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Micromachines
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MEMS Inertial Device
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MEMS Inertial Device

A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "E：Engineering and Technology".

Deadline for manuscript submissions: closed (31 July 2023) | Viewed by 19945

Printed Edition Available!
A printed edition of this Special Issue is available here.

Special Issue Editor

Prof. Dr. Huiliang Cao

E-Mail Website
Guest Editor
Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 038507, China
Interests: MEMS; gyroscope; extreme environment sensing technology
Special Issues, Collections and Topics in MDPI journals

Special Issue Information

Dear Colleagues,

MEMS inertial devices are the most widely used component of MEMS sensors, including MEMS gyroscopes and MEMS accelerometers. It has the advantages of a small size, light weight, low cost, mass production and good impact resistance. It has important application value and broad application prospects in the national economy, national defense and military fields. The development of the current information intelligent era has brought new development opportunities for MEMS inertial devices, so that MEMS inertial devices have entered a new development stage of higher accuracy and higher reliability. Accordingly, this Special Issue seeks to showcase research papers, short communications, and review articles that focus on (1) microstructure optimization design of MEMS inertial devices, (2) MEMS inertial device measurements and control systems, (3) MEMS inertial device manufacturing technology, (4) the integrated application of MEMS inertial devices.

We look forward to receiving your submissions!

Prof. Dr. Huiliang Cao
Guest Editor

Manuscript Submission Information

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Keywords

  • MEMS inertial device
  • MEMS inertial device controlling method
  • inertial device signal processing
  • MEMS inertial device modeling and simulation
  • MEMS gyroscope
  • MEMS accelerometer

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Related Special Issue

Published Papers (12 papers)

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Editorial

Jump to: Research

4 pages, 183 KiB  
Editorial
Editorial for the Special Issue on Micro-Electromechanical System Inertial Devices
by Huiliang Cao
Micromachines 2023, 14(12), 2134; https://doi.org/10.3390/mi14122134 - 21 Nov 2023
Viewed by 1060
Abstract
Micro-electromechanical systems (MEMS) are miniature systems comprising micro-mechanical sensors, actuators, and microelectronic circuits [...] Full article
(This article belongs to the Special Issue MEMS Inertial Device)

Research

Jump to: Editorial

20 pages, 7459 KiB  
Article
Virtual Coriolis-Force-Based Mode-Matching Micromachine-Optimized Tuning Fork Gyroscope without a Quadrature-Nulling Loop
by Yixuan Wu, Weizheng Yuan, Yanjun Xue, Honglong Chang and Qiang Shen
Micromachines 2023, 14(9), 1704; https://doi.org/10.3390/mi14091704 - 31 Aug 2023
Cited by 1 | Viewed by 1350
Abstract
A VCF-based mode-matching micromachine-optimized tuning fork gyroscope is proposed to not only maximize the scale factor of the device, but also avoid use of an additional quadrature-nulling loop to prevent structure complexity, pick-up electrode occupation, and coupling with a mode-matching loop. In detail, [...] Read more.
A VCF-based mode-matching micromachine-optimized tuning fork gyroscope is proposed to not only maximize the scale factor of the device, but also avoid use of an additional quadrature-nulling loop to prevent structure complexity, pick-up electrode occupation, and coupling with a mode-matching loop. In detail, a mode-matching, closed-loop system without a quadrature-nulling loop is established, and the corresponding convergence and matching error are quantitatively analyzed. The optimal straight beam of the gyro structure is then modeled to significantly reduce the quadrature coupling. The test results show that the frequency split is narrowed from 20 Hz to 0.014 Hz. The scale factor is improved 20.6 times and the bias instability (BI) is suppressed 3.28 times. The observed matching accuracy demonstrates that a mode matching system without a quadrature suppression loop is feasible and that the proposed device represents a competitive design for a mode-matching gyroscope. Full article
(This article belongs to the Special Issue MEMS Inertial Device)
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10 pages, 7402 KiB  
Article
Research on Optical Fiber Ring Resonator Q Value and Coupling Efficiency Optimization
by Shengkun Li, Xiaowen Tian and Sining Tian
Micromachines 2023, 14(9), 1680; https://doi.org/10.3390/mi14091680 - 28 Aug 2023
Viewed by 1233
Abstract
The coupling efficiency of the fiber ring resonator has an important influence on the scale factor of the resonant fiber gyroscope. In order to improve the scale factor of the gyroscope, the coupling efficiency of the fiber ring resonator and its influential factors [...] Read more.
The coupling efficiency of the fiber ring resonator has an important influence on the scale factor of the resonant fiber gyroscope. In order to improve the scale factor of the gyroscope, the coupling efficiency of the fiber ring resonator and its influential factors on the scale factor of the gyroscope are analyzed and tested. The results show that the coupling efficiency is affected by both the splitting ratio of the coupler and the loss in the cavity. When the coupling efficiency approaches 0.75 at the under-coupling state, the scaling factor of the gyroscope is the highest. This provides a theoretical reference and an experimental basis for the enhancement of the scaling factor of the resonant fiber gyroscope with the fiber ring resonator as the sensitive unit, providing options for multiple applications such as sea, land, sky and space. Full article
(This article belongs to the Special Issue MEMS Inertial Device)
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14 pages, 4790 KiB  
Article
Combined Temperature Compensation Method for Closed-Loop Microelectromechanical System Capacitive Accelerometer
by Guowen Liu, Yu Liu, Zhaohan Li, Zhikang Ma, Xiao Ma, Xuefeng Wang, Xudong Zheng and Zhonghe Jin
Micromachines 2023, 14(8), 1623; https://doi.org/10.3390/mi14081623 - 17 Aug 2023
Cited by 2 | Viewed by 1331
Abstract
This article describes a closed-loop detection MEMS accelerometer for acceleration measurement. This paper analyzes the working principle of MEMS accelerometers in detail and explains the relationship between the accelerometer zero bias, scale factor and voltage reference. Therefore, a combined compensation method is designed [...] Read more.
This article describes a closed-loop detection MEMS accelerometer for acceleration measurement. This paper analyzes the working principle of MEMS accelerometers in detail and explains the relationship between the accelerometer zero bias, scale factor and voltage reference. Therefore, a combined compensation method is designed via reference voltage source compensation and terminal temperature compensation of the accelerometer, which comprehensively improves the performance over a wide temperature range of the accelerometer. The experiment results show that the initial range is reduced from 3679 ppm to 221 ppm with reference voltage source compensation, zero-bias stability of the accelerometer over temperature is increased by 14.3% on average and the scale factor stability over temperature is increased by 88.2% on average. After combined compensation, one accelerometer zero-bias stability over temperature was reduced to 40 μg and the scale factor stability over temperature was reduced to 16 ppm, the average value of the zero-bias stability over temperature was reduced from 1764 μg to 36 μg, the average value of the scale factor stability over temperature was reduced from 2270 ppm to 25 ppm, the average stability of the zero bias was increased by 97.96% and the average stability of the scale factor was increased by 98.90%. Full article
(This article belongs to the Special Issue MEMS Inertial Device)
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18 pages, 10009 KiB  
Article
High-Sensitivity Piezoelectric MEMS Accelerometer for Vector Hydrophones
by Shuzheng Shi, Liyong Ma, Kai Kang, Jie Zhu, Jinjiang Hu, Hong Ma, Yongjun Pang and Zhanying Wang
Micromachines 2023, 14(8), 1598; https://doi.org/10.3390/mi14081598 - 14 Aug 2023
Cited by 2 | Viewed by 2000
Abstract
In response to the growing demand for high-sensitivity accelerometers in vector hydrophones, a piezoelectric MEMS accelerometer (PMA) was proposed, which has a four-cantilever beam integrated inertial mass unit structure, with the advantages of being lightweight and highly sensitive. A theoretical energy harvesting model [...] Read more.
In response to the growing demand for high-sensitivity accelerometers in vector hydrophones, a piezoelectric MEMS accelerometer (PMA) was proposed, which has a four-cantilever beam integrated inertial mass unit structure, with the advantages of being lightweight and highly sensitive. A theoretical energy harvesting model was established for the piezoelectric cantilever beam, and the geometric dimensions and structure of the microdevice were optimized to meet the vibration pickup conditions. The sol-gel and annealing technology was employed to prepare high-quality PZT thin films on silicon substrate, and accelerometer microdevices were manufactured by using MEMS technology. Furthermore, the MEMS accelerometer was packaged for testing on a vibration measuring platform. Test results show that the PMA has a resonant frequency of 2300 Hz. In addition, there is a good linear relationship between the input acceleration and the output voltage, with V = 8.412a − 0.212. The PMA not only has high sensitivity, but also has outstanding anti-interference ability. The accelerometer structure was integrated into a vector hydrophone for testing in a calibration system. The results show that the piezoelectric vector hydrophone (PVH) has a sensitivity of –178.99 dB@1000 Hz (0 dB = 1 V/μPa) and a bandwidth of 20~1100 Hz. Meanwhile, it exhibits a good “8” shape directivity and consistency of each channel. These results demonstrate that the piezoelectric MEMS accelerometer has excellent capabilities suitable for use in vector hydrophones. Full article
(This article belongs to the Special Issue MEMS Inertial Device)
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15 pages, 5750 KiB  
Article
Structural Design of MEMS Acceleration Sensor Based on PZT Plate Capacitance Detection
by Min Cui, Senhui Chuai, Yong Huang, Yang Liu and Jian Li
Micromachines 2023, 14(8), 1565; https://doi.org/10.3390/mi14081565 - 6 Aug 2023
Cited by 2 | Viewed by 1636
Abstract
The problem that the fuze overload signal sticks and is not easily identified by the counting layer during the high-speed intrusion of the projectile is an important factor affecting the explosion of the projectile in the specified layer. A three-pole plate dual-capacitance acceleration [...] Read more.
The problem that the fuze overload signal sticks and is not easily identified by the counting layer during the high-speed intrusion of the projectile is an important factor affecting the explosion of the projectile in the specified layer. A three-pole plate dual-capacitance acceleration sensor based on the capacitive sensor principle is constructed in this paper. The modal simulation of the sensor structure is carried out using COMSOL 6.1 simulation software, the structural parameters of the sensor are derived from the mechanical properties of the model, and finally the physical sensor is processed and fabricated using the derived structural parameters. The mechanical impact characteristics of the model under different overloads were investigated using ANSYS/LS-DYNA, and the numerical simulation of the projectile intrusion into the three-layer concrete slab was carried out using LS-DYNA. Under different overload conditions, the sensor was tested using the Machette’s hammer test and the output signal of the sensor was obtained. The output signal was analyzed. Finally, a sensor with self-powered output, high output voltage amplitude, and low spurious interference was obtained. The results show that the ceramic capacitive sensor has a reasonable structure, can reliably receive vibration signals, and has certain engineering applications in the intrusion meter layer. Full article
(This article belongs to the Special Issue MEMS Inertial Device)
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13 pages, 3919 KiB  
Article
Experimental Research of Triple Inertial Navigation System Shearer Positioning
by Cheng Lu, Shibo Wang, Kyoosik Shin, Wenbin Dong and Wenqi Li
Micromachines 2023, 14(7), 1474; https://doi.org/10.3390/mi14071474 - 23 Jul 2023
Cited by 2 | Viewed by 1276
Abstract
In order to improve the positioning accuracy of shearers, the overground experimental device based on the positioning model of TINS (Triple Inertial Navigation System) was built. The influence of TINS installation parameters on positioning accuracy was discussed through two sets of experiments: the [...] Read more.
In order to improve the positioning accuracy of shearers, the overground experimental device based on the positioning model of TINS (Triple Inertial Navigation System) was built. The influence of TINS installation parameters on positioning accuracy was discussed through two sets of experiments: the inter-INS (Inertial Navigation System) distances influence experiments and the tri-INS plane spatial position influence experiments. The results show that the positioning accuracy of the shearer is improved to a different extent under the two sets of experimental conditions. When the inter-INS distances are 0.2 m, the positioning accuracy is the highest and the positioning accuracy improvement effect is also the best. When the negative plane α3 is 45°, the positioning accuracy is the highest, and the positioning accuracy improvement effect is also the best. The analysis shows that the main factor affecting the positioning accuracy is the precision of the evaluated values outputs of TINS from EKF (Extended Kalman Filter). Considering the positioning accuracy, equipment installation convenience and so on, the optimum installation parameters are 90° (horizontal installation) α3 for the positive plane and 0.2 m inter-INS distances. Full article
(This article belongs to the Special Issue MEMS Inertial Device)
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17 pages, 10894 KiB  
Article
A New Dual-Mass MEMS Gyroscope Fault Diagnosis Platform
by Rang Cui, Tiancheng Ma, Wenjie Zhang, Min Zhang, Longkang Chang, Ziyuan Wang, Jingzehua Xu, Wei Wei and Huiliang Cao
Micromachines 2023, 14(6), 1177; https://doi.org/10.3390/mi14061177 - 31 May 2023
Cited by 1 | Viewed by 1834
Abstract
MEMS gyroscopes are one of the core components of inertial navigation systems. The maintenance of high reliability is critical for ensuring the stable operation of the gyroscope. Considering the production cost of gyroscopes and the inconvenience of obtaining a fault dataset, in this [...] Read more.
MEMS gyroscopes are one of the core components of inertial navigation systems. The maintenance of high reliability is critical for ensuring the stable operation of the gyroscope. Considering the production cost of gyroscopes and the inconvenience of obtaining a fault dataset, in this study, a self-feedback development framework is proposed, in which a dualmass MEMS gyroscope fault diagnosis platform is designed based on MATLAB/Simulink simulation, data feature extraction, and classification prediction algorithm and real data feedback verification. The platform integrates the dualmass MEMS gyroscope Simulink structure model and the measurement and control system, and reserves various algorithm interfaces for users to independently program, which can effectively identify and classify seven kinds of signals of the gyroscope: normal, bias, blocking, drift, multiplicity, cycle and internal fault. After feature extraction, six algorithms, ELM, SVM, KNN, NB, NN, and DTA, were respectively used for classification prediction. The ELM and SVM algorithms had the best effect, and the accuracy of the test set was up to 92.86%. Finally, the ELM algorithm is used to verify the actual drift fault dataset, and all of them are successfully identified. Full article
(This article belongs to the Special Issue MEMS Inertial Device)
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15 pages, 5988 KiB  
Article
A Self-Oscillating Driving Circuit for Low-Q MEMS Vibratory Gyroscopes
by Tian Han, Guanshi Wang, Changchun Dong, Xiaolin Jiang, Mingyuan Ren and Zhu Zhang
Micromachines 2023, 14(5), 1057; https://doi.org/10.3390/mi14051057 - 16 May 2023
Viewed by 1796
Abstract
This article establishes a circuit model with which to analyze the difficulty of auto-gain control driving for low-Q micromechanical gyroscopes at room temperature and normal pressure. It also proposes a driving circuit based on frequency modulation to eliminate the same-frequency coupling between the [...] Read more.
This article establishes a circuit model with which to analyze the difficulty of auto-gain control driving for low-Q micromechanical gyroscopes at room temperature and normal pressure. It also proposes a driving circuit based on frequency modulation to eliminate the same-frequency coupling between the drive signal and displacement signal using a second harmonic demodulation circuit. The results of the simulation indicate that a closed-loop driving circuit system based on the frequency modulation principle can be established within 200 ms with a stable average frequency of 4504 Hz and a frequency deviation of 1 Hz. After the system was stabilized, the root mean square of the simulation data was taken, and the frequency jitter was 0.0221 Hz. Full article
(This article belongs to the Special Issue MEMS Inertial Device)
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15 pages, 6910 KiB  
Article
Temperature Drift Compensation for Four-Mass Vibration MEMS Gyroscope Based on EMD and Hybrid Filtering Fusion Method
by Zhong Li, Yuchen Cui, Yikuan Gu, Guodong Wang, Jian Yang, Kai Chen and Huiliang Cao
Micromachines 2023, 14(5), 971; https://doi.org/10.3390/mi14050971 - 28 Apr 2023
Cited by 9 | Viewed by 2000
Abstract
This paper presents an improved empirical modal decomposition (EMD) method to eliminate the influence of the external environment, accurately compensate for the temperature drift of MEMS gyroscopes, and improve their accuracy. This new fusion algorithm combines empirical mode decomposition (EMD), a radial basis [...] Read more.
This paper presents an improved empirical modal decomposition (EMD) method to eliminate the influence of the external environment, accurately compensate for the temperature drift of MEMS gyroscopes, and improve their accuracy. This new fusion algorithm combines empirical mode decomposition (EMD), a radial basis function neural network (RBF NN), a genetic algorithm (GA), and a Kalman filter (KF). First, the working principle of a newly designed four-mass vibration MEMS gyroscope (FMVMG) structure is given. The specific dimensions of the FMVMG are also given through calculation. Second, finite element analysis is carried out. The simulation results show that the FMVMG has two working modes: a driving mode and a sensing mode. The resonant frequency of the driving mode is 30,740 Hz, and the resonant frequency of the sensing mode is 30,886 Hz. The frequency separation between the two modes is 146 Hz. Moreover, a temperature experiment is performed to record the output value of the FMVMG, and the proposed fusion algorithm is used to analyse and optimise the output value of the FMVMG. The processing results show that the EMD-based RBF NN+GA+KF fusion algorithm can compensate for the temperature drift of the FMVMG effectively. The final result indicates that the random walk is reduced from 99.608°/h/Hz1/2 to 0.967814°/h/Hz1/2, and the bias stability is decreased from 34.66°/h to 3.589°/h. This result shows that the algorithm has strong adaptability to temperature changes, and its performance is significantly better than that of an RBF NN and EMD in compensating for the FMVMG temperature drift and eliminating the effect of temperature changes. Full article
(This article belongs to the Special Issue MEMS Inertial Device)
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18 pages, 7056 KiB  
Article
High-G MEMS Accelerometer Calibration Denoising Method Based on EMD and Time-Frequency Peak Filtering
by Chenguang Wang, Yuchen Cui, Yang Liu, Ke Li and Chong Shen
Micromachines 2023, 14(5), 970; https://doi.org/10.3390/mi14050970 - 28 Apr 2023
Cited by 4 | Viewed by 1795
Abstract
In order to remove noise generated during the accelerometer calibration process, an accelerometer denoising method based on empirical mode decomposition (EMD) and time-frequency peak filtering (TFPF) is proposed in this paper. Firstly, a new design of the accelerometer structure is introduced and analyzed [...] Read more.
In order to remove noise generated during the accelerometer calibration process, an accelerometer denoising method based on empirical mode decomposition (EMD) and time-frequency peak filtering (TFPF) is proposed in this paper. Firstly, a new design of the accelerometer structure is introduced and analyzed by finite element analysis software. Then, an algorithm combining EMD and TFPF is proposed for the first time to deal with the noise of the accelerometer calibration process. Specific steps taken are to remove the intrinsic mode function (IMF) component of the high frequency band after the EMD decomposition, and then to use the TFPF algorithm to process the IMF component of the medium frequency band; meanwhile, the IMF component of the low frequency band is reserved, and finally the signal is reconstructed. The reconstruction results show that the algorithm can effectively suppress the random noise generated during the calibration process. The results of spectrum analysis show that EMD + TFPF can effectively protect the characteristics of the original signal and that the error can be controlled within 0.5%. Finally, Allan variance is used to analyze the results of the three methods to verify the filtering effect. The results show that the filtering effect of EMD + TFPF is the most obvious, being 97.4% higher than the original data. Full article
(This article belongs to the Special Issue MEMS Inertial Device)
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12 pages, 9439 KiB  
Article
Research on a Method to Improve the Temperature Performance of an All-Silicon Accelerometer
by Guowen Liu, Yu Liu, Xiao Ma, Xuefeng Wang, Xudong Zheng and Zhonghe Jin
Micromachines 2023, 14(4), 869; https://doi.org/10.3390/mi14040869 - 18 Apr 2023
Cited by 3 | Viewed by 1468
Abstract
This paper presents a novel method for the performance of an all-silicon accelerometer by adjusting the ratio of the Si-SiO2 bonding area, and the Au-Si bonding area in the anchor zone, with the aim of eliminating stress in the anchor region. The [...] Read more.
This paper presents a novel method for the performance of an all-silicon accelerometer by adjusting the ratio of the Si-SiO2 bonding area, and the Au-Si bonding area in the anchor zone, with the aim of eliminating stress in the anchor region. The study includes the development of an accelerometer model and simulation analysis which demonstrates the stress maps of the accelerometer under different anchor–area ratios, which have a strong impact on the performance of the accelerometer. In practical applications, the deformation of the comb structure fixed by the anchor zone is influenced by the stress in the anchor region, causing a distorted nonlinear response signal. The simulation results demonstrate that when the area ratio of the Si-SiO2 anchor zone to the Au-Si anchor zone decreases to 0.5, the stress in the anchor zone decreases significantly. Experimental results reveal that the full-temperature stability of zero-bias is optimized from 133 μg to 46 μg when the anchor–zone ratio of the accelerometer decreases from 0.8 to 0.5. At the same time, the full-temperature stability of the scale factor is optimized from 87 ppm to 32 ppm. Furthermore, zero-bias full-temperature stability and scale factor full-temperature stability are improved by 34.6% and 36.8%, respectively. Full article
(This article belongs to the Special Issue MEMS Inertial Device)
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