Piezoelectric Transducers: Materials, Devices and Applications

A topical collection in Micromachines (ISSN 2072-666X).

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Collection Editor
Microsystems, Actuators and Sensors Lab, INAMOL-Universidad de Castilla-La Mancha, 45071 Toledo, Spain
Interests: MEMS/NEMS; piezoelectric microsystems; integrated sensors and transducers; miniaturization of instrumentation for applications in chemistry; food technology; robotics; biotechnology and IoT
Special Issues, Collections and Topics in MDPI journals

Topical Collection Information

Dear Colleagues,

Advances in the miniaturization of sensors, actuators, and smart systems are receiving substantial industrial attention, and a wide variety of transducers have been made commercially available or possess the high potential to impact emerging markets. It is now possible to substitute existing products based on bulk materials with those with a reduced size, lower cost, and higher performance in the automotive, environment, food, robotics, medicine, biotechnology and communications fields, with potential for manufacturing using advanced silicon integrated circuit technology or alternative additive techniques from the milli- to nano-scale.

In this Topical Collection focused on piezoelectric transducers, a wide range of topics are covered, including the design, fabrication, characterization, packaging, and system integration or final applications of transducers based on milli/micro/nano-electro-mechanical systems:

  • Materials research oriented towards piezoelectric transducers and intelligent systems.
  • Processes and fabrication technologies for piezoelectric sensors and actuators.
  • Modeling, design, and simulation of piezoelectric transducer devices.
  • Devices and circuits for the Internet of Things focused on piezoelectric transducer applications.
  • Resonant and traveling-wave piezoelectric sensors and actuators.
  • Ultrasonic transducers, energy harvesters, RF MEMS/NEMS, motors, transformers, electrooptic devices, nano-positioning systems, vibration control, chemical sensors, biomedical and healthcare transducers and other applications based on piezoelectric materials.
  • Calibration, characterization, and testing techniques.
  • Reliability and failure analysis.
  • System integration, interface electronics, and power consumption.
  • Applications and markets, control and measurement systems.

Prof. Dr. Jose Luis Sanchez-Rojas
Collection Editor

Manuscript Submission Information

Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the collection website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.

Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Micromachines is an international peer-reviewed open access monthly journal published by MDPI.

Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 2600 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.

Prof. Dr. Jose Luis Sanchez-Rojas
Guest Editor

Manuscript Submission Information

Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the collection website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.

Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Micromachines is an international peer-reviewed open access monthly journal published by MDPI.

Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 2600 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.

Keywords

  • piezoelectric devices
  • sensors
  • actuators
  • MEMS
  • NEMS
  • smart systems
  • microsystems
  • miniaturization
  • polymers
  • additive manufacturing

Published Papers (6 papers)

2024

Jump to: 2023

15 pages, 3521 KiB  
Article
Fabrication of Radial Array Transducers Using 1-3 Composite via a Bending and Superposition Technique
by Chong Li, Jing Zhu and Ruimin Chen
Micromachines 2024, 15(11), 1363; https://doi.org/10.3390/mi15111363 - 11 Nov 2024
Viewed by 571
Abstract
Piezoelectric composite materials, combining the advantages of both piezoelectric materials and polymers, have been extensively used in ultrasonic transducers. However, the pitch size of radial array ultrasonic transducers normally exceeds one wavelength, which limits their performance. In order to minimize grating lobes of [...] Read more.
Piezoelectric composite materials, combining the advantages of both piezoelectric materials and polymers, have been extensively used in ultrasonic transducers. However, the pitch size of radial array ultrasonic transducers normally exceeds one wavelength, which limits their performance. In order to minimize grating lobes of current radial transducers and then increase their imaging resolution, a 2.5 MHz 1-3 composite radial array transducer with 64 elements and 600 μm pitch was designed and fabricated by combining flexible circuit board and using a bending-and-superposition method. All the array elements were connected and actuated via the customized circuit board which is thin and soft. The kerf size is set to be 1/3 wavelength. PZT-5H/epoxy 1-3 composite was used as an active material because it exhibits an ultrahigh electromechanical coupling coefficient (kt = 0.74), a very low mechanical quality factor (Qm = 11), and relatively low acoustic impedance (Zc = 13.43 MRayls). The developed radial array transducer exhibited a center frequency of 2.72 MHz, an average −6 dB bandwidth of 36%, an insertion loss of 31.86 dB, and a crosstalk of −26.56 dB between the adjacent elements near the center frequency. These results indicate that the bending-and-superposition method is an effective way to fabricate radial array transducers by binding flexible circuit boards. Furthermore, the utilization of tailored flexible circuitry boards presents an effective approach for realizing reductions in crosstalk level (CTL). Full article
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32 pages, 2950 KiB  
Review
A Review on Resonant MEMS Electric Field Sensors
by Guijie Wang, Pengfei Yang, Zhaozhi Chu, Lifang Ran, Jianhua Li, Bo Zhang and Xiaolong Wen
Micromachines 2024, 15(11), 1333; https://doi.org/10.3390/mi15111333 - 31 Oct 2024
Viewed by 715
Abstract
Electric field sensors (EFSs) are widely used in various fields, particularly in accurately assessing atmospheric electric fields and high-voltage power lines. Precisely detecting electric fields enhances the accuracy of weather forecasting and contributes to the safe operation of power grids. This paper comprehensively [...] Read more.
Electric field sensors (EFSs) are widely used in various fields, particularly in accurately assessing atmospheric electric fields and high-voltage power lines. Precisely detecting electric fields enhances the accuracy of weather forecasting and contributes to the safe operation of power grids. This paper comprehensively reviews the development of micro-electromechanical system (MEMS) resonant EFSs, including theoretical analysis, working principles, and applications. MEMS resonant EFSs have developed into various structures over the past decades. They have been reported to measure electric field strength by detecting changes in the induced charge on the electrodes. Significant advancements include diverse driving and sensing structures, along with improved dynamic range, sensitivity, and resolution. Recently, mode localization has gained attention and has been applied to electric field sensing. This paper reviews the performances and structures of MEMS resonant EFSs over recent decades and highlights recent advances in weakly coupled resonant EFSs, offering comprehensive guidance for researchers. Full article
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12 pages, 10071 KiB  
Article
A Self-Propelled Linear Piezoelectric Micro-Actuator Inspired by the Movement Patterns of Aquatic Beetles
by Xinjie Wang and Gen Wang
Micromachines 2024, 15(10), 1197; https://doi.org/10.3390/mi15101197 - 27 Sep 2024
Viewed by 668
Abstract
The locomotion mechanisms and structural characteristics of insects in nature offer new perspectives and solutions for designing miniature actuators. Inspired by the underwater movement of aquatic beetles, this paper presents a bidirectional self-propelled linear piezoelectric micro-actuator (SLPMA), whose maximum size in three dimensions [...] Read more.
The locomotion mechanisms and structural characteristics of insects in nature offer new perspectives and solutions for designing miniature actuators. Inspired by the underwater movement of aquatic beetles, this paper presents a bidirectional self-propelled linear piezoelectric micro-actuator (SLPMA), whose maximum size in three dimensions is currently recognized as the smallest known of the self-propelled piezoelectric linear micro-actuators. Through the superposition of two bending vibration modes, the proposed actuator generates an elliptical motion trajectory at its driving feet. The size was determined as 15 mm × 12.8 mm × 5 mm after finite element analysis (FEA) through modal and transient simulations. A mathematical model was established to analyze and validate the feasibility of the proposed design. Finally, a prototype was fabricated, and an experimental platform was constructed to test the driving characteristics of the SLPMA. The experimental results showed that the maximum no-load velocity and maximum carrying load of the prototype in the forward motion were 17.3 mm/s and 14.8 mN, respectively, while those in the backward motion were 20.5 mm/s and 15.9 mN, respectively. Full article
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14 pages, 3575 KiB  
Article
Comprehensive Noise Modeling of Piezoelectric Charge Accelerometer with Signal Conditioning Circuit
by Ghulam Ali and Faisal Mohd-Yasin
Micromachines 2024, 15(2), 283; https://doi.org/10.3390/mi15020283 - 17 Feb 2024
Cited by 1 | Viewed by 1994
Abstract
This paper reports on noise modeling of a piezoelectric charge accelerometer with a signal conditioning circuit. The charge output is converted into voltage and amplified using a JFET operational amplifier that has high input resistance and low noise. The noise sources in the [...] Read more.
This paper reports on noise modeling of a piezoelectric charge accelerometer with a signal conditioning circuit. The charge output is converted into voltage and amplified using a JFET operational amplifier that has high input resistance and low noise. The noise sources in the whole system include electrical and mechanical thermal noises of the accelerometer, thermal noises of resistors, and voltage and current noises of the operational amplifier. Noise gain of each source is derived from small signal circuit analysis. It is found that the feedback resistor of the operational amplifier is a major source of noise in low frequencies, whereas electrical thermal noise of the accelerometer dominates the rest of spectrum. This method can be used to pair a highly sensitive sensor with a single JFET operational amplifier instead of a multi-stage signal conditioning circuit. Full article
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2023

Jump to: 2024

16 pages, 7497 KiB  
Article
A Single Oscillator-Excited Piezoelectric Actuator with Internal Contact Teeth
by Die Fang, Zhiyi Wen, Zhixin Geng, Xiaopin Hu, Leon Kaswango, Jia Cao, Xiaoniu Li and Dawei Wu
Micromachines 2024, 15(1), 47; https://doi.org/10.3390/mi15010047 - 26 Dec 2023
Cited by 1 | Viewed by 1307
Abstract
The tail rotor of a helicopter, a crucial component, traditionally relies on a complex drive mode involving reducers and transmission gears. This conventional setup, with its lengthy transmission chain and numerous components, hinders miniaturization efforts. In response to this challenge, our paper presents [...] Read more.
The tail rotor of a helicopter, a crucial component, traditionally relies on a complex drive mode involving reducers and transmission gears. This conventional setup, with its lengthy transmission chain and numerous components, hinders miniaturization efforts. In response to this challenge, our paper presents a novel piezoelectric drive approach. Our objective was to suggest an innovative design capable of minimizing the components involved in the tail rotor drive. This design can be adjusted in size according to specific requirements and is effective up to a specified speed. Moreover, it facilitates the process of miniaturization and integration. The piezoelectric actuator’s stator comprises an ultrasonic amplitude transformer, a ring, and three drive teeth. Utilizing the rod-like structure of the tail brace, the actuator is simplified by adhering ceramic sheets to it. The rotary piezoelectric actuator combines the first longitudinal mode of a rod with torus bending modes. The drive teeth then amplify the ring’s displacement, facilitating rotor rotation. The resonant frequency and modal shape of the actuator were determined using the finite element method. Furthermore, an investigation was conducted to analyze the influence of the drive teeth positioning on the motion trajectory at the contact point. Theoretically, we infer that the declination angle of the drive tooth is a crucial parameter for achieving high speeds. To test our idea, we built three prototype stators with different drive tooth declination angles. Our actuator stands out for its cost-effectiveness, structural simplicity, compatibility with harmonic signals, and ease of miniaturization. It can be considered for the drive of the tail rotor of a microhelicopter. Full article
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17 pages, 7390 KiB  
Article
A Robust Triboelectric Impact Sensor with Carbon Dioxide Precursor-Based Calcium Carbonate Layer for Slap Match Application
by Inkyum Kim, Hyunwoo Cho, Narasimharao Kitchamsetti, Jonghyeon Yun, Jeongmin Lee, Wook Park and Daewon Kim
Micromachines 2023, 14(9), 1778; https://doi.org/10.3390/mi14091778 - 17 Sep 2023
Cited by 3 | Viewed by 1538
Abstract
As an urgent international challenge, the sudden change in climate due to global warming needs to be addressed in the near future. This can be achieved through a reduction in fossil fuel utilization and through carbon sequestration, which reduces the concentration of CO [...] Read more.
As an urgent international challenge, the sudden change in climate due to global warming needs to be addressed in the near future. This can be achieved through a reduction in fossil fuel utilization and through carbon sequestration, which reduces the concentration of CO2 in the atmosphere. In this study, a self-sustainable impact sensor is proposed through implementing a triboelectric nanogenerator with a CaCO3 contact layer fabricated via a CO2 absorption method. The triboelectric polarity of CaCO3 with the location between the polyimide and the paper and the effects of varying the crystal structure are investigated first. The impact sensing characteristics are then confirmed at various input frequencies and under applied forces. Further, the high mechanical strength and strong adherence of CaCO3 on the surface of the device are demonstrated through enhanced durability compared to the unmodified device. For the intended application, the as-fabricated sensor is used to detect the turning state of the paper Ddakji in a slap match game using a supervised learning algorithm based on a support vector machine presenting a high classification accuracy of 95.8%. The robust CaCO3-based triboelectric device can provide an eco-friendly advantage due to its self-powered characteristics for impact sensing and carbon sequestration. Full article
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