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Surface Acoustic Wave and Bulk Acoustic Wave Sensors

A special issue of Sensors (ISSN 1424-8220). This special issue belongs to the section "Physical Sensors".

Deadline for manuscript submissions: closed (30 November 2017) | Viewed by 117844

Special Issue Editors


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Guest Editor
Institute for Electronics Engineering, Friedrich-Alexander-University Erlangen-Nuremberg, Germany
Interests: BAW; SAW; RF MEMS; packaging technologies
Special Issues, Collections and Topics in MDPI journals

E-Mail Website
Guest Editor
Chair of Measurement and Control Systems, Center of Energy Technology (ZET), Universität Bayreuth, Universitätsstraße 30, D-95447 Bayreuth, Germany
Interests: microacoustics; SAW; nondestructive evaluation (NDE); electrical impedance spectroscopy (EIS); electrical capacitance tomography (ECT); RF-based condition monitoring; in situ measurement
Special Issues, Collections and Topics in MDPI journals

E-Mail Website
Guest Editor
Institute for Electronics Engineering, Friedrich-Alexander University Erlangen-Nürnberg, 91058 Erlangen, Germany
Interests: microwave theory and techniques; microwave acoustics; sensor and communication systems
Special Issues, Collections and Topics in MDPI journals

Special Issue Information

Dear Colleagues,

It has been known for almost four decades that surface acoustic wave (SAW) and, more recently, bulk acoustic wave (BAW) devices can be used as sensors for a multitude of measurements. Physical, chemical, or biological sensors, based on microacoustics, show some distinct advantages compared to other technologies: They are mainly based on oxide ceramics and metals and, thus, can withstand higher temperatures than silicon. Their output signals such as frequency and phase lend themselves well to digital measurement; and they are typically operated at frequencies also used in mobile communications and can be interrogated wirelessly. However, there do not exist many commercial systems based on SAW or BAW sensors. This Special Issue serves to explore the state-of-the-art of the technology and to identify possible routes for further work that might help to overcome innovation hurdles. Papers dealing with one or several of the following aspects will be considered for publication:

  • Theory, modeling, simulation
  • Physical sensors
  • Chemical and/or biological sensors
  • Multisensors, sensor arrays
  • Device design
  • Reproducible fabrication
  • Suppression of disturbance effects, operation under harsh conditions
  • Instrumentation, system characterization, integration with actuators
  • Novel applications (Internet of things, smart factory, process engineering, microfluidics, etc.)
  • Other

Dr. Amelie Hagelauer
Prof. Dr. Gerhard Fischerauer
Prof. Dr. Robert Weigel
Guest Editors

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Keywords

  • SAW/BAW sensors
  • SAW/BAW sensor modeling and signal processing
  • signal conditioning
  • design and fabrication
  • novel applications

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Published Papers (16 papers)

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Research

Jump to: Review

14 pages, 14667 KiB  
Article
Dynamically Rough Boundary Scattering Effect on a Propagating Continuous Acoustical Wave in a Circular Pipe with Flow
by Anna V. Romanova, Kirill V. Horoshenkov and Anton Krynkin
Sensors 2018, 18(4), 1098; https://doi.org/10.3390/s18041098 - 5 Apr 2018
Cited by 3 | Viewed by 4981
Abstract
The pattern of the free surface of the turbulent flow in a partially filled circular pipe contains information on the underlying hydraulic processes. However, the roughness of the free surface of flow and its temporal variation in a pipe is a dynamic and [...] Read more.
The pattern of the free surface of the turbulent flow in a partially filled circular pipe contains information on the underlying hydraulic processes. However, the roughness of the free surface of flow and its temporal variation in a pipe is a dynamic and non-stationary process that is difficult to measure directly. This work examines a new acoustic method that is used to study the characteristics of the free surface roughness under controlled laboratory conditions. The acoustic method makes use of a continuous sine wave that is transmitted through the air above the turbulent flow of water over a section of the pipe instrumented with an array of wave probes and microphones. The results obtained for a representative range of flow regimes and variety of pipe bed conditions illustrate that it is possible to unambiguously relate variations in the recorded acoustic field to the standard deviation in the free surface roughness and mean flow depth. These variations are clearly linked to the hydraulic friction factor of the pipe, which is shown to be related to airborne acoustic data obtained non-invasively. Full article
(This article belongs to the Special Issue Surface Acoustic Wave and Bulk Acoustic Wave Sensors)
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11 pages, 5603 KiB  
Article
Real Time Cascade Impactor Based On Surface Acoustic Wave Delay Lines for PM10 and PM2.5 Mass Concentration Measurement
by Lyes Djoumi, Meddy Vanotti and Virginie Blondeau-Patissier
Sensors 2018, 18(1), 255; https://doi.org/10.3390/s18010255 - 16 Jan 2018
Cited by 17 | Viewed by 7989
Abstract
In this research, Surface Acoustic Wave (SAW) sensors are combined with a cascade impactor to perform real time PM10 and PM2.5 mass concentration measurements. The SAW sensors consist of 125 MHz delay lines based on Love waves propagating on an AT-cut quartz substrate. [...] Read more.
In this research, Surface Acoustic Wave (SAW) sensors are combined with a cascade impactor to perform real time PM10 and PM2.5 mass concentration measurements. The SAW sensors consist of 125 MHz delay lines based on Love waves propagating on an AT-cut quartz substrate. The Love waves are guided on the substrate’s surface using a silica layer. SAW sensors themselves are not capable to discriminate particles by their size, therefore, particle separation based on aerodynamic diameter is achieved using a 3 Lpm dedicated cascade impactor. The latter was designed to integrate the SAW sensors which are monitored using a phase shift measurement. The collected particles impact on the acoustic sensor’s surface inducing a gravimetric effect that modifies the acoustic wave propagation conditions. The resulted phase shift allows the measurement of the mass deposited on the sensitive zone. The novel cascade impactor with SAW sensors as particle collecting stages is exposed to different aerosols in the 0–150 μg/m3 concentration range and proved to be able to detect and differentiate particles based on their size in real time. The system’s response was compared to a commercial optical counter based on light scattering technology and was found to be in good agreement with it. Full article
(This article belongs to the Special Issue Surface Acoustic Wave and Bulk Acoustic Wave Sensors)
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20 pages, 7532 KiB  
Article
Acoustic Transducers as Passive Cooperative Targets for Wireless Sensing of the Sub-Surface World: Challenges of Probing with Ground Penetrating RADAR
by Jean-Michel Friedt, Gilles Martin, Gwenhael Goavec-Mérou, David Rabus, Sébastien Alzuaga, Lilia Arapan, Marianne Sagnard and Émile Carry
Sensors 2018, 18(1), 246; https://doi.org/10.3390/s18010246 - 16 Jan 2018
Cited by 10 | Viewed by 5168
Abstract
Passive wireless transducers are used as sensors, probed by a RADAR system. A simple way to separate the returning signal from the clutter is to delay the response, so that the clutter decays before the echoes are received. This can be achieved by [...] Read more.
Passive wireless transducers are used as sensors, probed by a RADAR system. A simple way to separate the returning signal from the clutter is to delay the response, so that the clutter decays before the echoes are received. This can be achieved by introducing a fixed delay in the sensor design. Acoustic wave transducers are ideally suited as cooperative targets for passive, wireless sensing. The incoming electromagnetic pulse is converted into an acoustic wave, propagated on the sensor substrate surface, and reflected as an electromagnetic echo. According to a known law, the acoustic wave propagation velocity depends on the physical quantity under investigation, which is then measured as an echo delay. Both conversions between electromagnetic and acoustic waves are based on the piezoelectric property of the substrate of which the sensor is made. Investigating underground sensing, we address the problems of using GPR (Ground-Penetrating RADAR) for probing cooperative targets. The GPR is a good candidate for this application because it provides an electromagnetic source and receiver, as well as echo recording tools. Instead of designing dedicated electronics, we choose a commercially available, reliable and rugged instrument. The measurement range depends on parameters like antenna radiation pattern, radio spectrum matching between GPR and the target, antenna-sensor impedance matching and the transfer function of the target. We demonstrate measurements at depths ranging from centimeters to circa 1 m in a sandbox. In our application, clutter rejection requires delays between the emitted pulse and echoes to be longer than in the regular use of the GPR for geophysical measurements. This delay, and the accuracy needed for sensing, challenge the GPR internal time base. In the GPR units we used, the drift turns out to be incompatible with the targeted application. The available documentation of other models and brands suggests that this is a rather general limitation. We solved the problem by replacing the analog ramp generator defining the time base with a fully digital solution, whose time accuracy and stability relies on a quartz oscillator. The resulting stability is acceptable for sub-surface cooperative sensor measurement. Full article
(This article belongs to the Special Issue Surface Acoustic Wave and Bulk Acoustic Wave Sensors)
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3615 KiB  
Article
Single Interdigital Transducer Approach for Gravimetrical SAW Sensor Applications in Liquid Environments
by Vu Hoa Nguyen, Corinna Kaulen, Ulrich Simon and Uwe Schnakenberg
Sensors 2017, 17(12), 2931; https://doi.org/10.3390/s17122931 - 17 Dec 2017
Cited by 11 | Viewed by 6476
Abstract
Surface acoustic wave (SAW) devices are well known for mass-sensitive sensor applications. In biosensing applications, chemical and biochemically evoked binding processes on surfaces are detected in liquid environments using delay line or resonator sensor configurations, preferably in combination with the appropriate microfluidic devices. [...] Read more.
Surface acoustic wave (SAW) devices are well known for mass-sensitive sensor applications. In biosensing applications, chemical and biochemically evoked binding processes on surfaces are detected in liquid environments using delay line or resonator sensor configurations, preferably in combination with the appropriate microfluidic devices. All configurations share the common feature of analyzing the transmission characteristic of the propagating SAW. In this paper, a novel SAW-based impedance sensor type is introduced which uses only one interdigital transducer (IDT), simultaneously as the SAW generator and the sensor element. Here, the input port reflection coefficient S11 is measured at the IDT instead of the commonly used S21 transmission forward gain parameter. Thus, a sharp and distinct peak of the S11 spectrum is obtained, enabling a comfortable direct readout of the sensor signal. Proof of the concept was gained by analyzing the specific binding of the 4-mercaptophenylacetic acid gold nanoparticles (MPA–AuNP) directly to the IDT surface. The corresponding binding kinetic of the MPA–AuNP on the functionalized gold surface has been analyzed and a sensitivity of 7.4 mΩ nM−1 has been determined. Full article
(This article belongs to the Special Issue Surface Acoustic Wave and Bulk Acoustic Wave Sensors)
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4082 KiB  
Article
Highly Selective Polypyrrole MIP-Based Gravimetric and Electrochemical Sensors for Picomolar Detection of Glyphosate
by Zouhour Mazouz, Seyfeddine Rahali, Najla Fourati, Chouki Zerrouki, Nadia Aloui, Mahamadou Seydou, Nourdin Yaakoubi, Mohamed M. Chehimi, Ali Othmane and Rafik Kalfat
Sensors 2017, 17(11), 2586; https://doi.org/10.3390/s17112586 - 9 Nov 2017
Cited by 55 | Viewed by 7225
Abstract
There is a global debate and concern about the use of glyphosate (Gly) as an herbicide. New toxicological studies will determine its use in the future under new strict conditions or its replacement by alternative synthetic or natural herbicides. In this context, we [...] Read more.
There is a global debate and concern about the use of glyphosate (Gly) as an herbicide. New toxicological studies will determine its use in the future under new strict conditions or its replacement by alternative synthetic or natural herbicides. In this context, we designed biomimetic polymer sensing layers for the selective molecular recognition of Gly. Towards this end, complementary surface acoustic wave (SAW) and electrochemical sensors were functionalized with polypyrrole (PPy)-imprinted polymer for the selective detection of Gly. Their corresponding limits of detection were on the order of 1 pM, which are among the lowest values ever reported in literature. The relevant dissociation constants between PPy and Gly were estimated at [Kd1 = (0.7 ± 0.3) pM and Kd2 = (1.6 ± 1.4) µM] and [Kd1 = (2.4 ± 0.9) pM and Kd2 = (0.3 ± 0.1) µM] for electrochemical and gravimetric measurements, respectively. Quantum chemical calculations permitted to estimate the interaction energy between Gly and PPy film: ΔE = −145 kJ/mol. Selectivity and competitivity tests were investigated with the most common pesticides. This work conclusively shows that gravimetric and electrochemical results indicate that both MIP-based sensors are perfectly able to detect and distinguish glyphosate without any ambiguity. Full article
(This article belongs to the Special Issue Surface Acoustic Wave and Bulk Acoustic Wave Sensors)
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3316 KiB  
Article
Long-Term Stability of Polymer-Coated Surface Transverse Wave Sensors for the Detection of Organic Solvent Vapors
by Ullrich Stahl, Achim Voigt, Marian Dirschka, Nicole Barié, Christiane Richter, Ansgar Waldbaur, Friederike J. Gruhl, Bastian E. Rapp, Michael Rapp and Kerstin Länge
Sensors 2017, 17(11), 2529; https://doi.org/10.3390/s17112529 - 3 Nov 2017
Cited by 18 | Viewed by 5792
Abstract
Arrays with polymer-coated acoustic sensors, such as surface acoustic wave (SAW) and surface transverse wave (STW) sensors, have successfully been applied for a variety of gas sensing applications. However, the stability of the sensors’ polymer coatings over a longer period of use has [...] Read more.
Arrays with polymer-coated acoustic sensors, such as surface acoustic wave (SAW) and surface transverse wave (STW) sensors, have successfully been applied for a variety of gas sensing applications. However, the stability of the sensors’ polymer coatings over a longer period of use has hardly been investigated. We used an array of eight STW resonator sensors coated with different polymers. This sensor array was used at semi-annual intervals for a three-year period to detect organic solvent vapors of three different chemical classes: a halogenated hydrocarbon (chloroform), an aliphatic hydrocarbon (octane), and an aromatic hydrocarbon (xylene). The sensor signals were evaluated with regard to absolute signal shifts and normalized signal shifts leading to signal patterns characteristic of the respective solvent vapors. No significant time-related changes of sensor signals or signal patterns were observed, i.e., the polymer coatings kept their performance during the course of the study. Therefore, the polymer-coated STW sensors proved to be robust devices which can be used for detecting organic solvent vapors both qualitatively and quantitatively for several years. Full article
(This article belongs to the Special Issue Surface Acoustic Wave and Bulk Acoustic Wave Sensors)
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2761 KiB  
Article
Ratiometric Decoding of Pheromones for a Biomimetic Infochemical Communication System
by Guangfen Wei, Sanju Thomas, Marina Cole, Zoltán Rácz and Julian W. Gardner
Sensors 2017, 17(11), 2489; https://doi.org/10.3390/s17112489 - 30 Oct 2017
Cited by 7 | Viewed by 5434
Abstract
Biosynthetic infochemical communication is an emerging scientific field employing molecular compounds for information transmission, labelling, and biochemical interfacing; having potential application in diverse areas ranging from pest management to group coordination of swarming robots. Our communication system comprises a chemoemitter module that encodes [...] Read more.
Biosynthetic infochemical communication is an emerging scientific field employing molecular compounds for information transmission, labelling, and biochemical interfacing; having potential application in diverse areas ranging from pest management to group coordination of swarming robots. Our communication system comprises a chemoemitter module that encodes information by producing volatile pheromone components and a chemoreceiver module that decodes the transmitted ratiometric information via polymer-coated piezoelectric Surface Acoustic Wave Resonator (SAWR) sensors. The inspiration for such a system is based on the pheromone-based communication between insects. Ten features are extracted from the SAWR sensor response and analysed using multi-variate classification techniques, i.e., Linear Discriminant Analysis (LDA), Probabilistic Neural Network (PNN), and Multilayer Perception Neural Network (MLPNN) methods, and an optimal feature subset is identified. A combination of steady state and transient features of the sensor signals showed superior performances with LDA and MLPNN. Although MLPNN gave excellent results reaching 100% recognition rate at 400 s, over all time stations PNN gave the best performance based on an expanded data-set with adjacent neighbours. In this case, 100% of the pheromone mixtures were successfully identified just 200 s after they were first injected into the wind tunnel. We believe that this approach can be used for future chemical communication employing simple mixtures of airborne molecules. Full article
(This article belongs to the Special Issue Surface Acoustic Wave and Bulk Acoustic Wave Sensors)
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3475 KiB  
Article
SAW-Based Phononic Crystal Microfluidic Sensor—Microscale Realization of Velocimetry Approaches for Integrated Analytical Platform Applications
by Aleksandr Oseev, Ralf Lucklum, Mikhail Zubtsov, Marc-Peter Schmidt, Nikolay V. Mukhin and Soeren Hirsch
Sensors 2017, 17(10), 2187; https://doi.org/10.3390/s17102187 - 23 Sep 2017
Cited by 22 | Viewed by 5251
Abstract
The current work demonstrates a novel surface acoustic wave (SAW) based phononic crystal sensor approach that allows the integration of a velocimetry-based sensor concept into single chip integrated solutions, such as Lab-on-a-Chip devices. The introduced sensor platform merges advantages of ultrasonic velocimetry analytic [...] Read more.
The current work demonstrates a novel surface acoustic wave (SAW) based phononic crystal sensor approach that allows the integration of a velocimetry-based sensor concept into single chip integrated solutions, such as Lab-on-a-Chip devices. The introduced sensor platform merges advantages of ultrasonic velocimetry analytic systems and a microacoustic sensor approach. It is based on the analysis of structural resonances in a periodic composite arrangement of microfluidic channels confined within a liquid analyte. Completed theoretical and experimental investigations show the ability to utilize periodic structure localized modes for the detection of volumetric properties of liquids and prove the efficacy of the proposed sensor concept. Full article
(This article belongs to the Special Issue Surface Acoustic Wave and Bulk Acoustic Wave Sensors)
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2230 KiB  
Article
Design and Implementation of 2.45 GHz Passive SAW Temperature Sensors with BPSK Coded RFID Configuration
by Chen Fu, Yabing Ke, Min Li, Jingting Luo, Honglang Li, Guangxing Liang and Ping Fan
Sensors 2017, 17(8), 1849; https://doi.org/10.3390/s17081849 - 10 Aug 2017
Cited by 22 | Viewed by 6077
Abstract
A surface acoustic wave based passive temperature sensor capable of multiple access is investigated. Binary Phase Shift Keying (BPSK) codes of eight chips were implemented using a reflective delay line scheme on a Y-Z LiNbO3 piezoelectric substrate. An accurate simulation based on [...] Read more.
A surface acoustic wave based passive temperature sensor capable of multiple access is investigated. Binary Phase Shift Keying (BPSK) codes of eight chips were implemented using a reflective delay line scheme on a Y-Z LiNbO3 piezoelectric substrate. An accurate simulation based on the combined finite- and boundary element method (FEM/BEM) was performed in order to determine the optimum design parameters. The scaling factor ‘s’ and time delay factor ‘τ’ were extracted using signal processing techniques based on the wavelet transform of the correlation function, and then evaluated at various ambient temperatures. The scaling factor ‘s’ gave a more stable and reliable response to temperature than the time delay factor ‘τ’. Preliminary results show that the sensor response is fast and consistent subject to ambient temperature and it exhibits good linearity of 0.9992 with temperature varying from 0 to 130 °C. Full article
(This article belongs to the Special Issue Surface Acoustic Wave and Bulk Acoustic Wave Sensors)
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2569 KiB  
Article
Passive Downhole Pressure Sensor Based on Surface Acoustic Wave Technology
by Sully M. M. Quintero, Sávio W. O. Figueiredo, Victor L. Takahashi, Roberth A. W. Llerena and Arthur M. B. Braga
Sensors 2017, 17(7), 1635; https://doi.org/10.3390/s17071635 - 15 Jul 2017
Cited by 24 | Viewed by 7326
Abstract
A passive surface acoustic wave (SAW) pressure sensor was developed for real-time pressure monitoring in downhole application. The passive pressure sensor consists of a SAW resonator, which is attached to a circular metal diaphragm used as a pressure transducer. While the membrane deflects [...] Read more.
A passive surface acoustic wave (SAW) pressure sensor was developed for real-time pressure monitoring in downhole application. The passive pressure sensor consists of a SAW resonator, which is attached to a circular metal diaphragm used as a pressure transducer. While the membrane deflects as a function of pressure applied, the frequency response changes due to the variation of the SAW propagation parameters. The sensitivity and linearity of the SAW pressure sensor were measured to be 8.3 kHz/bar and 0.999, respectively. The experimental results were validated with a hybrid analytical–numerical analysis. The good results combined with the robust design and packaging for harsh environment demonstrated it to be a promising sensor for industrial applications. Full article
(This article belongs to the Special Issue Surface Acoustic Wave and Bulk Acoustic Wave Sensors)
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4284 KiB  
Article
Effect of Distributed Mass on the Node, Frequency, and Sensitivity of Resonant-Mode Based Cantilevers
by Kewei Zhang, Qianke Zhu and Zhe Chen
Sensors 2017, 17(7), 1621; https://doi.org/10.3390/s17071621 - 13 Jul 2017
Cited by 5 | Viewed by 4747
Abstract
We derived an analytical expression for a resonant-mode based bi-layered cantilever with distributed mass load. The behavior of mode of vibration, nodal position, frequency shift, as well as sensitivity under different mass load distributions was theoretically studied. The theoretical results suggested that asymmetric [...] Read more.
We derived an analytical expression for a resonant-mode based bi-layered cantilever with distributed mass load. The behavior of mode of vibration, nodal position, frequency shift, as well as sensitivity under different mass load distributions was theoretically studied. The theoretical results suggested that asymmetric mass load distribution leads to the shift of nodes as well as the sensitive regions of a resonant-mode based cantilever. n − 1 local maximal sensitivities and n − 1 local minimal sensitivities are observed when the cantilever vibrates in the nth-order resonance. The maximal sensitivity is found at the first local maximal sensitivity and the behavior of mass load length as a function of the maximal sensitivity follows the rule of an exponent decaying function. The sensitivity increases as the load mass increases for the same mass load distribution, but the corresponding slopes are different. Full article
(This article belongs to the Special Issue Surface Acoustic Wave and Bulk Acoustic Wave Sensors)
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6280 KiB  
Article
Measuring Torque and Temperature in a Rotating Shaft Using Commercial SAW Sensors
by Diogo Silva, Joana C. Mendes, António B. Pereira, François Gégot and Luís N. Alves
Sensors 2017, 17(7), 1547; https://doi.org/10.3390/s17071547 - 2 Jul 2017
Cited by 30 | Viewed by 7834
Abstract
Real-time monitoring of torque in a rotating shaft is not easy to implement with technologies such as optic fiber sensors or strain gages. Surface acoustic wave (SAW) sensors are wireless and passive and can be used to monitor strain in moving parts. Commercial [...] Read more.
Real-time monitoring of torque in a rotating shaft is not easy to implement with technologies such as optic fiber sensors or strain gages. Surface acoustic wave (SAW) sensors are wireless and passive and can be used to monitor strain in moving parts. Commercial solutions (sensors, antennas and interrogation unit) can easily be purchased from some companies; however, they are not customized and may not meet the specificity of the measurements. In order to evaluate the adequacy of commercial off-the-shelf (COTS) solutions, temperature and strain sensors fabricated by SENSeOR (Besançon, France) were mounted on a load cell. The sensors were calibrated using a thermal chamber and a universal testing machine. The load cell was then assembled together with a steel shaft that rotated at different speeds inside an oven. The commercial antennas were replaced with an RF (radio frequency) coupler and the sensors were interrogated with the commercial interrogation unit. The influence of rotation in the accuracy on the measurements, as well as the adequacy of the sensors structure, was evaluated. It can be concluded that SAW sensors can be used to measure temperature or torque in a rotating environment; however, some customization of the components is required in order to overcome the limitations posed by COTS sensing solutions. Full article
(This article belongs to the Special Issue Surface Acoustic Wave and Bulk Acoustic Wave Sensors)
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2829 KiB  
Article
Surface Acoustic Wave Sensor with Pd/ZnO Bilayer Structure for Room Temperature Hydrogen Detection
by Cristian Viespe and Dana Miu
Sensors 2017, 17(7), 1529; https://doi.org/10.3390/s17071529 - 29 Jun 2017
Cited by 39 | Viewed by 6199
Abstract
A Surface Acoustic Wave (SAW) hydrogen sensor with a Pd/ZnO bilayer structure for room temperature sensing operation has been obtained by Pulsed Laser Deposition (PLD). The sensor structure combines a Pd layer with optimized porosity for maximizing mass effects, with the large acoustoelectric [...] Read more.
A Surface Acoustic Wave (SAW) hydrogen sensor with a Pd/ZnO bilayer structure for room temperature sensing operation has been obtained by Pulsed Laser Deposition (PLD). The sensor structure combines a Pd layer with optimized porosity for maximizing mass effects, with the large acoustoelectric effect at the Pd/ZnO interface. The large acoustoelectric effect is due to the fact that ZnO has a surface conductivity which is highly sensitive to chemisorbed gases. The sensitivity of the sensor was determined for hydrogen concentrations between 0.2% and 2%. The limit of detection (LOD) of the bilayer sensor was about 4.5 times better than the single ZnO films and almost twice better than single Pd films. Full article
(This article belongs to the Special Issue Surface Acoustic Wave and Bulk Acoustic Wave Sensors)
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8155 KiB  
Article
Measurement of Rayleigh Wave Beams Using Angle Beam Wedge Transducers as the Transmitter and Receiver with Consideration of Beam Spreading
by Shuzeng Zhang, Xiongbing Li and Hyunjo Jeong
Sensors 2017, 17(6), 1449; https://doi.org/10.3390/s17061449 - 20 Jun 2017
Cited by 19 | Viewed by 8480
Abstract
A theoretical model, along with experimental verification, is developed to describe the generation, propagation and reception of a Rayleigh wave using angle beam wedge transducers. The Rayleigh wave generation process using an angle beam wedge transducer is analyzed, and the actual Rayleigh wave [...] Read more.
A theoretical model, along with experimental verification, is developed to describe the generation, propagation and reception of a Rayleigh wave using angle beam wedge transducers. The Rayleigh wave generation process using an angle beam wedge transducer is analyzed, and the actual Rayleigh wave sound source distributions are evaluated numerically. Based on the reciprocity theorem and considering the actual sound source, the Rayleigh wave beams are modeled using an area integral method. The leaky Rayleigh wave theory is introduced to investigate the reception of the Rayleigh wave using the angle beam wedge transducers, and the effects of the wave spreading in the wedge and transducer size are considered in the reception process. The effects of attenuations of the Rayleigh wave and leaky Rayleigh wave are discussed, and the received wave results with different sizes of receivers are compared. The experiments are conducted using two angle beam wedge transducers to measure the Rayleigh wave, and the measurement results are compared with the predictions using different theoretical models. It is shown that the proposed model which considers the wave spreading in both the sample and wedges can be used to interpret the measurements reasonably. Full article
(This article belongs to the Special Issue Surface Acoustic Wave and Bulk Acoustic Wave Sensors)
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Review

Jump to: Research

29 pages, 2141 KiB  
Review
Reader Architectures for Wireless Surface Acoustic Wave Sensors
by Fabian Lurz, Thomas Ostertag, Benedict Scheiner, Robert Weigel and Alexander Koelpin
Sensors 2018, 18(6), 1734; https://doi.org/10.3390/s18061734 - 28 May 2018
Cited by 44 | Viewed by 8780
Abstract
Wireless surface acoustic wave (SAW) sensors have some unique features that make them promising for industrial metrology. Their decisive advantage lies in their purely passive operation and the wireless readout capability allowing the installation also at particularly inaccessible locations. Furthermore, they are small, [...] Read more.
Wireless surface acoustic wave (SAW) sensors have some unique features that make them promising for industrial metrology. Their decisive advantage lies in their purely passive operation and the wireless readout capability allowing the installation also at particularly inaccessible locations. Furthermore, they are small, low-cost and rugged components on highly stable substrate materials and thus particularly suited for harsh environments. Nevertheless, a sensor itself does not carry out any measurement but always requires a suitable excitation and interrogation circuit: a reader. A variety of different architectures have been presented and investigated up to now. This review paper gives a comprehensive survey of the present state of reader architectures such as time domain sampling (TDS), frequency domain sampling (FDS) and hybrid concepts for both SAW resonators and reflective SAW delay line sensors. Furthermore, critical performance parameters such as measurement accuracy, dynamic range, update rate, and hardware costs of the state of the art in science and industry are presented, compared and discussed. Full article
(This article belongs to the Special Issue Surface Acoustic Wave and Bulk Acoustic Wave Sensors)
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6845 KiB  
Review
Surface Acoustic Wave (SAW) for Chemical Sensing Applications of Recognition Layers
by Adnan Mujahid and Franz L. Dickert
Sensors 2017, 17(12), 2716; https://doi.org/10.3390/s17122716 - 24 Nov 2017
Cited by 138 | Viewed by 17648
Abstract
Surface acoustic wave (SAW) resonators represent some of the most prominent acoustic devices for chemical sensing applications. As their frequency ranges from several hundred MHz to GHz, therefore they can record remarkably diminutive frequency shifts resulting from exceptionally small mass loadings. Their miniaturized [...] Read more.
Surface acoustic wave (SAW) resonators represent some of the most prominent acoustic devices for chemical sensing applications. As their frequency ranges from several hundred MHz to GHz, therefore they can record remarkably diminutive frequency shifts resulting from exceptionally small mass loadings. Their miniaturized design, high thermal stability and possibility of wireless integration make these devices highly competitive. Owing to these special characteristics, they are widely accepted as smart transducers that can be combined with a variety of recognition layers based on host-guest interactions, metal oxide coatings, carbon nanotubes, graphene sheets, functional polymers and biological receptors. As a result of this, there is a broad spectrum of SAW sensors, i.e., having sensing applications ranging from small gas molecules to large bio-analytes or even whole cell structures. This review shall cover from the fundamentals to modern design developments in SAW devices with respect to interfacial receptor coatings for exemplary sensor applications. The related problems and their possible solutions shall also be covered, with a focus on emerging trends and future opportunities for making SAW as established sensing technology. Full article
(This article belongs to the Special Issue Surface Acoustic Wave and Bulk Acoustic Wave Sensors)
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