds are used to study the effect of wire speed on phase transition and residual stress of the silicon wafers. The experimental results indicate that amorphous silicon is generated during resin bonded diamond wire sawing, of which the Raman peaks are at 178.9 cm−1 and 468.5 cm−1. The ratio of the amorphous silicon surface area and the surface area of a single crystal silicon, and the depth of amorphous silicon layer increases with the increasing of wire speed. This indicates that more amorphous silicon is generated. There is both compressive stress and tensile stress on the surface layer of the silicon wafer. The residual tensile stress is between 0 and 200 MPa, and the compressive stress is between 0 and 300 MPa for the experimental results of this paper. Moreover, the residual stress increases with the increase of wire speed, indicating more amorphous silicon generated as well. Full article
(This article belongs to the Special Issue Diamond: Materials, Devices and Applications)
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18 pages, 3484 KiB  
Article
Fabrication and Characterization of Single-Crystal Diamond Membranes for Quantum Photonics with Tunable Microcavities
by Julia Heupel, Maximilian Pallmann, Jonathan Körber, Rolf Merz, Michael Kopnarski, Rainer Stöhr, Johann Peter Reithmaier, David Hunger and Cyril Popov
Micromachines 2020, 11(12), 1080; https://doi.org/10.3390/mi11121080 - 4 Dec 2020
Cited by 12 | Viewed by 4520
Abstract
The development of quantum technologies is one of the big challenges in modern research. A crucial component for many applications is an efficient, coherent spin–photon interface, and coupling single-color centers in thin diamond membranes to a microcavity is a promising approach. To structure [...] Read more.
The development of quantum technologies is one of the big challenges in modern research. A crucial component for many applications is an efficient, coherent spin–photon interface, and coupling single-color centers in thin diamond membranes to a microcavity is a promising approach. To structure such micrometer thin single-crystal diamond (SCD) membranes with a good quality, it is important to minimize defects originating from polishing or etching procedures. Here, we report on the fabrication of SCD membranes, with various diameters, exhibiting a low surface roughness down to 0.4 nm on a small area scale, by etching through a diamond bulk mask with angled holes. A significant reduction in pits induced by micromasking and polishing damages was accomplished by the application of alternating Ar/Cl2 + O2 dry etching steps. By a variation of etching parameters regarding the Ar/Cl2 step, an enhanced planarization of the surface was obtained, in particular, for surfaces with a higher initial surface roughness of several nanometers. Furthermore, we present the successful bonding of an SCD membrane via van der Waals forces on a cavity mirror and perform finesse measurements which yielded values between 500 and 5000, depending on the position and hence on the membrane thickness. Our results are promising for, e.g., an efficient spin–photon interface. Full article
(This article belongs to the Special Issue Diamond: Materials, Devices and Applications)
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Review

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30 pages, 7005 KiB  
Review
Spin-Mechanics with Nitrogen-Vacancy Centers and Trapped Particles
by Maxime Perdriat, Clément Pellet-Mary, Paul Huillery, Loïc Rondin and Gabriel Hétet
Micromachines 2021, 12(6), 651; https://doi.org/10.3390/mi12060651 - 1 Jun 2021
Cited by 23 | Viewed by 5657
Abstract
Controlling the motion of macroscopic oscillators in the quantum regime has been the subject of intense research in recent decades. In this direction, opto-mechanical systems, where the motion of micro-objects is strongly coupled with laser light radiation pressure, have had tremendous success. In [...] Read more.
Controlling the motion of macroscopic oscillators in the quantum regime has been the subject of intense research in recent decades. In this direction, opto-mechanical systems, where the motion of micro-objects is strongly coupled with laser light radiation pressure, have had tremendous success. In particular, the motion of levitating objects can be manipulated at the quantum level thanks to their very high isolation from the environment under ultra-low vacuum conditions. To enter the quantum regime, schemes using single long-lived atomic spins, such as the electronic spin of nitrogen-vacancy (NV) centers in diamond, coupled with levitating mechanical oscillators have been proposed. At the single spin level, they offer the formidable prospect of transferring the spins’ inherent quantum nature to the oscillators, with foreseeable far-reaching implications in quantum sensing and tests of quantum mechanics. Adding the spin degrees of freedom to the experimentalists’ toolbox would enable access to a very rich playground at the crossroads between condensed matter and atomic physics. We review recent experimental work in the field of spin-mechanics that employ the interaction between trapped particles and electronic spins in the solid state and discuss the challenges ahead. Our focus is on the theoretical background close to the current experiments, as well as on the experimental limits, that, once overcome, will enable these systems to unleash their full potential. Full article
(This article belongs to the Special Issue Diamond: Materials, Devices and Applications)
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22 pages, 4512 KiB  
Review
Recent Advances in Single Crystal Diamond Device Fabrication for Photonics, Sensing and Nanomechanics
by Dipti Rani, Oliver Roman Opaluch and Elke Neu
Micromachines 2021, 12(1), 36; https://doi.org/10.3390/mi12010036 - 30 Dec 2020
Cited by 12 | Viewed by 5815
Abstract
In the last two decades, the use of diamond as a material for applications in nanophotonics, optomechanics, quantum information, and sensors tremendously increased due to its outstanding mechanical properties, wide optical transparency, and biocompatibility. This has been possible owing to advances in methods [...] Read more.
In the last two decades, the use of diamond as a material for applications in nanophotonics, optomechanics, quantum information, and sensors tremendously increased due to its outstanding mechanical properties, wide optical transparency, and biocompatibility. This has been possible owing to advances in methods for growth of high-quality single crystal diamond (SCD), nanofabrication methods and controlled incorporation of optically active point defects (e.g., nitrogen vacancy centers) in SCD. This paper reviews the recent advances in SCD nano-structuring methods for realization of micro- and nano-structures. Novel fabrication methods are discussed and the different nano-structures realized for a wide range of applications are summarized. Moreover, the methods for color center incorporation in SCD and surface treatment methods to enhance their properties are described. Challenges in the upscaling of SCD nano-structure fabrication, their commercial applications and future prospects are discussed. Full article
(This article belongs to the Special Issue Diamond: Materials, Devices and Applications)
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