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Micromachines
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Micro-Resonators: The Quest for Superior Performance, II
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Micro-Resonators: The Quest for Superior Performance, II

A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "A：Physics".

Deadline for manuscript submissions: closed (15 April 2021) | Viewed by 8906

Special Issue Editor

Prof. Dr. Reza Abdolvand

E-Mail Website
Guest Editor
Dynamic Microsystems Lab, Department of Electrical and Computer Engineering, University of Central Florida, Orlando, FL 32816, USA
Interests: MEMS/NEMS; resonant sensors; IR sensors; bio-sensors
Special Issues, Collections and Topics in MDPI journals

Special Issue Information

Microelectromechanical resonators are no longer solely a subject of research in university and government labs; they have found a variety of applications at industrial scale, where their market is predicted to grow steadily. Nevertheless, many barriers to enhance their performance and further spread their application remain to be overcome. In this Special Issue, we will focus our attention to some of the persistent challenges of micro-/nano-resonators such as nonlinearity, temperature stability, acceleration sensitivity, limits of quality factor, and failure modes that require a more in-depth understanding of the physics of vibration at small scale. The goal is to seek innovative solutions that take advantage of unique material properties and original designs to push the performance of micro-resonators beyond what is conventionally achievable. Contributions from academia discussing less-known characteristics of micro-resonators and from industry depicting the challenges of large-scale implementation of resonators are encouraged with the hopes of further stimulating the growth of this field, which is rich with fascinating physics and challenging problems.

Prof. Dr. Reza Abdolvand
Guest Editor

Manuscript Submission Information

Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.

Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Micromachines is an international peer-reviewed open access monthly journal published by MDPI.

Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 2600 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.

Keywords

  • Micro-resonator
  • Nonlinearity
  • Temperature stability
  • Loss mechanism
  • Failure

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Published Papers (3 papers)

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Research

10 pages, 2310 KiB  
Article
Research on Trimming Frequency-Increasing Technology for Quartz Crystal Resonator Using Laser Etching
by Jun-Lin Zhang, Shuang Liao, Cheng Chen, Xiu-Tao Yang, Sheng-Ao Lin, Feng Tan, Bing Li, Wen-Wu Wang, Zheng-Xiang Zhong and Guang-Gen Zeng
Micromachines 2021, 12(8), 894; https://doi.org/10.3390/mi12080894 - 28 Jul 2021
Cited by 5 | Viewed by 2339
Abstract
A quartz crystal resonator (QCR) is an indispensable electronic component in the field of the modern electronics industry. By designing and depositing electrodes of different shapes and thicknesses on a quartz wafer with a certain fundamental frequency, the desired target frequency can be [...] Read more.
A quartz crystal resonator (QCR) is an indispensable electronic component in the field of the modern electronics industry. By designing and depositing electrodes of different shapes and thicknesses on a quartz wafer with a certain fundamental frequency, the desired target frequency can be obtained. Affected by factors such as the deposition equipment, mask, wafer size and placement position, it is difficult to accurately obtain the target frequency at a given time, especially for mass-produced QCRs. In this work, a laser with a wavelength of 532 nm was used to thin the electrodes of a QCR with a fundamental frequency of 10 MHz. The electrode surface was etched through a preset processing pattern to form a processing method of local thinning of the electrode surface. At the same time, the effect of laser etching on silicon dioxide and resonator performance was analyzed. Satisfactory trimming frequency-increasing results were achieved, such as a frequency modulation accuracy of 1 ppm, frequency distribution with good consistency and equivalent parameters with small changes, by the laser partial etching of the resonator electrode. However, when the surface electrode was etched into using through-holes, the attenuation amplitude of the equivalent parameter became larger, especially in terms of the quality factor (Q), which decreased from 63 K to 1 K, and some resonators which had a serious frequency drift of >40%. In this case, a certain number of QCRs were no longer excited to vibrate, which was due to the disappearance of the piezoelectric effect caused by the local thermal phase change in the quartz wafer. Full article
(This article belongs to the Special Issue Micro-Resonators: The Quest for Superior Performance, II)
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12 pages, 4046 KiB  
Article
On the Performance Evaluation of Commercial SAW Resonators by Means of a Direct and Reliable Equivalent-Circuit Extraction
by Giovanni Gugliandolo, Zlatica Marinković, Giuseppe Campobello, Giovanni Crupi and Nicola Donato
Micromachines 2021, 12(3), 303; https://doi.org/10.3390/mi12030303 - 14 Mar 2021
Cited by 12 | Viewed by 3240
Abstract
Nowadays, surface acoustic wave (SAW) resonators are attracting growing attention, owing to their widespread applications in various engineering fields, such as electronic, telecommunication, automotive, chemical, and biomedical engineering. A thorough assessment of SAW performance is a key task for bridging the gap between [...] Read more.
Nowadays, surface acoustic wave (SAW) resonators are attracting growing attention, owing to their widespread applications in various engineering fields, such as electronic, telecommunication, automotive, chemical, and biomedical engineering. A thorough assessment of SAW performance is a key task for bridging the gap between commercial SAW devices and practical applications. To contribute to the accomplishment of this crucial task, the present paper reports the findings of a new comparative study that is based on the performance evaluation of different commercial SAW resonators by using scattering (S-) parameter measurements coupled with a Lorentzian fitting and an accurate modelling technique for the straightforward extraction of a lumped-element equivalent-circuit representation. The developed investigation thus provides ease and reliability when choosing the appropriate commercial device, depending on the requirements and constraints of the given sensing application. This paper deals with the performance evaluation of commercial surface acoustic wave (SAW) resonators by means of scattering (S-) parameter measurements and an equivalent-circuit model extracted using a reliable modeling procedure. The studied devices are four TO-39 packaged two-port resonators with different nominal operating frequencies: 418.05, 423.22, 433.92, and 915 MHz. The S-parameter characterization was performed locally around the resonant frequencies of the tested SAW resonators by using an 8753ES Agilent vector network analyzer (VNA) and a home-made calibration kit. The reported measurement-based study has allowed for the development of a comprehensive and detailed comparative analysis of the performance of the investigated SAW devices. The characterization and modelling procedures are fully automated with a user-friendly graphical user interface (GUI) developed in the Python environment, thereby making the experimental analysis faster and more efficient. Full article
(This article belongs to the Special Issue Micro-Resonators: The Quest for Superior Performance, II)
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Graphical abstract

20 pages, 4072 KiB  
Article
High-Fidelity Harmonic Generation in Optical Micro-Resonators Using BFGS Algorithm
by Özüm Emre Aşırım, Alim Yolalmaz and Mustafa Kuzuoğlu
Micromachines 2020, 11(7), 686; https://doi.org/10.3390/mi11070686 - 15 Jul 2020
Cited by 7 | Viewed by 2503
Abstract
Harmonic generation is an attractive research field that finds a variety of application areas. However, harmonic generation within a medium of micron-scale interaction length limits the magnitude of nonlinear coupling and leads to poor harmonic generation efficiency. In this study, we present a [...] Read more.
Harmonic generation is an attractive research field that finds a variety of application areas. However, harmonic generation within a medium of micron-scale interaction length limits the magnitude of nonlinear coupling and leads to poor harmonic generation efficiency. In this study, we present a constrained non-linear programming approach based on the Quasi-Newton Broyden–Fletcher–Goldfarb–Shanno (BFGS) algorithm to obtain high-fidelity harmonic generation in optical micro-resonators. Using this approach, one can achieve high-intensity harmonic generation in a simple Fabry–Perot type optical micro-resonator. The generation of super-intense harmonics at a typical ultraviolet (UV)-ablation frequency of 820 THz and at pure yellow-light (515 THz) is investigated in particular. Moreover, we achieved more than 98% accuracy compared to well-known theoretical results. Our approach enables the design of highly efficient microscale harmonic generators to be used in integrated photonic devices. Full article
(This article belongs to the Special Issue Micro-Resonators: The Quest for Superior Performance, II)
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