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Sensors for Optical Metrology
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Sensors for Optical Metrology

A special issue of Sensors (ISSN 1424-8220). This special issue belongs to the section "Physical Sensors".

Deadline for manuscript submissions: closed (20 April 2021) | Viewed by 12393

Special Issue Editor

Prof. Dr. Han Haitjema

E-Mail Website
Guest Editor
Department of Mechanical Engineering, KU Leuven, Celestijnenlaan 300, 3001 Leuven, Belgium
Interests: dimensional metrology; interferometry; surface roughness; surface filtering
Special Issues, Collections and Topics in MDPI journals

Special Issue Information

Dear Colleagues,

The aim of this Special Issue is to bring together researchers active in the research, development, calibration, and characterization of sensors that are applied in optical metrology in order to achieve the highest accuracy and, thus, the lowest uncertainty.

In the continuous development towards higher speed, lower cost, more data, smaller acquisition times, better traceability, less user intervention, and more autonomous systems, the development, characterization, and calibration of sensors for optical metrology is even more immanent than before.

Works on classical technologies, such as Fizeau interferometers and displacement laser interferometers, are welcome, as well as those based on more recent innovative techniques, such as frequency combs and optical clocks, instantaneous surface profiling, areal chromatic confocal measurements, multi-wavelength digital holography, wavefront sensors, laser distance sensors, etc. Manuscripts on the overcoming of challenges, related, for example, to in-process use of sensors for accurate surface measurements, will also be appreciated.

I cordially invite you to share your work, expertise, and insights with the optical measurement and calibration community in the form of research articles and reviews.

Dr. Han Haitjema
Guest Editor

Manuscript Submission Information

Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.

Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Sensors is an international peer-reviewed open access semimonthly journal published by MDPI.

Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 2600 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.

Keywords

  • Sensor
  • Frequency comb
  • Digital holography
  • Calibration
  • Triangulation
  • Free form optics
  • Traceability
  • Chromatic confocal sensor

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Published Papers (4 papers)

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Research

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16 pages, 3840 KiB  
Article
Assessment of Background Illumination Influence on Accuracy of Measurements Performed on Optical Coordinate Measuring Machine Equipped with Video Probe
by Wiktor Harmatys, Adam Gąska, Piotr Gąska, Maciej Gruza and Jerzy A. Sładek
Sensors 2021, 21(7), 2509; https://doi.org/10.3390/s21072509 - 3 Apr 2021
Cited by 4 | Viewed by 1969
Abstract
Currently the Coordinate Measuring Technique is facing new challenges both in terms of used methodology and a speed of measurement. More and more often modern optical systems or multisensor systems replace classic solutions. Measurement performed using the optical system is more vulnerable to [...] Read more.
Currently the Coordinate Measuring Technique is facing new challenges both in terms of used methodology and a speed of measurement. More and more often modern optical systems or multisensor systems replace classic solutions. Measurement performed using the optical system is more vulnerable to incorrect points acquisition due to such factors as an inadequate focus or parameters of applied illumination. This article examines the effect of an increasing illumination on the measurement result. A glass reference plate with marked circles and a hole plate standard were used for the measurements performed on a multi-sensor machine Zeiss O’ Inspect 442. The experiment consisted of measurements of standard objects with different values of the backlight at the maximum magnification. Such approach allows to assess the influence of controlled parameter on errors of diameter and form measurements as well as an uncertainty of measurements by determination of ellipses of point repeatability. The analysis of the obtained results shows that increasing backlight mainly affects the result of the diameter measurement. Full article
(This article belongs to the Special Issue Sensors for Optical Metrology)
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18 pages, 9129 KiB  
Article
Evaluation of the Metrological Performance of a Handheld 3D Laser Scanner Using a Pseudo-3D Ball-Lattice Artifact
by Rémi Bonin, Farbod Khameneifar and J.R.R. Mayer
Sensors 2021, 21(6), 2137; https://doi.org/10.3390/s21062137 - 18 Mar 2021
Cited by 11 | Viewed by 3640
Abstract
This paper proposes the use of a pseudo-3D ball-lattice artifact to characterize a handheld laser scanner from a metrological standpoint. The artifact allows the computation of local and global errors in measurement by using the reference-frame-independent parameters of size, form, and distance within [...] Read more.
This paper proposes the use of a pseudo-3D ball-lattice artifact to characterize a handheld laser scanner from a metrological standpoint. The artifact allows the computation of local and global errors in measurement by using the reference-frame-independent parameters of size, form, and distance within the measuring volume of the scanner, and in a single point cloud, without the need for registration. A set of tests was performed using the whole measuring volume, and three acquisition parameters, namely the orientation of the sweeps during the scans, the exposure time, and the distance to the scanner were analyzed for their effects on the accuracy of the scan data. A composite error including the errors in measuring size, form, and distance was used as a single figure of merit to characterize the performance of the scanner in relation to the data-acquisition parameters. The orientation of sweeps did not have a considerable effect on the errors. The accuracy of the scan data was strongly affected by exposure time and its interaction with the distance at which the artifact was scanned. The errors followed a quadratic trend with respect to the distance of the artifact to the scanner. The tested scanner performed best at its manufacturer’s recommended stand-off distance. Full article
(This article belongs to the Special Issue Sensors for Optical Metrology)
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12 pages, 2657 KiB  
Article
A Camera Intrinsic Matrix-Free Calibration Method for Laser Triangulation Sensor
by Xuzhan Chen, Youping Chen, Bing Chen, Zhuo He, Yunxiu Ma, Dailin Zhang and Homayoun Najjaran
Sensors 2021, 21(2), 559; https://doi.org/10.3390/s21020559 - 14 Jan 2021
Cited by 1 | Viewed by 2773
Abstract
Laser triangulation sensors (LTS) are widely used to acquire depth information in industrial applications. However, the parameters of the components, e.g., the camera, of the off-the-shelf LTS are typically unknown. This makes it difficult to recalibrate the degenerated LTS devices during regular maintenance [...] Read more.
Laser triangulation sensors (LTS) are widely used to acquire depth information in industrial applications. However, the parameters of the components, e.g., the camera, of the off-the-shelf LTS are typically unknown. This makes it difficult to recalibrate the degenerated LTS devices during regular maintenance operations. In this paper, a novel one-dimensional target-based camera intrinsic matrix-free LTS calibration method is proposed. In contrast to conventional methods that calibrate the LTS based on the precise camera intrinsic matrix, we formulate the LTS calibration as an optimization problem taking all parameters of the LTS into account, simultaneously. In this way, many pairs of the camera intrinsic matrix and the equation of the laser plane can be solved and different pairs of parameters are equivalent for displacement measurement. A closed-form solution of the position of the one-dimensional target is proposed to make the parameters of the LTS optimizable. The results of simulations and experiments show that the proposed method can calibrate the LTS without knowing the camera intrinsic matrix. In addition, the proposed approach significantly improves the displacement measurement precision of the LTS after calibration. In conclusion, the proposed method proved that the precise camera intrinsic matrix is not the necessary condition for LTS displacement measurement. Full article
(This article belongs to the Special Issue Sensors for Optical Metrology)
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Other

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9 pages, 2200 KiB  
Letter
Grating-Corner-Cube-Based Roll Angle Sensor
by Siyu Zhou, Vunam Le, Qinggai Mi and Guanhao Wu
Sensors 2020, 20(19), 5524; https://doi.org/10.3390/s20195524 - 27 Sep 2020
Cited by 8 | Viewed by 3085
Abstract
This paper presents a specifically designed grating-corner-cube sensor for precise roll angle measurements. Owing to the diffraction characteristics of the transmission grating and reflection characteristics of the corner cube, two spatially separated parallel beams are naturally constructed. Through differential detection of the positions [...] Read more.
This paper presents a specifically designed grating-corner-cube sensor for precise roll angle measurements. Owing to the diffraction characteristics of the transmission grating and reflection characteristics of the corner cube, two spatially separated parallel beams are naturally constructed. Through differential detection of the positions of two parallel beams, we experimentally demonstrate the possibility of a precise roll angle measurement at a high refresh rate. A performance evaluation of the proposed technique indicates a stability of 0.46 arcsec over 5 min. Compared with a commercial autocollimator over a range of 500 arcsec, the residuals are maintained within ±2 arcsec with a standard deviation of 1.37 arcsec. Furthermore, a resolution of 0.8 arcsec can be achieved using the proposed method. The developed compact roll angle sensor has potential applications in academic and industrial fields. Full article
(This article belongs to the Special Issue Sensors for Optical Metrology)
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